Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

SMC Electronic Switch Series Variations

All data given in a technical specification sheet is based on 25[C]. The temperature range is dependent on the product series. Normally SMC products are rated from 0 to 50[C] or 0 to 60[C]. The failure predict function allows the user to anticipate possible maintenance requirements. How does it work?

OMR0032

There is a raised part on the controller side. (2) Dimensions Actuator side Controller side Protruding part 86 - 15.4 Controller setting cable (1) How to Order L E C W 2 A C Communication cable L E C W 2 U USB cable PC Communication cable (LEC-W2A-C) USB cable (LEC-W2-U) Controller configuration software USB driver Download from SMCs website https://www.smcworld.com (2) Operating environment

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MY CY Proper Auto Switch Mounting Position MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 93.5 24.5 -X CYP32 122 33 20Data

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

d e XAH7 XC XL X Section XX detail Bore size (mm) a b c d e 40 6.5 4 11 5.5 10.5 WB Z WA Section XX 8.5 50 4.5 13.5 7.5 13.5 11 7 18.5 63 10 17.8 Bottom view L 4-OA through 4-OB counter bore depth OL Section XX WA Z Section XX IA 4-NN through IC 4-MM depth ML R X0.02 HA T-slot for hexagon bolt X0.02 DA DB mIB ID X U VB VA H T PW 2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized

Digital Flow Switch

0 L/min C*2 D Voltage output (0 to 10 V)*1*3 0 V 0.1 V 10 V Model Minimum value of rated flow range*4 Maximum value of rated flow range PF3A703H 30 L/min 3000 L/min PF3A706H 60 L/min 6000 L/min PF3A712H 120 L/min 12000 L/min A C 0 0 *1 Analog output accuracy is within 3% F.S. *2 A and C will change according to the setting of the zero cut function. *3 The analog output current from the

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

air-filter-e

Symbol Element length Element length L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Element seal material Note 1) B C D Element seal material Non-asbestos Fluororesin NBR FKM A Note 2) T N V Symbol Port size Note 1) Not used with fiber elements.

Air Preparation Equipment

Symbol Element length Element length L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Element seal material Note 1) B C D Element seal material Non-asbestos Fluororesin NBR FKM A Note 2) T N V Symbol Port size Note 1) Not used with fiber elements.

MGZ Series

500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

Soft Start-up Valve

VAC]*1 V V V V 4 220 VAC [230 VAC]*1 V V V V AC (50/60 Hz) t d Rated coil voltage DC 5 24 VDC V V V V 6 12 VDC V V V V + G Grommet (Lead wire length: 300 mm) V V V V D Type D (DIN terminal/With connector) V V V V Y Type Y (DIN terminal/With connector)*2 V V V V DO Type D (DIN terminal/Without connector) V V V V YO Type Y (DIN terminal/Without connector) V V V V + y e Electrical entry u f

AC Servo Motor Driver (CC-Link Type)

(One station of programmable driver remote device station) (c) Max. number of connected units: 42 Note that the following conditions must be satisfied. {(1 a) (2 b) (3 c) (4 d)} 64 a: Number of 1-station occupying units b: Number of 2-station occupying units c: Number of 3-station occupying units (not available for LECSC-) d: Number of 4-station occupying units (not available for LECSC-)

Possible to transfer a workpiece at low-speed.

A33 A34 A43 A34 A37 C 7 C 7 C12 C11 C12 -X 6 -X 6 Chart 3, 4, 5 Chart 3, 4 Chart 4, 5 Combination is available only when all the conditions are fulfilled among the nation chart above.

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

Flow Control Equipment

When it reaches B, the head pressure (PH) rises quickly as indicated by the line from C to D. Therefore, there is no time loss associated with the pressure transmission lag indicated by the line from C to E, as in the case of meter-in control that is effected through the use of a speed controller.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

PF-OMM0004_C

[F 2] OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20