Fluoropolymer Piping Equipment

Tubing size (D) LQ1E21-T-R8 6 8 x 6 TH TIH 8 30.5 20 3.6 LQ1E21-T-R9 10 x 8 10 LQ1E21-T-R10 12 x 10 12 34.5 24 LQ1E22-T-R8 B side D 4 6 15 14 28 16.5 6 x 4 6 25.5 15 2.6 LQ1E22-T-R9 8 x 6 8 30.5 20 LQ1E22-T-R10 10 x 8 10 LQ1E22-T-R11 12 x 10 12 34.5 24 LQ1E31-T-R1 4 B L3 8 x 6 5 9 8 36.6 33.6 20 6 LQ1E31-T-R2 6 x 4 6 28.6 15 3.9 LQ1E31-T-R8 12 x 10 12 37.6 24 7.4 LQ1E31-T-R9 19 x 16 19

LX

pitch 20 5 N C (5.1) 4 5.5 10 5.8 36 10.5 1 0.2 6.5 6.5 1 3 39 28 3.3 T-slot A +0.030 0 depth 4 C +0.030 0 depth 4 L-M6 4H9 Body mounting reference plane Work piece mounting reference plane T-slot A dimension T-slot B dimension 6.5 Refer to Cross section C-C. 27.5 T-slot B 4H9 Cross section C-C Model D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70

AC

Bracket/ Interface with T Bracket Interface with T bracket T bracket T bracket, Interface with T bracket Model T bracket Interface with T bracket T bracket Interface with T bracket File Applicable model A B C D E F G R H L SAC1000, #14 SAC2000, #14 SAC2503, #14 SAC4000, #14 SAC4006, #14 SAC5000, #14 B110T B210T B310T B410T B510T B610T Y10T Y20T Y30T Y40T Y50T Y60T 12 15 4.5 5.5 3 3 25 30

Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !

LEC-OM07605CN

(b) () () t t [Hz] [Hz] [Hz] [Hz] 3. 7.1.6 3 4.5Hz2250Hz [Pr. PB45 ] ()150ms (1) t t 7 12 7. (2) Pr. PB45 ] [Hz] [Pr.

Battery-less

7 @1 q B B !9 B-B !5 !8@8 e r t !2 !1 @3 @5 o A @4 A A-A !4 @2 @0 !0 w !3 @6 Component Parts No.

Rotary Actuator/Vane Type

0 t t r CRJ A port B port B port A port A port B port CRA1 Component Parts Parallel key for size 40 !2 (Long shaft side) (Output shaft) CRQ2 e No.

Modular Design with Uniform Body Style

m28 51 m27.8 61.5 Optional specifications Semi-standard PC/PA bowl Metal bowl Metal bowl with level gauge Bracket mount Panel mount With auto drain Model With barb fitting With drain guide With drain cock With drain guide With drain cock With drain guide M N Q R S T U V W Y Z B B B B B B B AW20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 104.9 91.4 87.4 93.9 AW30-D 41 40 46 6.5 8 53 2.3

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

7

I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U V 10

ZP3

Type/ZP3-T ZP3-T-B ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

Table of Contents

4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

Mechanical Valves Series NVM, NVFM, NVZNI

06 E Panel lMounting Panel N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32

IIIIIII

06 E Panel lMounting Panel N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.