OMU0023

Controller version (the time in the bracket indicates the schedule for switching) Function Ver 2.0 Ver2.1 to Ver2.4 Ver2.5 (August 2014) (Sept. 2015) (June 2020) Corresponding card motor 6 types LAT3M-50 LAT3M-50 LAT3F-50 LAT3F-50 Alarm history count 4 points 4 points 20 points Communication speed 19200bps 2,400bps 2,400bps 9,600bps 9,600bps 19,200bps 19,200bps 38,400bps 38,400bps 57,600bps

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103 108 118 128 106 111 116 121 126 131 141 151 5.5 9 4.5 20 25 15.5 18 32 50 10 29 40.5 M8 x 1.25 9.5 depth 9 22 22 23 20 8 748

4/5 Port Air Operated Valve SYJA3000 Series

) 51 (25) Body ported 5 port Base mounted (with sub-plate) 4 Port Base Mounted (For manifold) Note 1) 2 position 0.36 0.12 0.46 0.35 0.12 0.46 0.33 0.12 0.47 0.31 0.12 0.47 SYJA340-M5 M5 x 0.8 M3 x 0.5 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22

HRX-OM-W060

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

CE

, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

CE

, 75, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 For rod nut and accessory bracket, refer to page 10-12-20.

3

With arm Port side M With Arm Rotary direction: R During unclamping (Extension end) Rotary direction: L During unclamping (Extension end) Model (mm) N N O P U V AD 18 18 22 22 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 67 67 88 88 45 45 65 65 20 20 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 15 to 25 15 to 25 30 to 40 30 to 40 10 mm Clamp stroke M Rod state Model O P 10 50 mm 85.5 150.5 93 158 103

Power Clamp Cylinder

Bore size (mm) Tightening torque Description Ibfin Nm 27 to 35 44 to 62 44 to 62 44 to 62 13 to 18 27 to 35 27 to 35 27 to 35 110 to 150 1150 to 1327 1416 to 1770 4248 to 4600 13 to 18 22 to 27 22 to 27 27 to 44 40 50 63 80 40 50 63 80 40 50 63 80 40 50 63 80 3.0 to 4.0 5.0 to 7.0 5.0 to 7.0 5.0 to 7.0 1.5 to 2.0 3.0 to 4.0 3.0 to 4.0 3.0 to 4.0 12.5 to 17.0 130 to 150 160 to 200 480 to 520

Series KP/KPQ/KPG

H Connection threads 10 35 18.5 25 29.4 24 17 17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series KP/KPQ/KPG

H Connection threads 10 35 18.5 25 29.4 24 17 17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

RZQ

40 72 18 40 50 90 22 50 ML2B 63 108 28 60 FV M C J G5-S CV M L B + Full stroke FT FZ AH + Full stroke MVGQ CC RB Double clevis style: RZQD Double Style (mm) J CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW D32 112.5 82.5 10 102.5 5 14 20 -X 40 124 92 10 114 6 14 22 50 134.5 96.5 14 124.5 7 20 28 2063 30 146 102 14 132 8 20 CU Data Bore size (mm) L B + Full stroke RR CW CX+0.2

NCQ8

Indicator light Lead wires Oilproof vinyl heavyduty cord 0.1" (2.7 mm) x 0.13" (3.2mm) ellipse, 2.3 x 10-4in2 (0.15mm2), 2 cores: D-M9B(V), 3 cores: D-M9N(V), D-M9P(V) Note 1) Refer to page 50 for solid state switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

CLS

50 63 14 14 14 17 17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 110 136 115 25 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 3 5 30 46 +0.084 0 +0.100 0 0.1 0.3 161 78 18 110 146 128 28 16 114 64 110 M14 x 1.5 75 Up to

15

50 5 0 Z X Mass and center of gravity of the load 25 Center of gravity 50 Load no.

MY2

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142

KP/KPQ/KPG

20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air Slide Table Dimensions: MXP12 1122Z 3 Metal stopper V K Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers