SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

ITV

Count Pressure characteristics Flow characteristics Supply pressure: 0.2MPa Set pressure: 0.05MPa Relief flow characteristics Supply pressure: 0.2MPa 0.25 1.0 0.15 Output deviation factor (%F.S.) 0.20 0.5 Set pressure (MPa) Set pressure (MPa) 0.10 Set point 0.15 0.0 0.10 0.05 0.5 0.05 1.0 0 500 1000 1500 2000 0.00 0.00 0 500 1000 2000 1500 0.0 0.1 0.2 0.3 Flow rate (l/min (ANR)) Flow rate

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS32 LEKFS40 1000 1000 1000 800 800 800 L1 L1 [mm] L1 [mm] L1 [mm] 600 600 600 X 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 0 10 20 30 40 50 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 Horizontal/Bottom 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] 600 600 600 Y 400 400 400 Mer m 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 0 10 20

CG5-S

85 15 40 10 24 to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 21 109 80 22 60 to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 32 130

CJ5-S

B Cushion Rubber bumper, Air cushion REC 50 to 1000 mm/s 20 to 63 Piston speed 50 to 700 mm/s 80, 100 CX Thread tolerance JIS Class 2 st + 1.4 0 st + 1.5 0 st + 1.4 0 st + 1.5 0 Up to 1000 mm, Up to 1200 mm 20 to 63 CY Stroke length tolerance Up to 1000 mm, Up to 1500 mm 80, 100 Basic style, Axial foot style, Rod side flange style, Head side flange style, Clevis integrated style MQQ M JIS

CJ5-S

B Cushion Rubber bumper, Air cushion REC 50 to 1000 mm/s 20 to 63 Piston speed 50 to 700 mm/s 80, 100 CX Thread tolerance JIS Class 2 st + 1.4 0 st + 1.5 0 st + 1.4 0 st + 1.5 0 Up to 1000 mm, Up to 1200 mm 20 to 63 CY Stroke length tolerance Up to 1000 mm, Up to 1500 mm 80, 100 Basic style, Axial foot style, Rod side flange style, Head side flange style, Clevis integrated style MQQ M JIS

AIR CYLINDER

Graph 1Allow lateral load 1000 Lateral load to rod end (N) 100 160 125&140 10 0 500 1000 1500 2000 Stroke(mm) Judging lateral load of dead weight In case of rotating type cylinder, lateral road applies to the piston rod because of dead weight of the cylinder. It needs to be checked, if the lateral load is within the range of safety.

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

MQQ

16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

VQ5000

How to Calculate the Flow Rate SOL.A VQZ100-47-A For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

EXxx-OMQ0015CN

1000 1 V 2000 2 V 3000 3 V 4000 4 V 5000 5 V (3)(5 V-1 V)(5000-1000)1/1000 15 V 1/1000 3000 AD 1000 5000 PLC (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -32766 32767 10 5 5 20 20 -32767 32766 0 1 0 0 4 PLC : 032767 +0 +32767 PLC : 3276865535 -0 -32767 : 15 V 50001000 4VPLC 4000 -50No.EX-OMQ0015CN (1) [H.T.]

Digital Flow Switch

) [F 2] page 37 [ 1000] 1000 L/min (PFMC7202) [ 25] 25 L/min (PFMC7501) [ H_2] Hysteresis of OUT2 2 [ 50] 50 L/min (PFMC7102) [ 100] 100 L/min (PFMC7202) [F 3] [ r ES] Response time [ 1.0] 1 second page 42 [F10] [ SUb] Sub display [ oUt] Set value page 43 [F20] [ inP] External input 3 [REACUM] Accumulated flow external reset page 47 [F22] [ Fr E] Setting of analogue output 4 [ oFF] Variable

ML1

100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

AC Servo Motor Driver (MECHATROLINK-III type)

To Travel amount per 1 command pulse (P=1m) by actuator lead (L = 6mm) and pulley ratio (n1/n2 = 1/1) = 1 1048576 1 1000 Pn210 Pn20E 1 6 1/1 = 1048576 Pn210 Pn20E 6 1000 1 = 1048576 Pn210 Pn20E 6000 1 = 65536 Pn210 Pn20E 375 1 *1 For pulley ratio, refer to Lead of LECYU Operation Manual (Simplified Edition),section 4.4.1.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

(Nil) Cylinder stroke (mm) Model Lubrication Action Effective cushioning stroke (mm) Bore size (mm) 20 25 32 40 20 25 32 40 Standard stroke (mm) Auto switch mounting Cushion Port size Model 10-REC20 10-REC25 10-REC32 10-REC40 11-REC20 11-REC25 11-REC32 11-REC40 Relief type Vacuum suction type 150 to 700 45 1/8 200 to 1000 150 to 1000 60 50 Air cushion 1/4 Double acting Non-lube (Both sides

AMF

AMF150 AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 Rated flow (l/min (ANR))(1) 200 500 1000 2000 3500 6000 12000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 1, 11/2 11/2, 2 3/4, 1 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa.

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Plug-in Unit

B 23 () (+) Grey Red 11 () (+) White Red SOL. A Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Station 12 SOL. B 25 () (+) White None COM. 13 (+) () Orange Red Note) Negative COM. spec. Positive COM. spec. Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM.