Magnet: None, Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 25mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: A (Air Cushion), Bore: 63mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: None, Mounting: D (Clevis), Type: A (Air Cushion), Bore: 50mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 32mm, Port Thread Type: TF (G), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: A (Air Cushion), Bore: 32mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: None, Mounting: D (Double Clevis), Bore: 50mm, Port Thread: TF (G), Stroke: 100mm, Cushion: Rod Boot None; Air Cushion on Both Sides, Pivot Bracket: N (Pivot Bracket), Rod End: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: U (Rod Trunnion), Type: N (Rubber Bumper), Bore: 25mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: U (Rod Trunnion), Type: N (Rubber Bumper), Bore: 32mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: A (Air Cushion), Bore: 50mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: None, Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 50mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: U (Rod Trunnion), Type: A (Air Cushion), Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: U (Rod Trunnion), Type: N (Rubber Bumper), Bore: 32mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: None, Mounting: U (Rod Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: TF (G), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: None, Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: A (Air Cushion), Bore: 50mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Cylinder with Lock

100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002