Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Option: None, Power Consumption(W): Inrush: 2.5 / Holding: 1, Lead wire length(mm): 1,000, Liquid-contacting parts material: Plate: PEEK / Diaphragm: Kalrez, Function: With power-saving circuit, Subplate specifications: None, Valve Type: OUT side indicator symbol: 3,
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type,
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body Ported
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body Ported
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted Type,
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted Type,
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0~50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power Consumption
Body (A) Aluminum alloy Cover Black Aluminum alloy Black q o Body (B) Aluminum alloy Plate Black Resin Black w !0 Vane shaft Carbon steel Stainless steel Special bolt Hexagon socket head cap screw e !1 Stopper Stainless steel O ring NBR r !2 Stopper Resin Stopper packing NBR Special packing t !3 Stopper Stainless steel NBR Gasket Special packing y !
0 q Table accuracy w Size e Max. rotating torque [Nm] r Rotation angle [] Nil H Basic type 10 30 50 LER50 320 Symbol LER10 310 LER30 LER10 Type 0.3 0.2 LER30 1.2 0.8 LER50 10 6.6 Symbol Nil 2 3 K J High precision type High torque Basic External stopper: 180 External stopper: 90 t Motor cable entry y Actuator cable type u Actuator cable length [m] 8 Nil S R Nil 1 3 5 8 A B C Without cable
1 Made to Order Nil 1 3 5 Without cable 1.5 Nil D Screw mounting DIN rail mounting1 Nil X5 Standard product With magnet/switch rail 3 1 Only available for the controller types 6N and 6P 2 DIN rail is not included. Order it separately. 5 When Without controller is selected for controller types, I/O cable length cannot be selected.
RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F RY(n 3)B to Reserved RY(n 3)F Note.
RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F RY(n 3)B to Reserved RY(n 3)F Note.
Servo-on SON DICOM (Note 3) ALM Trouble RA DOCOM 3 3 3.
(A contact) D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL 0.5 0.5 0.5 0.5 3 3 0.5 3 3 3 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire None Yes (cable length 0.3m) Nil S N.O. (A contact) N.C. (B contact) N.C. (B contact) Auto switch type N.C. (B contact) None Nil N.C.
Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation
(Stations 3 and 4) VQ5300-5 1 set Valve part no. (Station 5) 1 2 3 4 5 6 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check Manual override Prefix the asterisk to the part nos. of the solenoid valve, etc.
Connecting the controller and high voltage power supply module . 3-1-5. Installing the controller and high voltage power supply module . 3-1-6. Routing of cables . 3-2. Wiring . 3-2-1. Ground the F.G. cable . 3-2-2. Connection Circuit . 3-2-3. Wiring of the AC adapter (IZT43) . 3-3. Timing chart . 4. Function . 4-1. Name of Parts . 4-1-1. Controller . 4-1-2.