LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Electrical entry 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/ 100, 110, 200, 220 VAC Gasket assembly part no.

Thermo-chiller

Cooling method Nil None C With inverter for compressor M Deionized water (Pure water) piping P With inverter for pump A Air-cooled refrigeration Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) When multiple options are combined, indicate the symbols in alphabetical order.

energy saving effect

HRS 100/150 Applicable model Dimension [mm] A B C HRSH250/300-A--A 916 536 1838 HRSH100/150/200-A--A 830 401 1538 HRSH100/150/200/250-W--A 570 1353 HRSH 090 HRSH HRSH HRSE HRZ HRZD HRW C HECR HEC 118 HEB A B HED HEA Option symbol With Earth Leakage Breaker B IDH HRSH 20 B With earth leakage breaker A leakage breaker is built in to automatically stop the supply power when it has short-circuit

REA/REB

200 Usable range CE2 100 100 Usable range ML2B 30 40 50 50 40 30 C J G5-S 20 20 CV 10 1 0 2 3 4 5 6 7 8 9 101112131415 10 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC RB 100 80 REA63 REA50 50 40 30 J REA40 REA32 DLoad weight W (kg) 20 REA25 -X 10 20Data 1 100 200

REA/REB

200 Usable range CE2 100 100 Usable range ML2B 30 40 50 50 40 30 C J G5-S 20 20 CV 10 1 0 2 3 4 5 6 7 8 9 101112131415 10 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC RB 100 80 REA63 REA50 50 40 30 J REA40 REA32 DLoad weight W (kg) 20 REA25 -X 10 20Data 1 100 200

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

V

L: L type plug connector with lead wire L: O type plug connector without connector T Y P E O F S E A L C O I L V O LTA G E 0 Metal 1 Rubber 3 110VAC (50/60Hz) 5 24VDC 6 12VDC M: M type plug connector without connector P I L O T VA LV E S P E C I F I C AT I O N S Note ) The C kit is applicable to 200/220VAC.

NCA1

CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin

NCA1

CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin arrangement CS1 3 4 4 3 3 C76 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300 m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Port size 1/8, C6, C8 A, B port Applicable flat ribbon cable connector Socket: 26 pins MIL type with strain relief (Conforming to MIL-C-83503) (MIL-C-83503 compliant) Internal wiring In common between +COM and COM (Z type: +COM only) Rated voltage 24, 12 VDC Note) The value is for manifold base and individually operated 2 position type.

IDG

200 300 400 500 AMG Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) AFF IDG50 (Type B products group) IDG60 (Type A products group) AM 0 P1 = 0.3 MPa P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) Misc. 10 10 P1 = 0.5 MPa P1 = 0.5 MPa 20 20 P1 = 0.7 MPa P1 = 0.7 MPa 30 30 40 40 50 50 0 200 400 600 800 0 200

Vacuum System Peripherals:

Nil L C CL CN Grommet type N 15 Connector type NPN open collector, double output No analog output, 3 turn-set NPN open collector, double output No analog output, 200 degree set NPN open collector, single output With analog output, 3 turn-set NPN open collector, single output With analog output, 200 degree set PNP open collector, single output No analog output, 200 degree set Manual override

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

C76

rod boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Stroke Bore 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401

C76

Rod Boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401

CA2

Symbol: A0 Symbol: A1 Symbol: A2 Symbol: A3 C DA C0.5 30 30 A H H T H H W1 WA C Approx.

Environment

5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed

MB

MB MBW MBK MBQ A C Standard model no.

VFS

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.