SMC Corporation of America
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Note 1) In case of types with no air cushion, a rubber bumper is used. 4 Series MB Without Mounting Bracket Cushion valve Basic/(B) WV Port G 2-RcP MM G With rod boot E E D e MB Effective thread 2 x 4-J C B A K F N MA 13 9 f l N h S + Stroke H ZZ + Stroke Without air cushion Bore size (mm) Bore size (mm) S ZZ S ZZ Model without air cushion is designed to include rubber bumpers.

Cable connector (4 wire) Right angle type Cable connector (4 wire) Straight type n50 4-7 Mounting hole 31 SMC PREGULATOR E SMC PREGULATOR E RESET 40 52 ITV2090 ITV2090 SET UNLOCK LOCK 84 100 12.5 M12 X 1 Cable connecting threads 1.6 12 (99) (11) SMC PREGULATOR E ITV2090 Rc(PT)1/4 VAC port OUT 2 G ATM (Atmospheric pressure) OUT (Set pressure) VAC (vacuum pressure) 19 n36 Flat bracket P3020114

3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

m 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 52 53 Non-standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PC(X10) Scale: 10% When two dimensions

ON(SVON ON) (1-193) E ON(SVON ON) (1-194) E (1-195) E E EEPROM (1-197) E (EEPROM 10 ) CPU (CPU ) CPU (1-198) CPU E 64 - Revision history No.JXC-OMT0028CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part

Remarks Power supply/output cable ZS-26-L Length 2 m For PF2A5##, PF2W5##, PF3W5## Connector for sensor lead wire (e-con) ZS-28-CA-4 1 pc., Finished outside diameter: 1.15 to 1.35 Cover colour: Blue For PF2D5## Connector for sensor lead wire (e-con) ZS-28-CA-2 1 pc., Finished outside diameter: 0.9 to 1.0 Cover colour: Red Panel mount adapter ZS-26-B With set screw M3 x 8L (2 pcs.) and waterproof

e 40 40 32 32 1000 1000 25 25 20 20 5 500 5 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-5 Heating capacity(HRS060-A-20-(BJM)) 9.5.2 HRS060-W-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15

36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000

Max. 0.35 inch shortened (9 m m) 0.43 inch shortened (1 1 m m) Pad unit With adapter Actual size Actual size 19.5 mm 12 mm 3 mm 8.5 mm ZP3 New New ZP3 New ZP(Conventional model) ZP(Conventional model) New Space-saving 2 piping reduces working space!

M E N S I O N S A I R S U C T I O N F I LT E R S E R I E S NZFB Element Proof DP 1.5 Bar / 24PSI S Y M B O L S Applicable Tube Material Nylon, Soft Nylon, Polyurethane APPLICATION T O V A C U U M P U M P S Y S T E M Model A B C D E F G H I J K L M N ZFB100-04 4 48 26 53 22.5 12.5 24 17.5 15 50 15.5 14.4 12.8 8.5 ZFB100-06 6 ZFB200-06 6 MM size 52 28 65 24.5 13.5 27 19.5 16 61 17.5 16.6 15.2

R407C (HFC) IDU E FUSE B OUT PUT IN PUT E D 4 x F A Input cable 2 m Specifications/Dimensions [mm] Part no.

Note 1) Note 2) A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

*Lead wire length symbols: 20in (0.5 m) . Nil (Example) M9N 118in (3 m) . L M9NL 197in (5 m) .

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6

A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6