SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

LG1H

Positioning distance (mm) 1000 500 100 10 1 10 100.5 50.5 10.5 1.5 0.5 100 10.5 5.5 1.5 0.6 0.5 Speed (mm/s) 500 2.7 1.7 0.9 0.6 0.5 1000 1.9 1.4 0.9 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions.

CJ2

B H C C d d 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 M6 x 1.0 4 8 9.2 6 M3 x 0.5 2.4 5.5 6.4 SNJ-010B 10 NTJ-010A M8 x 1.0 4 11 12.7 10 M4 x 0.7 3.2 7 8.1 NDd9 NDH10 NX R1 U1 Part no.

VS 8-2/VS 8-4

SOL.A SOL.B 17 16 15 14 2 1 19 Orange Black Station 10 Electrical characteristics 25 24 20 Red White 13 3 SOL.A SOL.B 23 18 Item Property 21 Brown White Station 11 12 4 22 Pink Red 26 Conductor resistance /km, 20C 22 19 65 or less SOL.A SOL.B 11 5 23 Gray Red 21 20 Station 12 10 9 8 7 6 24 Black White M27 female thread Voltage limit V, 1 minute, AC 1000 White None COM. 25 White None COM.

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Stability of suction position,

Assuming that the tube I.D. is 2 mm, the piping capacity is as follows: V = p/4 x D2 x L x 1/1000 = p/4 x 22 x 1 x 1/1000 = 0.0031 L (2) Assuming that leakage (QL) during adsorption is 0, find the average suction flow rate to meet the adsorption response time using the formula on page 392.

Fieldbus system Ethernet POWERLINK compatible SI unit

Value (-32767.. 32767 ) Value x 0.01 (mA or V) 1000 8 Upper Limit Value*1 1: True Generates an error. *1 9 Monitor Lower Limit 0: False Does not generate an error. Generates error per channel when the input value falls below the set value.

70pvpump

Ratio of discharge rate against fresh water (%) PAX PB 50 0 1 10 100 1000 Viscosity (mPas) Caution Viscosities up to 1000 mPas can be used.

MGP

(Plug) PA+stroke S G FA FB C+stroke B+stroke A+stroke E MGPM, MGPL/Common Dimensions Standard stroke (mm) Bore (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 59.5 37.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 12.5 112 120 148 162 24 27 32 39 M8 X 1.25 20 20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50 34

SMC

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

ITV

Count Pressure characteristics Flow characteristics Supply pressure: 0.2MPa Set pressure: 0.05MPa Relief flow characteristics Supply pressure: 0.2MPa 0.25 1.0 0.15 Output deviation factor (%F.S.) 0.20 0.5 Set pressure (MPa) Set pressure (MPa) 0.10 Set point 0.15 0.0 0.10 0.05 0.5 0.05 1.0 0 500 1000 1500 2000 0.00 0.00 0 500 1000 2000 1500 0.0 0.1 0.2 0.3 Flow rate (l/min (ANR)) Flow rate

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS32 LEKFS40 1000 1000 1000 800 800 800 L1 L1 [mm] L1 [mm] L1 [mm] 600 600 600 X 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 0 10 20 30 40 50 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 Horizontal/Bottom 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] 600 600 600 Y 400 400 400 Mer m 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 0 10 20

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

CJ5-S

B Cushion Rubber bumper, Air cushion REC 50 to 1000 mm/s 20 to 63 Piston speed 50 to 700 mm/s 80, 100 CX Thread tolerance JIS Class 2 st + 1.4 0 st + 1.5 0 st + 1.4 0 st + 1.5 0 Up to 1000 mm, Up to 1200 mm 20 to 63 CY Stroke length tolerance Up to 1000 mm, Up to 1500 mm 80, 100 Basic style, Axial foot style, Rod side flange style, Head side flange style, Clevis integrated style MQQ M JIS

CJ5-S

B Cushion Rubber bumper, Air cushion REC 50 to 1000 mm/s 20 to 63 Piston speed 50 to 700 mm/s 80, 100 CX Thread tolerance JIS Class 2 st + 1.4 0 st + 1.5 0 st + 1.4 0 st + 1.5 0 Up to 1000 mm, Up to 1200 mm 20 to 63 CY Stroke length tolerance Up to 1000 mm, Up to 1500 mm 80, 100 Basic style, Axial foot style, Rod side flange style, Head side flange style, Clevis integrated style MQQ M JIS

CG5-S

85 15 40 10 24 to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 21 109 80 22 60 to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 32 130

AIR CYLINDER

Graph 1Allow lateral load 1000 Lateral load to rod end (N) 100 160 125&140 10 0 500 1000 1500 2000 Stroke(mm) Judging lateral load of dead weight In case of rotating type cylinder, lateral road applies to the piston rod because of dead weight of the cylinder. It needs to be checked, if the lateral load is within the range of safety.

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

MQQ

16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.