Environment

-LEFS Series Clean Room Specication Model Selection LEFS SeriessPage 76 11-LEFS SeriessPage 522 Selection Procedure Step 1 Check the work loadspeed.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

7.4

C4: 4 One-touch fitting assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53 64 75 86 97 108 119 130 L2 50 62.5 75 87.5 100 112.5 125 125 137.5 150 L3 60.5 73 85.5 98 110.5 123 135.5 135.5 148 160.5 7.5 29 18 n L 11 12 13 14 15 16 17 18 19 20 L1 141 152 163 174 185 196 207 218 229 240 L2 162.5

Thermo-chiller

Displays the unit of displayed pressure (default setting: MPa). 11 Changing pressure unit Pressure unit can be changed. MPa PSI r [REMOTE] lamp Enables remote operation (start and stop) by communication.

Modular Type Lubricators Series AL

5 is attached. 949 Series AL800/900 Dimensions Semi-standard AL800/900 Metal bowl Metal bowl Port size D A B B B C B Maintenance space E IN OUT Metal bowl with level gauge With drain cock Semi-standard/Dimensions B Model Metal bowl Metal bowl with level gauge AL800 AL900 Model Port size With drain cock 297 303 306 312 D A B C E AL800 AL900 286 292 125 125 1 , 1 2 100 100 286 292 59 63 1 4

PFxx-OMJ0005CN

) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

V

ZPX Buffer Stroke Pad 40 50 63 80 100 125 25 50 75 100 Courtesy of Steven Engineering, Inc. !

Title not found

rc 1o Indcale thewnnO spec l.ar ons n the specilicalion sheet Note 4) F.r exlenal pr ol oplDn, F ndca|elhe qter.a p otsp6licaton R fordre appricabre var@s as @11 Note 5) The o!

CE

11 DC12V DC24V DC12V24V CEU5 CEU5 MODE 2 90 CEU5 4 10,11 SMC 13 CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?

Process Pump

2 12 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 84 72 60 41 7.5 45 2 x 4.5 Mounting hole Manual override pin 66 16 16 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

(Connection port center) (Connection port center) F (Bracket mounting dimensions) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket (Option) B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model Port size Rc 4 1 63 63 80 85 90 100 141

Floating Joint/Stainless Steel Type Series JS

U 0.5 B C D E F G H J M A Max. screw-in depth P Model JS10-4-070 8.5 9.5 12 1.5 4 4 7 14.4 4.7 80 M4 x 0.7 26 JS16-5-080 12 13.5 16 2 6 5 10 19 5.8 0.5 210 M5 x 0.8 34.5 JS20-8-125 M8 x 1.25 44 15.5 21 4.5 7 7.8 13 24.8 7.3 0.5 1100 JS32-10-125 M10 x 1.25 49.5 17.5 24 5 8 8.5 17 29 8.5 0.5 2500 JS40-14-150 M14 x 1.5 60 18.5 31 5 11 11.6 22 38.4 11.6 0.75 6000 JS63-18-150 M18 x 1.5 74.5

Intrinsically Safe Valve

stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19 stations 20 stations 391 L1 L2 61 80 99 118 137 156 175 194 213 232 251 270 289 308 327 346 365 384 403 49 68 87 106 125 144 163 182 201 220 239 258 277 296 315 334 353 372 36 Series 53-SY5000/7000 Manifold Options Type 41, 42 Blanking Plate Assembly Gasket Assembly Part No.

HRS100/150

Note 2) See specification table for refrigerant used in the product. 125 A

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no. NDd9 NDH10 NX R1 U1 Y-J010C 3.30.030 0.060 3.3+0.048 0 3.2 8 10 NTJ-015C 16 8 9.2 M5 x 0.8 4 Y-J016C 50.030 0.060 5+0.048 0 6.5 12 10 * A knuckle pin and retaining rings are included.

Multistage Ejector (N)ZL Series

Detent plug 8 Vacuum switch specifications P397176 Lead wire cover 11 Series (N)ZL Multistage Ejector Dimensions (mm) / Series (N)ZL212 1in = 25.4mm Scale: 40% Vacuum port 3/4 Pressure supply port 1/8 Exhaust with silencer 76 P Standard (N)ZL212 40 V 54 125 Label 188 61 P Port exhaust (N)ZL212P V Vacuum pressure gauge Exhaust with silencer Exhaust port 1 25 With vacuum pressure gauge (N

EXxx-OMN0027CN

SF BF: () (PLC) LED 27 PROFIBUS DP SF: BF PROFIBUS DP 11 SF BF SI 0126 1~125 SF BF PLC SF: BF SI PLC V_SEL PLC SI PWR LED DC24 V+10/-5 SI ~ SI 12 SI EX600-SPR1A (PNP ) EX600-SPR2A (NPN ) SI SI -49No.EX-OMN0027CN-D No. (PNPNPN) SI PWR LED DC24 V10% 13 (PNPNPN) SI PWR LED DC24 V+10/-5 PLC -50No.EX-OMN0027CN-D No.

LX Series Compact Electric Actuators

N700 silrc useries Compact Electric ctuators .Compact, Low Profile .Rigid Linear Guides .DC Stepper Motor (Optional AC Seruo Motor) Features and Benefits .pa9e 4 & 5 Product Variations .pa9e 6 & 7 Specifications/Construction/Parts List .page B Selection Chart & Duty Ratio .page 9 Kinetic Moment Allowance &Table Deflection ,.page 10 Criteria of Accelerating Speed . .page 11 How To Order.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(For M8: 0.05 Nm, For M12: 0.1 Nm) EX9-AW ES 11 14 Connector type ES M8 connector (For socket), 10 pcs.