Multistage Ejector Series ZL112/212 1 Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
.O (r) aol O Gl ,9 .rO ";p:* Stroke Variations Long strokes up to 400mm standardized. a.l)compact guide cytinder QlBore size @pon typ. l t t t l t t t l l 7 5 _ _ t t t t t t t t t l l t t t l t t t l l t t r t t t t t t l r t t t t t t t t l 1't5 l t t t t r r r r l r t t t r r t t l l z a n * For bore s zes 12 & 16 onyM5x0SisavailaHe Befer to lable al eft for delats Ocylinder stroke (mm
Center of Gravity x z z y x y z MY1H Center of gravity Mass m Work piece X-axis Y-axis Z-axis Refer to page 1230 for wall mounting, ceiling mounting and vertical mounting types.
K (3.3) D 4-G through R + Clamp stroke X Z C 0.2 2 x 4-H counterbore Q + 2 x Clamp stroke + 0.15 + 0.05 2-3.3 depth 3 K A P Both ends tapped style: MKA A thread (mm) A B Model MKA MKA50 MKA63 32 40 10 M6 x 1.0 14 M8 x 1.25 18 M10 x 1.5 R + Clamp stroke (Basic) (mm) Q A G I J S T B H K L O U C P V D E R X F Yh9 Z Model 0.1 0.2 MKB32 1 8 0 0.15 0.15 31.5 9 depth 7 M10 x 1.5 93.5 71.5 45 5.5
Example) VXD2 Z Z 1A X332 3 2 A A Electrical option Seal material: EPDM/ With bracket/ Other option Special electrical entry direction 135 VXD Series Construction Normally Closed (N.C.) i i !2 !2 !0 !0 !1 t !1 t o y o y u IN(P1) u r IN(P1) r OUT(P2) B A OUT(P2) A B C IN(P1) IN(P1) e C e q w q w VXD23 VXD24 !2 i i !0 !2 A B !0 !1 !
[kPa] to [kgf/cm2]. 1 [kPa] = 1.0197 X 102[kgf/cm2] 1.01972 X 102 X 80 = 0.81576 [kgf/cm2] 3.14-13
G 1F 48 VAC G H K L Z NPT 1G 1H 1V 1J 220 VAC 240 VAC DIN terminal ? ? ? ?
S Surge absorber (mm) Applicable bore size (mm) 40 50 63 80 100 C H' T T' HW H Z Auto switch model CV D-A3C-4, D-A44C-4 D-A3C-5, D-A44C-5 D-A3C-6, D-A44C-6 D-A3C-8, D-A44C-8 D-A3C-10, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 MVGQ M5
cap bolt G 1/2 (Applicable cable O.D. 6.8 to 9.6) OUT () Terminal no. 2 Indicator light Most sensitive position Dimensions Applicable bore size (mm) 40 50 63 80 100 Z H H HW C T T Auto switch model D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 6.5 6.5 7.5 9.5 9.5 49.5 50.5 52 53.5 56.5 57 58 60.5 64 67 69 77 91 107 121 44 52 64 78 92 7.5
(mm) Applicable bore size (mm) 40 50 63 80 100 C H' T T' HW H Z Auto switch model -X D-A3C-4, D-A44C-4 D-A3C-5, D-A44C-5 D-A3C-6, D-A44C-6 D-A3C-8, D-A44C-8 D-A3C-10, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 20M5 x 0.8 x 20 Data M5
Description VNC811-65F VNC911-80F Plate assembly Valve material i Pilot solenoid valve VN8-A3CA VN8-A3CB VN9-A3CA VN9-A3CB e FKM NBR VO301-00T-X302 (Refer to page 17-4-29 for part no.) 17-4-28 9 Series VNC Coolant Valve: Air Operated/External Pilot Solenoid How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 VO301-00 T X302 SF4 1 D Z 23 Manual override Nil A B Coil rated voltage
M12 X 1.75Depth21 22 M10 X 1.5Depth20 17Depth12 37 10.5 194 42 19 23 142 Bore (mm) WH W V U T S R Q J O I N Z P M Y L X K Wq 20 25 32 40 50 23 36 40 86 12 26 12 21 44 M6 X 1 25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132 20 47 33 12 25 70 M8 X
Power saving circuit is only available in the "Z" type.
12.5 22.5 5 46 8 82 87 16 15 18 18 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are packed together. 5 Stainless Steel Cylinder Series CJ5-S Accessory Dimensions Single knuckle joint Clevis pin Knuckle pin MM ND hole H10 L L l t t l t t RR1 m m m m d Dd9 d Dd9 0.1 0.3 NX +0.2 0 A1 U1 L 7 12 Material: Pin and snap ring both SUS304 Material: SUS304 Material
4 x OA through 4 x NN through 4 x MM depth ML L 2 x Counterbore diameter OB, depth OL WA Z XAH9 XB Section XX Section XX XA XL XC HA: T-slot for hexagon bolt Section XX details X 0.02 R T X 0.02 DB DA H VA VB U X PW b a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J K PB GB GA [mm] FA PA + Stroke Bore size [mm] a b c d e FB A + Stroke B + Stroke C + Stroke
9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.
Combination of S and T (Because S function is also included in T.) Combination of K and V (Only one or the other may be attached.) Note 2) Standard specification is the power cable with plug.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust