3

Symbol Rotation angle Symbol Rotation angle 90 Standard 90 IN OUT Nil A IN OUT 90 90 180 180 A IN OUT B IN OUT 180 180 270 270 B IN OUT IN OUT C 270 270 IN OUT C *1 Available for the VXS23 to 26. *2 Bracket is packed in the same container as the main body. *1 Available for the VXS23 to 26. *2 Bracket is packed in the same container as the main body.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Specifications Fluid Air Proof pressure 0.1 to 1.0 MPa Operating pressure range 1.5 MPa 5 to 60C (No freezing) Ambient and fluid temperature 90 Handle switching angle Paint color (Standard) VHS4510, 5510 Handle: Red, Body: Platinium silver VHS 4510 and 5510 can be locked from either side.

CC

When selecting a converter by its nominal diameter, the converters oil level speed should be 0.2 m/s or less. 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 200 150 CRA1H80-90 50 CRA1H63

CJP

Auto switch model Applicable bore size (mm) 23.6 55.0 OUT 39.3 44.5 104 IN 74.2 15 D-90/97 D-90A/93A 53.0 124 OUT 88.3 6, 10, 15 BP-1 OUT IN 6-2-8 3 Series CJP Pin Cylinder Single Acting, Single Return Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-90, D-90A Most sensitive position and operating range of auto switch (a) Operating range Most sensitive

CQM

115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x

CQS

Mounting bolt Mounting bolt D 35 40 45 50 55 60 35 40 45 50 55 60 45 50 55 60 Model C Model C D 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 CDQSWB12-5D -10D -15D -20D -25D -30D CDQSWB16-5D -10D -15D -20D -25D -30D CDQSWB20-5D -10D -15D -20D CDQSWB20-25D -30D -35D -40D -45D -50D CDQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 35l x 40l x 45l x 50l x 55l x 60l M3 x 35l x 40l

CXT

Bore size (mm) 12 16 20 25 32 40 Distance between guide rods GP 50 65 80 90 110 130 GP > 0.5 Calculation of load ratio to the theoretical output of cylinder = f / F Horizontal mounting: f = x W Inclined mounting: f = x Wcos + Wsin (Refer to the figure on the right.)

MGC

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

As a rule, it should be turned about 90 past the position at which tightening can be felt. 8-24-8 9 Series MGT Specific Product Precautions Be sure to read before handing. Mounting Mounting Warning Caution 1. Do not put hands or fingers between the plate and body.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

Compact

As a guide, turn about 90 past the point at which tightening can first be felt. Note) When tightening the auto switch mounting screw (included with auto switch), use a watchmakers screwdriver with a handle of approximately 5 to 6 mm in diameter. Tightening Torque for Auto Switch Mounting Screw [Nm] Switch Spacer Part No. Applicable bore size [mm] 25 32 Switch spacer part no.

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

0.5

IZF 21 IZF 31 P.12 Option Adjustable in 5-stages from wide to narrow angle 90-degree rotation mounting available (Adjustable in a vertical direction) Angle adjustment trimmer for adjustable louver 1 2 3 4 Angle setting 5 5 4 3 2 Application Examples Angle setting 1 Extensive static neutralization Long range at close range static neutralization 1 Fan Type Ionizer IZF Series IZF 10 IZF 10R

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. *4 The response time indicates when the set value is 90% in relation to the step input. * Products with tiny scratches, marks, or display color or brightness variations which do not affect the performance of the product are verified as conforming products.

One-touch Fittings

KQ2T-G Use to branch a female thread at both 90 angles. P.9 P.18 KQ2R Use to change size of One-touch fittings. Branch Union Elbow Union Tee Tube Cap P.11 KQ2LU Use to branch tubing at right angles. KQ2T Use to branch tubing at both 90 angles. KQ2C Use to plug unused tubing.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

N.C. r Others For the top cover O-ring, use a product of hardness 90 to prevent leaks or damage. If there is back pressure, install a check valve on the outlet side to prevent damage to the element. Turn the top cover 180 to reverse the oil flow direction.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

(LEJS63) 120 Model Selection LEJ Series AC Servo Motor Clean Room Specication SpeedWork Load Graph/Required Conditions for Regeneration Option(Guide) LEJS40/Ball Screw Drive LEJS63/Ball Screw Drive Horizontal Horizontal 0 10 20 30 40 50 60 70 80 90 60 Lead 8: LEJS40B Lead 10: LEJS63B LEF A 50 Area where the regeneration option is required.

PFxx-OMP0001CN

.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)( ) 90 () (0100) ()90ON(OFF) () 10 L/min 10 L ON OFF ON ()OFF () 0 -12No.PF-OMP0001CN-F , ,2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,101112 1 L/min SI SI ON-OFF ON 0 ripple -13No.PF-OMP0001CN-F 4 0.50.7 Nm ,, M4(4) (67) M4 -14No.PF-OMP0001CN-F (3.0,4 ) (67 ) 0.50.7 Nm ,, (3.0) -15No.PF-OMP0001CN-F IN8cm 2F.S

JXCx-OMT0061CN

(P.59) 11 - 3. 3.1 (DC24V) DC24V10% 3A 5A A/B 800 / RS485 Modbus EEPROM LED PWR LED ALM L ERR CC-Link L RUN CC-Link 20m oC40 oC() 0 90%RH ) oC60 oC () -10 90%RH ) 2 4.9m/s IP20 50MDC500V 170g() 190g(DIN ) [CC-Link ] CC-Link Version 1.10 1 2 4 (/) 32 /32 4 /4 64 /64 8 /8 128 /128 16 /16 156k/625k/2.5M/5M/10Mbps NRZI (EIA RS485) HDLC 16+X 12+X 5+1) CRC(X

CJ2

Rail mounting Perpendicular 90 In-line R In-line Refer to p.1.3-4 for the configuration. Part No. of Cylinder with Built-in Magnet Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch. Lead wire Auto switch model Load voltage Indicator Symbol "-A" (rail mounting) or "-B" (band mounting) should be suffixed to the part No. of the cylinder with auto switch.