VEX1

(Air operated) VEX1100 (Air operated) VEX1300/1500/1700/1900 VEX AN AMC (Air operated) VEX1200 Component Parts q Description No.

ZR

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

Title not found

21 286 12.5 a0 230 1 4 40 1 5 25 80 226 0 40 162 130 214 235 306 65 14.0 8 1 244 $et'ies CtA [ul0 $wllrh Standard ifications Reed oil 300m/S3 5Ol\rO or more under the test Nole l) 1500 VAC 1 min 14-1,10.F {Note 2) IEC spec 1P67, JlSC0920 Oil Prool Note l) Lead wire entry: conneclor type and D-9 type: 1000 VAC 1 min (Bet/veen case and cabte).

tTV2000/3000

0 0 0 1 0 2 0 Supply pressure lvlPa tlectro-Pneulnatis Series lTv203tr Repeatability Hysteresis Linearity @ 0 5 f, I3 o o o 6 o o 0 5 -o l 50 75 100 Input signal %F S 0 2 5 5 0 7 5 Input signal %F S Relief flow characteristics suppty pressure:0 TMPa Flow rate characteristics supply pressure:0 TMPa Pressure characteristics set pressure: 0 2MPa 1 0 a $ o s b g 5 0 0 = ^ g u 5 ) 500 1000 1500

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowingstart-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300,500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

Process Pump

is approximately 0.4 MPa. 0.7 0.7 0.7 SUP = 0.7 MPa 0.6 0.6 0.6 Discharge pressure (MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 250 500 1000 1500