VQ5000

None 9 22 SOL.B 18 () (+) Gray None 5 stations 10 .

VXR21/22/23

Series VXR21/22/23 Construction/Principal Parts Material Normally Closed (N.C.) Normally Open (N.O.)

Vacuum Pad

0.8 Width across flats 14 17.5 21.5 5 2 5 17 21 20 3 25 3 1.6 ZP3P-T35PTSF-B8 [Weight: 13.2 g] ZP3P-T50PTSF-B8 [Weight: 20.9 g] M8 x 1.25 Width across flats 21 M8 x 1.25 Width across flats 21 8 8 3 22 28 19 25 35 4 50 4 4.5 5 Vertical Vacuum Inlet, With Buffer ZP3P Series How to Order Vertical vacuum inlet With buffer ZP3P 20 J 10 PT T SF B5 Pad diameter Symbol Pad diameter 20 20 25 25 35

Electric Actuator Triple Axis P&P Unit

cable are included. 2) Sensors must be procured by the customer. 3) For motor details, please refer to Applicable motors on page 23. 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 11 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

D-M9V D-M9MV D-M9AV D-A9V Hs Hs Auto switch Auto switch 16.5 16.5 A B A B 22 20 (22) ( ): Dimension of the D-M9AV A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch. A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch.

VZS

For details, refer to pages 3-7-19 and 3-7-20.

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(Conforming to DIN) Clip Without indicator light AXT100-20-1 Rated voltage With indicator light 16.8 Voltage symbol Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

44

23 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10 7.5 6.8 30 M 22 27.1 17 7.6 17 25 H/DL L/LL 10 8 7.3 35 22 27.1 KC 17 26.6 12 9 8 45 22 28.7 17 8.5 KK 17 26.6 12 10 9 57 KK130 22 28.7 28 29.9 16 13 22 9.3 12 101 22 DM Reference

KN Series Nozzles for Blowing

34.6 35.6 36.3 37.1 29.5 27.7 40.4 41.3 31.2 40.1 38.4 45.6 43.9 10 10 12 12 12 14 14 17 17 17 17 17 19 19 19 24 24 27 27 10 10 12 12 12 14 14 14 14 14 14 14 17 17 17 22 22 26 26 4 4 6 6 6 8 8 10 10 10 10 10 12 12 12 16 16 20 20 1 1.5 1 1.5 2 1.5 2 2.5 3 3.5 4 6 3.5 4 6 4 6 4 6 D H2 H1 M L1 Nozzle with male thread/KN (mm) Model Nozzle size D Connection thread L1 A Width across flats H1

VXD21/22/23

28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136) 17.5 23 39 45.5 3 4 VXD2150 VXD2260 1 VXD2152 VXD2262 36.5 133 (150) 20 25.5 41.5 49.5 ( ): N.O. 17-3-40 9 Series VXD21/22/23 Pilot Operated 2 Port Solenoid Valve For Air, Gas, Water and Oil The VX series will be revised shortly.

3 Position Cylinder Series RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R R H Width across flats 12 Width across flats 3 F Width across flats 12 Width across flats 3 F E E D C D C 3 2 3 2 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke (mm) (mm) Q: 6 Q: 8 H I J Stroke A B C D E F H I J Model R S R S 20 +10 3 0 ZPR20F10-0-A14 20 22 12.5 15.5 29.3 46.5 58.5 126.5 30 +20 +7 50 ZPR25F10-0-A14 25

Stroke Reading Cylinder and Counter

18 36 10 57.5 M6 x 1 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 177 185 209 10 199 14 22 18 36 10 64.5 195.2 59 71.5 65.5 8 14.7 9 39 173.4 79 95 6.6 9 67 76 89 50 193 202 235 14 221 20 28 22 44 14 76.5 215.7 71 83.5 M8 x 1.25 94 91 78 9 16.2 11 46 177.4 95 9 9 80 92 60 194 203 238 14 224 20 30 22 44 14 89.5 219.2 M10 x 1.5 91 84.5 97 109.5 113 107 108 DDimensions for auto switch

Intrinsically Safe Valve

53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

With rod boot Type Bore size (mm) Type Bore size (mm) Long stroke range (mm) 125 140 160 180 200 250 300 Stroke range (mm) S M2 RT RY M1 ZZ ZZ1 ZZ ZZ1 125 140 160 180 200 98 Up to 1400 1401 to 1600 22 22 36 164 230 253 238 261 Lube Non-lube Air-hydro Lube Non-lube Air-hydro 98 Up to 1400 1401 to 1600 19 19 36 184 227 250 232 255 106 Up to 1400 1401 to 1600 22 22 45 204 248 269 252 273 115

HRX-OM-W060

. 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100A20 CH1 . 8-7 8.4.2 HRL200A20 CH1 . 8-7 8.4.3 HRL300A20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9

Compact Type Dual-Rod Cylinder Series CXSJ

) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 50 mm stroke 13 CXSJM CXSJL Graph V = up to 400 mm/s; up to 50 mm stroke 12 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0 20 40 100 60 80 0.01 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 5 Compact