70pvpump

Circuit example/Built-in solenoid valve Ball valve Regulator FLUID OUT AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 17-5-166 27 Series PB Process Pump: Built-in Solenoid Valve Type/ Air Operated Type (External Switching Type) Dimensions PB1000 FLUID OUT Rc 1/8 VC 11 OUT VDW 11 VQ 84 72 VX2 Mount with this surface (out port side) on top 7.5 41 60 45 VX Courtesy

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

MHZ

C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

MHZ

C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

ML1

No load 50 1000 500 The length of overrun Piston speed just before stop (mm/s) The graph above shows the relation between piston speed and overrun. (The length of overrun is changed, dependent on piston speed, load, piping conditions and control method.

Auto Switch Guide

CS1 Main circuit of switch OUT Black C76 Weight C85 DC () Blue (g) C95 D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 CP95 Lead wire length (m) 3 54 54 54 DC (+) Brown NCM 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions NCA OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DDC () Blue -X 3.4 2.5 D-Y7BW, D-Y7BWV SMC

CJ5-S

85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5

CJ5-S

85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5

CG5-S

ES20-150 B Stainless Steel Cylinder Series CJ5-S/Series CG5-S 10, 16 20, 25, 32, 40, 50, 63, 80, 100 For use in environments with water spray such as food processing machines Stainless Steel Cylinder Series CJ5-S/Series CG5-S Series CJ5-S/Series CG5-S Series CJ5-S/Series CG5-S 10, 16 20, 25, 32, 40, 50, 63, 80, 100 Uses grease for food processing machines that meets FDA (U.S.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

VM

(mm) Connection thread R H 1(P) 2(A) B S (Width across flats) Weight (g) L3 L4 L5 L6 M1 Q L1 L2 Model C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-04F-M5 18 2.0 3.4 1.2 19 49 11 21 51 13 4 29.1 31.6 55.4 52.9 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-04F-01S VHK-06F-M5 3.5 11 41 23.8 16.5 15.8 1 8 53.9 29.6 56.9 24.3 32.6 16.5 3.5 16.8 11 7.2 21 50 11 23 53 13 M5 2.0 VHK-B1A 44.5 14.5 1 27 22

AC Servo Motor Driver (MECHATROLINK-III type)

65536 H 30 1875 LEFS40 A 20 1250 B 10 625 LEFB25 S 54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 25 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control

EXxx-OMV0017-D

System setting items (example using compact Wireless Base EXW1-BMJA#) Parameter Set value Initial value I/O mapping Manual Manual Diagnostic allocation Advanced Advanced DA refresh time (sec) *1 0.1 / 0.2 / 0.5 / 1 / 2 / 5 / 10 / 30 / 60 s 1 s Output Action of Upper Communication Clear / Hold / Individual Clear Time of Wireless Communication 20 / 40 / 100/ 200 / 500 / 1,000 / 2,000 / 5,000

Multistage Ejector Series ZL112/212 1

12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

Refrigerated Air dryer Series IDU/IDF

Note 3) 200 to 240VAC is "S" specification standard. Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

CEx-OMQ0011

Nm N M1 M M3 W W2 W W4 ML2B25 10.0 1.2 3.0 200.0 58.0 65.0 100.0 ML2B32 20.0 2.4 6.0 300.0 80.0 96.0 150.0 ML2B40 40.0 4.8 12.0 500.0 106.0 140.0 250.0 ML2B25 ML2B32 ML2B40 J 0.43 0.68 1.21 18 ML2B/M1 ML2B/W1 ML2B/W1 0 0 0 Nm 0 0 0 N N 0 m/s m/s m/s ML2B/M2 ML2B/W2 ML2B/W2 N m N N m/s ML2B/M3 m/s m/s 20 ML2B/W3 ML2B/W3 10 Nm 5 3 2 1 N N m/s m/s m/s ML2B/W4 500 N 00 N

Series MXP Precision Air Slide Table

/My max. 0.3 Stroke (mm) Stroke (mm) 10 15 20 25 30 5 25 30 10 15 20 5 0.2 MXPJ6 3.5 2.6 2.3 1.4 MXP10 4.2 8.5 1.7 6.3 50 100 200 300 500 700 MXP12 9.8 17 13 4.5 Average speed Va mm/s Collision speed V mm/s MXP16 26 41 28 12 1 Nm = 0.7375 ftlbf Note) Average speed is used at static moment calculation. Collision speed is used at kinetic moment calulation.

CG5-S

27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 93 149 44 to 500 50 1/4 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 109 176 55 to 600 63 1/4 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 109 176 69 to 600 80 3/8 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 130 210 80 to 750 100 1/2 40 37 41 125 60 30

JA/JAH/JB/JS

11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-6 7 Floating Joint: Heavy Load Type Series JAH Specifications Specifications RE A B Applicable cylinder nominal thread size Maximum operating tension and compression force