Speed Controller with

Made to Order How to Order 2 F 06 A 200 AS Lubricant: Vaseline -X12 Example) AS2002F-04A-X12 Body size Made to Order Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Push-lock type Example) AS2002F-04A-X21 * Not particle-free Applicable tubing O.D.1 Metric size Inch size 23 3.22

Rodless Cylinder for Vacuum Series CYV ø15, ø32

-X 20Data Table (1) 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner Cover Holding Screw Tightening Torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 8-18-11

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08

BP1000

Model Specifications Installation unit gauge port Pressure range Unit Regulator Code 2) Part number 3) Lower mount material Select compatible materials of construction for the gas Gas V15 V3 L 1 H V2 2 4 10 30 40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Without auto switch: 10C to 70C With auto switch: 10C to 60C (With no condensation) Ambient and fluid temperature Mounting bracket Bore size (mm) 10 16 Foot bracket Flange CJ-L016C CJK-L016C CJ-F016C CJK-F016C Piston speed Stroke length tolerance +1.0 0 50 to 400 mm/s Mounting style Grease Particle generation grade (Refer to front matter 13 for details.)

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

In-line Air Filter

500 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC77 12 0.3 MPa 30 Pressure drop [kPa] 0.1 MPa 20 0.5 MPa 10 0.7 MPa 0 0 200 400 600 Flow rate [L/min (ANR)] 4 ZFC Series Construction Component Parts Replacement Bracket Part No.

Large blow and

Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] 1,600 700 ---6 ---6 Discharge flow rate Discharge flow rate 1,400 Vacuum pressure [kPa] Vacuum pressure [kPa] 600 Vacuum pressure Vacuum pressure ---5 ---5 1,200 500 ---4 ---4 1,000 400

RB/RBL/RBQ

Selection of applicable model 78.5 94.2 110 173 188 236 393 Selection of applicable model According to Data D , the tentatively selected RB2015 satisfies Me = 260 kg < 400 kg at = 0.3. Ultimately, it will result in an operating frequency of n20 < 25, without causing a problem.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

-X 20Data Table (1) 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner Cover Holding Screw Tightening Torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 8-18-11

ELECTRIC ACTUATOR. BALL SCREW DRIVE SLIDER ACTUATOR. 3.19000 lb. A06.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

CEx-OML0058

50 40 40 100 100 300 300 200 400 500 200 400 500 D o e s t h e m o u n t e d l o a d / P i s t o n s p e e d ( /) e x c e e d t h e l o a d g i v e n i n P i s t o n s p e e d ( /) t h e d i a g r a m ? H o r i z o n t a l m o u n t i n g V e r t i c a l m o u n t i n g S e l e c t i o n ..

MHS

16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400

IDX-OM-W037

Checks and Maintenance 6.1 Specifications erature bowlItem Specification Outlet air pressure dew point 10 o C IDH410 IDH4 20 IDH A 423 Rated performance IDH6 10 ) release bushOutlet air temp IDH 6 20 IDHA 6 23 (2) Mounting of the bowl assembly Note 1 ) 2) ir flow capacity 400 L/min ANR Operating range Fluid Compressed air Amount of air processed 100 to 5 00L/min ( 600 L/min ANR Inlet

Membrane Air Dryer

0.94) 0.78 (0.91) 0.81 (0.94) 0.78 (0.91) 0.8 (0.94) Mass kg (With bracket) Model Specifications IDG60LA IDG75LA IDG100LA IDG60SA IDG75SA IDG100SA Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 224 308 400

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

Clean Exhaust Filter

(Initial conditions) 200 0.05 32 SFE1 SFE3 Inlet pressure/Back pressure [MPa] 150 SFE5 0.04 25 100 SFE4 SFE7 95 20 0.03 50 10 0 0.02 0 100 200 300 400 500 600 700 800 Cylinder driving speed [mm/s] AN 0.01 AMC Example) Bore size: 32, Driving speed: 400 mm/s, Supply pressure: 0.5 MPaG 1. From the graph, exhaust flow rate is found to be 95 L/min (ANR). 2.

Speed Controller with One-touch Fittings Series AS In-line Type 1

In-line type How to Order JIS Symbol 1F 12 K 400 AS Option Body size Nil K N None Hexagonal lock nut Electroless nickel plated If more than one option is required, write option part numbers in the order of K, N. M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.