Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke

AC Servo Motor Driver (Pulse input type/Positioning type)

Servo amp lifier Driver (Note 7) (Note 7) CN1 CN1 (Note 2) 24VDC RA1 (Note 4, 9) 2 OPC 9 ALM Trouble (Note 6) 1 DICOM Travel completion 10 MEND RA2 13 DOCOM (Note 9, 11) (Note 13) Ready EM1 SON MD0 8 4 3 (Note 3, 5) Forced stop 11 RD RA3 Servo-on Electromagnetic brake interlock 12 MBR RA4 Automatic/manual selection DOG (Note 9, 10, 12) 25 Proximity dog 10m max. Point table No.

LG1H

Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Top Mount LG1H20/ Without coupling LG1H21/ With coupling 3.5 3.5 LJ1 LG1 LC1 LX LC6D/LC6C Switches 95() A() A() 95() 95(150) 95(140) 30 30 A A A A Stroke Stroke Stroke Stroke 700 550 700 560 100 100 800 650 800 660 200 60 200 50 900



For details, refer to the pressure gauge guide on page 14-11-1.

RZQ

76 138.2 28 11 5 LH REC Bore size (mm) LX LY LZ X Y X Y X Y LS Full stroke LG CX LZ LX 4-LD 32 57 57 71 11.2 5.8 A + Full stroke 40 64 64 78 11.2 7 CY 50 79 78 95 14.7 8 63 95 113 16.2 9 91.5 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Front flange

NCA1

/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1

LG1H

10 56 Series LG1H Mounting Top Mount LG1H21/ With coupling 3.5 M6 bolt 8(4) x Mounting hole 6.6 or M6 A() 95() A A Stroke Stroke 95(150) 100 600 460 200 60 700 560 Long positioning hole 300 160 800 660 400 260 900 760 500 360 1000 860 30 Positioning hole 2 x 8H10 Dimensions inside ( ) are for a 100 mm stroke.

Guide Table Series MGF ø40, ø63, ø100 1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D120 -X 2011.5 48.5 + Stroke Data 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places) 73 146 8-23-11 12 Series MGF Dimensions

XLG Series

55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62 12.5 11

CC

0 30 86 3 28 45 53 88 86 64 88 104 CC 1/2 7 13 2 1 32 120 5 33 65 61 123 116 92 125 139 11/4 3/4 7 20 2 46 185 0 29 93 60 183 180 144 185 202.5 L dimension 600 700 800 Effective oil level stroke (mm) 50 100 200 300 400 500 CCT63-l 228.5 278.5 378.5 503.5 603.5 728.5 s s s CCT100-l 286 386 511 611 736 836 s s s CCT160-l 399 524 624 749 849 949 1049 s s * Hexagon socket head cap screw is used

LEF-OM007xx

800 900 900 1000 1000 Actuator cable type 11-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable S* Standard cable S* 11-LEFS40 11-LEFS40 *Only Step motorcan be selected AC Servo motor 11-LEFS 25 B A1 100 2 S S2 ize I/O connector 25 25 None None Nil Nil 32 32 With connector With connector

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T VMG Pressure loss is less than 1%.

Multistage Ejector Series ZL112/212 1

JIS Symbol Standard Port exhaust P V 13-7-10 11 Multistage Ejector Series ZL Construction q t i ZX ZR w !0 ZM ZH o ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY e u r y ZQ ZF ZP Description Part no. Part no.

Sine Rodless Cylinder Series REA

25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] m 600 600 600 L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

AZ1000

When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available.

LEY-OM007

- 2.3. 28 28 29 30 29 30 / 14 14 15 15 25 26 27 25 26 27 11 11 12 12 19 19 21 21 18 18 16 16 22 22 24 24 17 17 12 13 12 13 23 23 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 20 20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10 30 11 31 12 32 13 33 14 34 15 35 NBR 16 17 18 101 19 POM 101 20 / 16 LEY-L016 LEY-F016 LEY-D016 16

VZA2000

Nil T F Rc NPTF, NPT G Caution 3 position closed center 3 position exhaust center Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-1 2 Series VZA2000 Dimensions: Body Ported 2 position single: VZA2121-M5 2 position double: VZA2221-M5 2-2.8 mounting hole 2-2.8 Mounting hole Pilot port (A side) M5 x 0.8 Pilot port (A side) Pilot port (B side) 2-2.8

NCM

Note 11) Exclude 2".