Compact

Without brake 5.8 t-_1 r l o l : r = tl-Model D F J K L N L X S H _ B _ 5 0 4 6 270 1 7 7 177 6 52 55 L X S H _ B _ . 7 5 4 6 295 202 202 6 47 65 LXSH B -1OO 8 320 227 227 6 47 75 LXSH B -125 4 8 70 345 252 252 6 4 7 85 T-slot A dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake electrical

CEx-OMG0106

Present Position Next Target Point 20 30 Brake Point There is no braking point within the area Impossible for position determination Operating Condition: a. Speed: 100mm/sec b. Tubings length (form valve): 50cm below c. Supply Pressure: 0.5MPa (for both brake and driving purposes) d.

Air Cylinder CP Series Cylinder Positioner Assembly

BORE B D GA'GA K MM N P x LD LH H zz h 1 3 8 (35) 2.76 2.05 t52l 0 7 9 l:20) 1.57 1.39 (10) 0.67 M8x1.25 J.2A t7l M18rl 5 1 . 1 4 3 5 4 l90l 1.06 lz7) 1 5 1 o3) 3 5 4 ls0J 2.24 (58) 1188) 2.05 (52) '11.21 2.60 (66) s T o 7 7 2 (196) 1 3 8 (35) 3.35 (85) 2.52 079 (20) 1 5 7 1.39 (10) 0.67 M10x1.25 i.2a l7l M18x1 5 1.22 (31) 3 8 6 l93l 1.34 (341 1.63 (16) 0.45 1 1 1 . 5 ) 1 9 7 t50l 6 5 4 t1661

Process Valve

A A J B C Main port 1(A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 170.1 187.6 210.6 211.5 229 252 55 63 74 Port size: Flange: 32F, 40F, 50F Standard/Vacuum pilot Applicable cable

Series 10-, 21- AF-A Air Filter

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

Modular Type Regulator Series AR

Pressure gauge port M Q N F J K P E Bracket (option) AR50, 60 Port size Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount Model Port sizes A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94

Coolant Valve

Applicable cable O.D. 6 to 8 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) E Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

MHS2-32D MHS2-40D Q 11 12 RA 38 44 SA 4.5 5.5 FX 23 26.5 G 30.5 32 AA 44 47 NA 14 16 J 20 21 AB 41 44 L 2H9 3H9 B 56 62 DO 64 70 DC 56 62 EO 24 28 EC 16 20 CA 8 9 CB 16 17 FY 20.5 23.5 FZ 5 6 +0.025 0 +0.025 0 Model MHS2-32D MHS2-40D UA M5 x 0.8 M6 x 1 UB 10 12 VA VB 3 4 WA XA XB 3 4 SB 8 9.5 +0.025 0 +0.030 0 +0.025 0 +0.030 0 +0.062 0 +0.062 0 34H9 3H9 4H9 3H9 4H9 42H9 6 Series MHS 2

V

R E SY3/5/7000 SS5Y 20 T H R E A D T Y P E PT 00T NPTF M A N I F O L D S E R I E S V A LV E S TAT I O N S 3 SY3000 5 SY5000 7 SY7000 02 2 Stations to 20 20 Stations H O W T O O R D E R B O D Y P O R T E D W/ I N D I V I D U A L L E A D W I R E SY3/5/7000 SY 20 B R A C K E T S E R I E S Without Bracket F1 With Foot Bracket F2 With Side Bracket 3 SY3000 5 SY5000 7 SY7000 A, B P O R T S I Z

Series 10-, 21- AW-B Filter Regulator

-06-B 10-/21-AW60K-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20K-B 10-/21-AW30K-B 10-/21-AW40K-B 10-/21-AW40K-06-B 10-/21-AW60K-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

B 2 (EA)5 1 (P) 3(EB) M5: M5 x 0.8 3 position closed center 2(B) (A)4 Back pressure check valve 3 J: With switch A 4 Nil None (EA)5 1 (P) 3(EB) K Built-in 2 B 3 position exhaust center The built-in back pressure check valve type has an effective area approximately 20% smaller.

