Process Valve

4 1 1 1 2 32 5 1 4 1 2 Nil: Non-locking push type 40 6 Valve size 5 to 7 50 7 Note) Air operated only Note) Semi-standard Electrical entry/With light/surge voltage suppressor Valve size 1 to 4 Valve size 5 to 7 Electrical entry Symbol Table (1) Applicable Fluids VNAA (Valve material: NBR seal) VNAB (Valve material: FKM seal) VNAC (Valve material: EPR seal) GS Grommet with surge voltage suppressor

Coolant Valve

D 5 D 23 Q VO307 CE-compliant Coil rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only 4 4 5 6 5 6 Manual override

EXxx-OMV0018_ENG

Solenoid on side B 1 3 5 7 9 17 29 31 No. Designation Description 1 3 5 7 1 1 5 7 Bit No.

Process Pump

Precautions for installation -P.5 3. Description and function of individual port -P.5 4. How to use -P5. to 6 5. Maintenance and check -P.6 6. Specification and how to order P.6 to 7 7. Discharge capability P.8 to 9 8. Troubleshooting P.10 to 11 9. Construction and operating principle P.12 10. Operating principle -P.12 11.

PAB-OM-K008

Type 3 Air operated Nill Rc N NPT Fitting type F G Symbol Fitting type 1 LQ1 Fitting size IN side OUT side Symbol 19 5 5 6 1925 6 5 2519 25 6 6 - 7.

VN-OMJ0001

4042 Rc1 1/2 4850 Rc2 4850 ( ( ( ( 5, 6, 7 5, 6, 7 5, 6, 7 5, 6, 7 ) ) ) ) G1/2 M3 0.50.6 Nm 1) 2) 3) 30 1 1) 2)1 1 0.1MPa M3 0.5 0.6 Nm 0.50.6N A-A () 5 VN*-OMJ0001-B VNB VNB VNB VNB Series Series Series Series 1 DC AC VT307 12(P1) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 2 4 4 VNB0 VNB02 VNB03 VNB1 12 () (P1) (P2) () 10 ()12(P1) 10(P2) 2 VNB01V VNB02V

High Vacuum L Type Valve

XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

CM2x-OM0230Q

AF AR 4 - 1) 5 2) 3) 5 4) 1 ISO VG-32 2-2. 1) 2) 3) 4) 5) 6 7) 5 - 8 9) , 10) 11) 3 1) P10 [2-6.] 2) 3) 4) 5) 6) 7) (40) 6 - 2-3. 1) 1 P10 [2-6.] fR Ft N () mm 1. (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) 7 - 5) 6) 7) 8) 9) 24. 1) 2) 3) 8 - 1) 2) 1.52 2 2. 2-5. ,AS 9 - 2-6. P7.1. 1.

RS2H-OM0045P

AF ,AR , , , ,1 ISO VG32. 5 , 5 8 - 3-2. 1 B 1 3 3-3. 3-4. 9 - () 3-5. ,, (-)90 , 5.2 Nm A 10 - 3-6. ,,, RS2H5079Nm RS2H63801214Nm -5 3-7. M4 M41.5Nm -6 11 - 4. A GR-S-010(10g) -7 5. -8-9 -8 -9 12 - , 3 6. 6-1. 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13 - / 6-2.

SI unit for EtherCAT

length (L) 4 1500 [mm] 5 3000 [mm] 6 5000 [mm] Item Specifications Pin No.

SI unit for PROFINET

length (L) 4 1500 [mm] 5 3000 [mm] 6 5000 [mm] Item Specifications Pin No.

Actuator Position Sensor

Heat cycles other than ordinary changes in temperature can adversely affect the position sensor. (5) Avoid accumulation of iron debris or close contact with magnetic substances.

Fan Type Ionizer

Wiring 1 5 Pin No.

Solenoid Valve

PRODUCT NAME Solenoid Valve MODEL / Series / Product Number SQ Series (Pilot Valve V100) Contents Safety Instructions -2,3 Precautions on Design -4,5 Selection -4,5 Mounting -5 Piping -5 Wiring -6 Lubrication -6 Air Supply -6 Operating Environment -7 Maintenance -7 Specific Product Precautions -8 to 10 Valve construction -11 to 14 Manifold Options and How to Increase Manifold Stations.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M3 ,M5 ,U10/32 R NPT Nil ASN N AQ Model 4 6 8 10 12 5/32"1/4" 5/16"3/8" 1/2" Applicable tubing O.D. (mm) Effective area (mm 2) IN OUT OUT EXH.

AN

to 60C 5 to 60C It can operate in temperatures between 10 to 60C if there is no risk of the moisture in the air freezing.

A

24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5

VP3145/3165/3185

(Refer to the figure below.) 4) Remove the cable gland (5) and plain washer (6) and rubber seal (7) . 2. Wiring 1) Pass them through the cable (8) in the order of cable ground (5), washer (6), rubber seal (7), and then insert into the housing (4). 2) Dimensions of the cable (8) are the figure as below.

VHS20/30/40/50

VR VH VHS Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet