High Precision Digital Pressure Switch, Series ZSE40/ISE40

22 For Positive Pressure ZSE40 01 22 For Vacuum/Compound Pressure Option Set pressure range Nil F For vacuum pressure For compound pressure Nil None Bracket A (ZS-24-A) 10.0 to 101.3kPa 100.0 to 100.0kPa A Piping specifications Bracket B (ZS-24-B) W1: Rc1/8 01: R1/8 (with M5 female threads) T1: NPT1/8 (with M5 female threads) Rc1/8 Reverse pressure two directions B R1/8, NPT1/8 M5 x 0.8

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22 For Positive Pressure ZSE40 01 22 For Vacuum/Compound Pressure Option Set pressure range For vacuum pressure For compound pressure None Bracket A (ZS-24-A) Nil 10.0 to 101.3kPa 100.0 to 100.0kPa Nil F A Piping specifications Bracket B (ZS-24-B) W1: Rc1/8 01: R1/8 (with M5 female threads) T1: NPT1/8 (with M5 female threads) Reverse pressure two directions B R1/8, NPT1/8 Rc1/8 M5 x 0.8

ZSE3/ISE3

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type. Please refer to page 16-4-5 for figure.

Table of Contents

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Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

Fieldbus System

valve (A) (A) 4 (B) 2 (A) 4 (B) 2 Note) A 1 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

5 Port Solenoid Valve, Series VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

Vacuum Unit

Fig.1 Fig.2 Fig. 3 Protrusion of junction box B Fig. 2 Clip in. Fig. 3-A When ordering ejector for vacuum pump system, spacer is included.

Process Pump

Connect the solenoid valve lead wires to a 24 VDC power supply. Red is (+) and Black is (). (The PB1013A air-operated type must be equipped with a separate 3-port solenoid valve.) 3. Using a regulator, set the pilot air pressure within the range of 0.2 to 0.7 MPa.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

VXA21/22

Valve (Port size) VQ 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) VXA31 VXA32 01 ( ) 1 8 02 ( ) 1 4 03 ( ) 3 8 02 ( ) 1 4 Ordering Example (Example) Series VXA31, Orifice size 1.5mm, Rc(PT)1/8 (Part number) VXA3114-01 4.1-69 VXA31/32 Air How to Read the Graph In the sonic flow region: For a flow of 100 l/min.

Precision Clean Regulator

Since this product uses a bleed mechanism and fluid is released from the bleed hole, poisonous or corrosive gases cannot be used. 2. Fluids containing solids cannot be used. Since this can cause malfunction, install a mist separator, etc., upstream from the regulator. 3.

25

Built-in solenoid valve (3-port valve) Only PB1013A PB1000A Series The PB1013A air-operated type is not equipped with a built-in solenoid valve. Prepare a 3-port solenoid valve separately.

BP1000

A Connections in A mm FV4 MV4 FV6 MV6 1.85 01 47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

AS Body size Maximum allowable torque [Nm] M5 0.05 3. Reuse 1) Normally, fittings with a sealant can be reused 2 to 3 times. 2) To prevent air leakage through the sealant, remove any loose sealant stuck to the fitting by blowing air over the threaded portion. 3) If the sealant no longer provides effective sealing, wind sealing tape over the sealant before reusing.

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

AMD X6 AMD X15 Body size Body size Options Options (Not available with element service indicator "T") Thread Accessories Thread Accessories Port size Port size Dimensions Dimensions HAl AT IDl AMG Model Port size A 239 252 258 284 B 80 AFF 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 11/2, 2 AMD150 AMD250 80 AMl Model Connection A 240 260 300 380 B 256 300 349 496.5 AMD450

VXA21/22

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.