ML1

, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

VZA200/400

VVZ200-32A-11 pc. VVZ400-32A-11 pc. Caution Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. VV3ZA2-50-031-01 1 pc. VV3ZA4-50-031-021 pc. VZA214-P2 pcs. VZA414-2P2 pcs. VVZ200-31A-11 pc.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

equivalent (130C) (6) 51 45 17 (5.3) 11 (2.9) 5.5 50 Hz 60 Hz 50 Hz 60 Hz Inrush Apparent power (VA) (Power consumption (W)) VP AC Holding S070 Power consumption (W) DC Bracket (AXT338-11)/For body ported type VQ Accessory (Option) Indicator light Body ported Manual override VKF Note 1) Based on JIS B 8375-1981.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

The tightening torque should be approximately 0.05 to 0.1 Nm. 8-17-11 11 Series CYP Specific Product Precautions 1 Be sure to read before handing. Operation Handling Caution Caution 1. Open the inner package of the double packaged clean series inside a clean room or other clean environment. 2.

IR1000/2000/3000

0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 200 400 600 800 1000 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 6 Series IR1000/2000/3000 Series IR3000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

VG342

Wiring 1) Pass them through the cable (7) in the order of cable ground (4), washer (5), rubber seal (6), and then insert into the housing (2). 2) From the terminal block (3), loosen the screw (11), then pass the lead wire (10) through, then again tighten the screw (11). Note) Tighten within the tightening torque of 0.5 Nm 15%. Note) Cable (7) external: 6 to 8 mm 3.

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

Shuttle Valve/AND Valve with One-Touch Fittings

Dimensions(mm) 1in = 25.4mm Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 10 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 SMC Pneumatics, Inc. 6 SMC Pneumatics, Inc. 7 World Wide Support...

Series: LEFB (Belt Drive), Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 6N (LECA6 NPN, Step Data Input Type), I/O Cable Length for LEC: 3 (3m), Controller

Series: Belt Drive, Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: Standard Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6 NPN, Step Data Input Type, I/O Cable Length for LEC: 3m, Controller Mounting: DIN

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Caution Particulate Generation Characteristics Caution 1. A sine cushion (smooth start-up, soft stop) function is included in the standard specifications.

VXF

Model With silencer Holding Without silencer Inrush VN AC 50 20 11 4.5 60 45 35 55 45 35 55 60 50 60 Rated value 10 104 VXF 2150 83 LVC DC 6 VXF 2160 AC 50 20 11 4.5 60 6 DC Rated value 10 105 LVA 85 VXF 2280 AC 50 40 18 7.5 60 8 DC Rated value 10 108 LVH 85 LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-3-73 4 The VX series will be revised shortly.

Air Slide Table

Metal stopper with bumper Rubber stopper Shock absorber L1 L1 L1 10 5.5 33.5 8 9 6 20 5.5 39.5 11 12 9 30 14 39.5 11 13 10 40 17 39.5 11 13 10 50 22 39.5 11 13 10 75 41 39.5 11 13 10 100 47 39.5 11 13 10 125 72 39.5 11 13 10 Stroke K MZ Low thrust with high rigidity type MXQB Single side-ported type MXQC Height interchangeable type MXQ Auto Switch Mounting Made to Order Model Selection Common

Air Cylinder

x 1.25 15 29 1/8 11 81 11 M6 x 0.75 10+0.08 0 5 1 6.5 15 123 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12+0.08 0 5.5 1 7.5 24 123 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14+0.08 0 6 1.25 8.5 24 144 50 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16+0.08 0 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18+0.08 0 11.5 3 14.5 24 167 80 10 22 M22 x 1.5 23 80

5

11 11 D-A59W 13 13 13 14 14 15 D-A3m/A44 9 9 10 11 11 11 D-Y59m/Y69m D-Y7P/Y7mV D-Y7mW/Y7mWV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5m/J59 D-F5mW/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 DValues which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and

VCL

Note 2) The weight is the value for the grommet type. 17-2-33 6 Series VCL Construction q w e r Component Parts t Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Description Material No.

VCS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA Clip type VN Ease of maintenance has been improved. Changing of the coil is made easy by means of clip design.

VXD21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN LVC LVA LVH N.O. LVD Variations LVQ Valve Electrical entry LQ OUT Grommet Conduit DIN terminal Conduit terminal LVN Normally closed (N.C.) IN TI/ TIL OUT Normally open (N.O.)

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[90.4] 300 (Lead wire length) 107 79.8 VS 45.4 45.4 11 VS7 11 A B A B 5 5 2-2.6 (Mounting holes for manifold) 10 10 (Lead wire length) 19 19 2-2.6 (Mounting holes for manifold) 300 26.6 26.6 40.6[47.1] 29.5[36] 23 23 17.1 10.5 10.5 10 2-2.6 (Mounting holes) 3 3 11 2-2.6 (Mounting holes) 10 11 15 77.4 15 77.4 [ ] for AC Other dimentions are the same as the grommet style

0.4

SOL.A 17 16 () (+) 21 25 24 Gray Red 23 Station 11 13 3 SOL.B () (+) 22 18 23 Black White 24 SOL.A 12 4 () (+) 23 26 Station 12 White None 25 19 22 SOL.B () (+) 24 11 5 21 20 White None 26 COM. 10 9 8 7 6 (+) () 25 COM. M27 female thread (+) () 26 Electrical characteristics Note) Positive COM spec. Negative COM spec.