Rated Pressure Range: -100 to 100 kPa, Piping: R1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 2 Outputs, Option 1: Fixed SI Unit, Option 2: Panel Mount + Front Protection Cover, Option 3: Operating Manual Boklet, X Options: Lead Wire Length 3m

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/4, Piping Entry Direction: Bottom Side, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter for w/o Flow Adjustment

for w/o Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/4, Piping Entry Direction: Bottom Side, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/4, Piping Entry Direction: Bottom Side, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/4, Piping Entry Direction: Bottom Side, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/4, Piping Entry Direction: Bottom Side, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/4, Piping Entry Direction: Bottom Side, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter for w/Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/4, Piping Entry Direction: Bottom Side, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: w/o Lead Wire, Bracket: Bracket C, Operation Manual: -

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket C, Operation Manual: Operation Manual,

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket C, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: w/o Operation Manual, w/o Calibration Certificate

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

PFxx-OMS0001CN

200KPa 400KPa 400KPa L/Min L/Min PFMC7202(2000 L/min) kPa L/Min -69No.PF-OMS0001CN-A IN 3F.S.8cm IN OUT [%F.S.]

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

0 w !2 ASR ASF Component Parts Component Parts No. Model No.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: JT (OUT1: Analogue 1 to 5 V - OUT2: Analogue 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket