Fluid: Air, Operating pressure range: up to 0.7Mpa, Valve effective area mm² (Cv factor): P to A/B 3.0 to 3.7 (0.17 to 0.21) A/B to R 3.2 to 3.9 (0.18 to 0.22), Coil rated voltage: 24, 12, 6, 5, 3DC, Response time: minimum 10 or less, VALVE, VALVE, SJ2000/SJ3000/SZ3000, UG, SZ BUILT IN FITTING ( 0.21175 lb

VK300

1/8 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF CE-compliant F With bracket (Not mounted) F N T 01 Rc 1 8 20 20 stations Q CE-compliant Nil A port: Rc 1/8 Note) Applicable only for DIN terminal type Type 42: Base mounted (A port side ported) Applicable solenoid valve VK334-(-Q) How to Order VV3K3 05 01 42 Applicable blanking plate assembly VK300-42-1A Thread type

Electromagnetic Digital Flow Switch

42 mA or less (Load current is not included.)

Table of Contents

Purchasing order is available in units of 10 pieces.

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 4-5-9 10 Series VK300 Precautions Be sure to read before handling.

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

Slider Type Ball Screw Drive/11-LEFS Series

ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

389 4-13-10

VKF300

42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side opposite port A Nil Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Port A: Rc(PT) 1/8 Solenoid on same side as port A S Type S42 (solenoid on same side as port

LFE-OMY0008

L/min 10 L ON OFF ON () OFF () 2 5 5 10 L/min 10550L 14 No.LFE*-OMY0008 sa ON-OFF () 1 L/min 10 11 12 1 L/min () 0 ta (SI )SI LFE ON-OFF () [S/cm](/ 100200S/cm na ON 0 ha 15 No.LFE*-OMY0008 2MPa(69 ) IN ()IN (68 ) DC(-)/ + 2 2 2 20mm 0mm 0mm 0mm 2 2 2 20mm 0mm 0mm 0mm 5 5 5 50mm 0mm 0mm 0mm 5 5 5 50mm 0mm 0mm 0mm 16 No.LFE*-OMY0008 FR0( FR0( FR0( FR0( ) ) ) ) FR1 FR1

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

o

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

o

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

CS1

90 43 36 45 56 40 59 17 9 39 M40 X 1.5 3/4 to 1800 1801 to 2000 18.5 125 227 204 162 115 M18 X 1.5 231 132 60 48 17 41 24 45 63 45 70 20 10 39 M45 X 1.5 3/4 1 Lube Non-lube to 1800 1801 to 2000 18.5 132 245 226 182 115 M20 X 1.5 231 150 63 60 50 74 48 17 20 46 24 10 39 45 M56 X 2 to 2000 2001 to 2400 160 277 225 140 23 M24 X 1.5 301 180 298.5 20 29 71 67 60 86 60 25 56 12 49 55 M64 X 2 1

VP300/500/700

(X port) (M5 x 0.8) 2-7.2 (For mounting) (42) 30 135.4 (23.5) 135.4 41.5 60 MAX.10 D: 146.6 Y: 146.1 16.5 41.5 1(P) 1(P) 136.2 1(P) 1(P) MAX.10 146.6 Rc 3/8 (P port) Manual override (Non-locking) (Pitch) 300 Pg9 Pg9 31 33 99.4 109.4 (Lead wire length) 7.5 L2 L1 113.9 123.9 103.9 113.9 D: 109.4 126.4 Y: 111.4 128.4 108.9 118.9 Applicable lead wire O.D. 2.3 to 2.8 Applicable cable O.D. 6 to

VHS20/30/40/50

I 10 I G H F E X H .

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

VM

Voltage AC125V 2 2 4 4 15 10 15 10 AC250V 1.5 1.5 3 3 15 10 15 10 DC8V 1.5 2.5 3 5 15 15 15 15 DC14V 1.5 2.5 3 5 15 10 15 10 DC30V 1.5 2.5 3 5 6 5 6 5 DC125V 0.3 0.05 0.3 0.05 0.5 0.05 0.5 0.05 DC250V 0.2 0.03 0.2 0.03 0.25 0.03 0.25 0.03 JIS Symbol Construction Precautions Component Parts Be sure to read before handling.

MXS

91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 M 71 71 71 83 103 149 203 GA 15 15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA 2 2 2 2 2 4 4 Refer to "Dimensions" of MXS 12 on p.3.11-17 for one with shock absorber as symmetric.

44

14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9