Actuation: 3-Position Closed Center, Barrier: w/o Barrier, Electrical Entry: Plug Connector w/Cover Type, Lead Wire Length: 600mm, Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF, Bracket: -

Actuation: 3-Position Closed Center, Barrier: Z728.H, Electrical Entry: Cable Type, Lead Wire Length: 600mm, Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF, Bracket: -

Actuation: 2-Position Single, Barrier: Z728.H, Electrical Entry: Plug Connector w/Cover Type, Lead Wire Length: 300mm, Manual Override: Push Turn Locking Slotted Style, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Plug Connector Type, Lead Wire Length: 300mm, Manual Override: Push Turn Locking Slotted Style, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Cable Type, Lead Wire Length: 100 [10000mm (semi-standard)], Manual Override: Push Turn Locking Slotted Style, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Cable Type, Lead Wire Length: 3000mm, Manual Override: Push Turn Locking Slotted Style, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Barrier: Z728.H, Electrical Entry: Plug Connector w/Cover Type, Lead Wire Length: 300mm, Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Pilot: Internal Pilot, Barrier: Z728.H, Electrical Entry: Cable Type, Lead Wire Length: 600mm, Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF

Actuation: 2 (2-Position Double), Barrier: w/o Barrier, Electrical Entry: TT (Cable Type), Lead Wire Length: 3 (300mm), Manual Override: D (Push Turn Locking Slotted Style), Port Size: 02 (1/4), Thread Type: T (NPTF)

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

52 14 41 118 2 1 1/4, 1 1/2, 2 (IN, OUT port) 105 Note) External pilot port (PA port) 1/4 is processed for threads in external pilot model only.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

Table of Contents

46 55 63 69 S 33 36 40 46 50 52 Z 46 52 56 65 73 79 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 7 Free Mount Cylinder Double Acting, Single Rod Series CU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-F9W 22 (24.5) ( ): Denotes the values of D-A93.

MLGP

Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

Ionizer

L KJH04-M5-X34 14 14 16 36 20 30 19 14 4 x M4 x 0.7 depth 5 (For mounting, opposite side: Same) 16 20 17 52 58 Emitter cartridge Maintenance detection level selection switch Frequency selection switch Balance adjustment trimmer n (Number of emitter cartridges), L Dimension, Weight Part no. n L (mm) IZS31-460--X10 IZS31-540--X10 IZS31-700--X10 IZS31-860--X10 IZS31-940--X10 IZS31-1020--X10

48

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 51 5 2 101 10 D-M9W 1 52 2 102 10 D-M9WV D-M9AV 1 52 2 10 D-M9A 1 52 2 102 1 Confirm that it is possible to secure the min. bending radius of 10 mm of the

Slider Type Ball Screw Drive/11-LEFS Series

with lock [kg] S4: 0.7/S8: 0.7 523 523 11-LEFS Series AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS25 +0.025 0 3H9 ( ) depth 3 (102) Encoder cable (7) 64 4 x M5 x 0.8 thread depth 8.5 Motor cable (6) Body mounting reference plane Note 1) 45 38 50 3.5 +0.025 0 3H9 ( ) depth 3 Motor option: With lock Encoder cable (7) Lock cable (4.5) (2.2) L Motor cable (6) (52

LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

MLGP

Bore size (mm) c e b a d 40 50 63 5.5 7.5 10 10.5 13.5 17.8 11 13.5 18.5 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64