HRX-OM-Q026 AL47 13 Pump breaker trip AL48 Pump inverter error AL49 Air exhaust fan stoppage 14 12: Water-cooled type model does not generate this alarm. 13: Power supply "-20" specification model does not generate this alarm.
V V F V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 r Connector (Supply valve/Release valve/Pressure switch for vacuum) For supply valve/release valve: 300 mm (Connector assembly)4 For pressure switch for vacuum: 2 m (Lead wire with connector) Pressure
Width across flats 13 Width across flats 16 Width across flats 19 (mm) Symbol ZZ Z SS KK Stroke 20 10 50 40 30 75 100 100 20 30 10 10 75 50 10 20 20 40 40 75 75 30 30 50 50 100 100 40 Model CXS20-R CXS25-R CXS32-R 22 27 22 40 80 60 100 124 110 134 130 154 170 194 120 144 140 164 190 214 24.5 29.5 60 24.5 80 107 131 117 141 142 166 172 196 132 156 147 171 197 221 40 29 34 49 122 152 132 162
suppressor 5/32 4 N 100 VAC 10 one-touch fitting M 9/32 7 P 110 VAC A B C D E F 13/64 5 Q 200 VAC 1/4 5/16 8 R 230 VAC 25/64 10 S Conduit 24 VDC Aluminum 13/64 5 With surge voltage suppressor 3/8 5/16 8 VX2 T 100 VAC 25/64 10 Single U 110 VAC 3 Size 3 G H Unit 1/2 25/64 10 V 200 VAC N.C. 13/64 5 W 230 VAC J 10 one-touch fitting 5/16 8 K L 25/64 10 Faston terminal Resin 13/64 5 M N Y 12 one-touch
) Operating Pressure 2 Position Double 0.1 ~ 0.7 (14.5 ~ 100) Range MPa (PSI) 3 Position 0.2 ~ 0.7 (30 ~ 100) External Pilot 2 Position Single 0.25 ~ 0.7 (37 ~ 100) Operating Pressure 2 Position Double 0.25 ~ 0.7 (37 ~ 100) Range MPa (PSI) 3 Position 0.25 ~ 0.7 (37 ~ 100) Ambient & Fluid Temperature C / F Max 50C / 122F Max Operating 2 Position Single 10 5 Frequency Hz 3 Position 3 3 Manual
L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Internal Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 310.5 300 275 18 273 262.5 243.5 15 285.5 275 254 16 298 287.5 264.5 17 110.5 100 86 12 223 212.5 191 16 235.5 225 201.5 17 235.5 225 212 12 248 237.5 222.5 13 260.5 250 233 14 185.5 175 159.5 13 198 187.5 170 14 210.5 200 180.5 15 135.5 125 107 14 148 137.5 117.5 15 160.5 150
Axis No. settings 13 5. Parameter list (Driver side) 15 6.
Double wiring specification specification 12 13 12 13 12 stations 12 stations 13 stations 13 stations Specified wiring Note 2) Specified wiring (up to 25 solenoids possible) ... ... ... ...
: VQ7-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired connector (M12) (L approx. 500) R1 R2 P 42.5 42.5 42.5 42.5 2-6.5 Mounting hole Indicator light 2
400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg]
V or less 12 V to 24 VAC, DC: 50 mA 48 VAC, DC: 40 mA 100 VAC, DC: 20 mA IS1000E-3003 32 60.5 30 13 74.5 ITV IS1000E-3004 IS1000E-4002 IC AC40 AR40, AW40 AWM40, AWD40 IS1000E-4003 (2) 32 Maximum operating current 62.5 37 12.5 80.5 IS1000E-4004 VBA IS1000E-4006 Note 1) in the model numbers indicates a thread type.
(100) 44.5 112 16 22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R thread installation.
Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa
. () 13.1 )100mm/s 50mm (No.1 ) 50mm 50mm/s 10mm 5 100mm (No.2 ) [] No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 50.00 1000 1000 0 0 0 100 0 0 0.1 2 INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1 DRIVE (1) No.
122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0
122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0
Note) D1: Max. diameter 15-4-20 13 Inch-size One-touch Fittings Series KQ2 Branch Y: KQ2U Applicable tubing O.D.
Internal pilot manifold L: Dimensions n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275
MK-F020 MK-F025 MK-F032 MK-F040 MK-F050 MK-F063 Bore size (mm) 20 25 32 40 50 63 Accessory With boss in head side 2 3 5 7 13 25 With arm 100 100 200 200 350 350 13 32 Centering location ring Set pin Bolt for cylinder body Rear flange type (including mounting bolt) 133 153 166 198 345 531 Calculation: (Example) MKG20-10RFN Standard calculation: MKB20-10R 250 g 6 g 133 g 2 g 100 g 491
Refer to pages 13 to 24 for details. Stainless Steel Brass Aluminum Stainless Steel Brass Normally Closed (N.C.) Normally Closed (N.C.)