HRL

Circulating fluid temperature [C] HRL300-Am-20 (CH1)1 HRL100/200/300-Am-20 (CH2) 3.0 35 Ambient temperature 32C 30 2.5 Cooling capacity [kW] Cooling capacity [kW] Ambient temperature 45C or less 25 2.0 (Max. 1.5 kW)2 20 1.5 15 Ambient temperature 45C Rated 1.0 kW 1.0 10 0.5 5 0 0.0 20 30 40 15 20 25 Circulating fluid temperature [C] Circulating fluid temperature [C] Pump Capacity HRL200-

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

LEC-OM02904

P-D P P C C G3 D (2) G4 5m 5m (1) 1.

VQ5000

Combination of [C ] and [S ] is not possible. Specify the wiring specifications on the manifold specification sheet. 12 12 stations Note 1) U D U D Note 2) Note 3) 2-6-10 11 Base Mounted Series VQ5000 Plug-in Unit Electrical wiring specifications Standard wiring D-sub connector assembly (AXT100-DS25) Wire colors 015 030 050 D-sub connector Terminal no.

CG5-S

Applicable bore size (mm) D B1 C d H1 (mm) Part no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

C11.2 1218 MY1H Series Mechanically Jointed Rodless Cylinder Linear Guide Type Side Support Side support A MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB MY1B 2 x J MY1H MY1H MY1B E A B C D MY1M MY1C (mm) MY1H Part no.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 39.4 (58.1) 62.1 41.7 25.7 20.9 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P=17.5 63.3 44.5 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Formula

17

D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

CP95

2 pcs. 25 15 D-Z80L 1 pcs.

CP95

2 pcs. 25 15 D-Z80L 1 pcs.

CE

mm) Applicable bore size (mm) D C d D C Part No.

Adsorption Plate

hole) A B C D E F G N Part no.

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

ZP

C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPX How to

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (

JXCx-OMT0005CN

JX C D 1 LEFS16B-100B-S1CD17S LEFS16B-100 D DeviceNet DeviceNet 1 1 DC24V S T T 7 8 DIN <> LEHZ10K2-4 < >LECPMJ SVRE 1.5 7 - 2.3 *1 DeviceNet PLC JXC-CD-TJXC-CD-S DC24V P5062-5 *1 LE-CP-LE-CP---S ENC *2 120.3 120.3 mm mm MOT 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 PWR DC24V USB A-miniB type JXC-CPW AWG200.5mm 2

125

for AC, since a rectifier prevents surge voltage generation. 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz)[115 VAC (50/60 Hz)] 4 220 VAC (50/60 Hz)[230 VAC (50/60 Hz)] 5 24 VDC 6 12 VDC Electrical entry D DIN terminal (Type D) With connector DO Without connector * DC specification of type D and DO is only available with 12 and 24 VDC.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34

RZQ

B + First-stage stroke U MK(2) RS Q G RS H A U Mounted on different side in case of a full stroke of 25 mm or less RZQ MI W S B A CEP1 CE1 CE2 [mm] Proper Mounting Position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F ML2B D-M9 D-M9V D-F9W D-F9WV D-A79W D-A9 D-A9V C J G5-S D-A7,A80 D-F9BAL D-P5DWL Bore size (mm) CV B A B A B A B A B A B A B A MVGQ 32 27