Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Cv = 2.4) 50 40 JSXD30 (Port size 1/4 10 Cv = 1.9) 30 20 10 0.02 0.03 0.032 0.04 0.05 0.055 0.06 0.07 0.08 0.09 0.1 0.16 0.2 0.3 0.4 0.5 Pressure differential P = (P1 P2) [MPa] Glossary of Terms Specific Product Precautions 60 JSX/JSXm Series Specific Product Precautions 1 Be sure to read this before handling the products.

Cylinder with Lock

E2 TA TC TD TF TH TL TO TR TS TT TU TX TY TZ UW XV Z 32 MB-S03 47 62 62 12 +0.070 0 47 35 45 12 7 10 13 8.5 50 71 74 49 131 153 40 MB-S04 54 80 80 16 +0.070 0 60 45 60 17 9 12 17 10 63 77.5 97 58 150 174 50 66 80 92 16 +0.070 0 60 45 60 17 9 12 17 10 75 91 109 71 166 198 63 MB-S06 77 100 110 20 +0.084 0 80 60 70 20 11 14 22 15 90 103 130 87 179 211 80 99 100 130 20 +0.084 0 80 60 70 20 11

C95

10 12 12 16 16 130 145 155 170 190 205 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 142 160 170 190 210 230 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 73 82.5 90 97.5 110

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

45 115 20 41 10 39 45 70 48 24 125 17 162 M40 x 1.5 Up to 1800 1801 to 2000 226 18.5 M20 x 1.5 231 150 245 3/4 63 50 20 10 39 60 115 46 45 74 24 48 132 17 182 M45 x 1.5 Lube Non-lube Up to 1800 1801 to 2000 277 23 M24 x 1.5 301 180 298.5 71 60 25 12 49 1 67 140 86 56 29 55 60 20 160 225 M56 x 2 Up to 2000 2001 to 2400 330 23 M30 x 1.5 326 212 365 1 80 70 30 15 49 76 140 65 55 96 33 60 200

MXH Series Compact Slide

10 1 10 1 0.1 Weight m(kg) Weight m(kg) Weight m(kg) 20 16 10 6 20 1 20 16 16 0.1 0.01 10 10 6 6 0.01 0.001 0.1 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L(mm) Overhang L(mm) Overhang L(mm) 1 kg = 2.2046 lb 1 kg = 2.2046 lb 1 kg = 2.2046 lb Graph 5 Load eccentricity 100mm Graph 8 Load eccentricity 100mm Graph 11 Load eccentricity 100mm 1 10 10 0.1 1 Weight m(kg) Weight

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

MXS

MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 VWith stroke adjuster MXS20-10AS MXS20-20AS MXS20-30AS MXS20-40AS MXS20-50AS MXS20-75AS MXS20-100AS SMXS20A, #1 SMXS20A, #2 SMXS20A, #3 SMXS20A, #4(#4+#9) SMXS20B, #1 SMXS20B, #2 SMXS20B, #3(#3+#7) (mm) Model F 50 50 50 60 35 60 70 70 80 Z K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 2kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s

AZ1000

30 0.21 0.34 50 0.28 20 0.14 40 0.21 30 0.14 20 10 0.07 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

MRHQ

0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-VV5Q21-08C8FU2 2-position double Metal Rubber Note) Not applicable to the S kit. 2 10-VV5Q21-08C8FU2 10-VQ2100-51 10-VQ2200-51 VVQ2000-10A-1 1 set (F kit 8-station manifold base part no.) 3 sets (Single solenoid part no.) 4 sets (Double solenoid part no.) 1 set (Blanking plate part no.) 2-position double Coil voltage CE compliant 1 2 Note) 3 4 Note) 5 6 100 VAC (50/60 Hz) 200 VAC (50/60

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-VV5Q21-08C8FU2 2-position double Metal Rubber Note) Not applicable to the S kit. 2 10-VV5Q21-08C8FU2 10-VQ2100-51 10-VQ2200-51 VVQ2000-10A-1 1 set (F kit 8-station manifold base part no.) 3 sets (Single solenoid part no.) 4 sets (Double solenoid part no.) 1 set (Blanking plate part no.) 2-position double Coil voltage CE compliant 1 2 Note) 3 4 Note) 5 6 100 VAC (50/60 Hz) 200 VAC (50/60

Compact and Lightweight

60 15 60 60 Suction flow rate Air consumption 10 40 40 10 40 40 Suction flow rate 5 20 20 5 20 20 0 0 2 4 6 8 10 12 14 Supply pressure [MPa] 0 0 0 0 2 4 6 8 Supply pressure [MPa] 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH07SA ZH07LA Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

IIIIIIIIII

, 0.7-60 PSI, 1/8"NPT Ports Stepper Driven Regulator, 0.7-90 PSI, 1/8"NPT Ports Stepper Driven Regulator, 0.7-10 PSI, 10-32 Ports Stepper Driven Regulator, 0.7-30 PSI, 10-32 Ports Stepper Driven Regulator, 0.7-60 PSI, 10-32 Ports Stepper Driven Regulator, 0.7-90 PSI, 10-32 Ports Stepper Driven Regulator, 0.7-10" Hg Vac, 1/8"NPT Ports Stepper Driven Regulator, 0.7-30" Hg Vac, 1/8"NPT Ports

Prevents Micro-Bubbles

B A N.C. 17-5-7 5 Series LVC Standard Specifications LVC30 Model LVC20 LVC50 LVC60 LVC40 Metric size 10 6 19 25 12 Tubing O.D. Inch size 3/8 1/4 3/4 1 1/2 8 4 16 22 10 Orifice diameter Av x 10-6m2 40.8 8.4 144 192 60 Flow characteristics 1.7 0.35 6 8 2.5 Cv 1 Withstand pressure (MPa) 0 to 0.5 0 to 0.4 Operating pressure (MPa) N.C.

Vacuum Unit

exhaust Suction flow (High-noise reduction silencer exhaust) Vacuum pressure [kPa] 0 0 20 40 60 80 60 60 Suction flow [L/min (ANR)] 50 50 Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust/ Complex exhaust) Flow Rate Characteristics 40 40 100 Air consumption Vacuum pressure [kPa] 30 30 80 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0