CLQ

Hs A B A B Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-J79W D-F7BAL D-F7F D-F7NTL D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W D-F7BA D-F7W D-F7F D-J79W D-F7WV D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-A73C D-A80C D-F7V D-F7WV D-J79C D-A79W D-A7 D-A80 Bore size (mm) D-A7/A80 D-A79W Bore size (mm) Hs Hs Hs Hs Hs Hs 20 B A B A B A A B 25 20 32 34 35 38 32.5 38.5

CLQ

Type A mounting bracket part numberYA-03 JointYU-03 J E Data T1 B 2-D through 2-O counterbore Material: Precision die-casting material equivalent to stainless steel 304 Bore size (mm) O J M D E B Part no.

SZ3000

Stations Scale: 37% Stations [With external pilot] 2n1-M5 x 0.8 (A, B ports) 24 13.3 (Pitch) P=10.5 13.3 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting 2-One-touch fitting 2n2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 (P, R ports) Applicable tube O.D.: 8 (A, B ports) Applicable

Compact Cylinder with Lock Series CLQ

Hs A B A B Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-J79W D-F7BAL D-F7F D-F7NTL D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W D-F7BA D-F7W D-F7F D-J79W D-F7WV D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-A73C D-A80C D-F7V D-F7WV D-J79C D-A79W D-A7 D-A80 Bore size (mm) D-A7/A80 D-A79W Bore size (mm) Hs Hs Hs Hs Hs Hs 20 B A B A B A A B 25 20 32 34 35 38 32.5 38.5

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Inch Threads Bore size (mm) Bore size (mm) 12 16 20 25 Dd9 (inch) l d d H B C Part No.

High Power Cylinder Series RHC

HS 8.5 SMC SMC SMC SMC 16 16 A 29 Auto switch B A 26 Auto switch B (36) D-B5/B6/B59W type 20 to 40 D-G5NTL type 20 to 40 50 to 100 50 to 100 Approx. HS Approx. HS 12 12 SMC SMC 24.5 24.5 A 33 B A 33 Auto switch B D-C73C/C80C type 20 to 40 D-H7C type 20 to 40 50 to 63 50 to 63 Approx. HS Approx.

Air Cylinder CLA Series Fine Lock Model

0(0) 0 o 12. 2 4(7.a B 1(0) 8 10{6. 83 88 104 0(0) 0(3) 2.5{6.5) 4.5 B 1.5(O) 1 . 5 s.st2) 8.s{4.5) 10.5 38 ,t3.5 50.5 B 3(O) 3 10{6) 12i3. = H s 40 43.5 49 55.5 42 50 B 3(0) 3 7 10(6) 12 38 50.5 59 B 3(0) 7.4 10.5(6) 12.5 40 43.5 4S 55.5 35 42 50 Acrtssofies $eries CLA Di mensions Of Accessories lType Single Knuckle Joint Y Type Double Knuckle Joint Malerial: Free cutting sulfer steel l

Title not found

0(0) 0 o 12. 2 4(7.a B 1(0) 8 10{6. 83 88 104 0(0) 0(3) 2.5{6.5) 4.5 B 1.5(O) 1 . 5 s.st2) 8.s{4.5) 10.5 38 ,t3.5 50.5 B 3(O) 3 10{6) 12i3. = H s 40 43.5 49 55.5 42 50 B 3(0) 3 7 10(6) 12 38 50.5 59 B 3(0) 7.4 10.5(6) 12.5 40 43.5 4S 55.5 35 42 50 Acrtssofies $eries CLA Di mensions Of Accessories lType Single Knuckle Joint Y Type Double Knuckle Joint Malerial: Free cutting sulfer steel l\

Free-Mounting Cylinder with Air Cushion Series CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.