Table of Contents

Auto Switches Common Specifications . 185 185 186 186 187 187 189 191 197 197 201 205 205 206 207 208 209 209 210 211 214 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 220 220 221 223 224 225 225 226 229 230 232 232 233 235 236 238 240 240 241 242 243 244 245 246

CJ2X/CUX/CQSX/CQ2X/CM2X

-X Caution 201. Be careful of the snap ring to pop out. When replacing the rod seal, take care that the snap ring does not spring out while you are removing it. Data 10-3-17 17 Made to Order Specifications: -XB13: Low Speed Cylinder 5 to 50 mm/s (CY1: 7 to 50 mm/s) Symbol Low Speed Cylinder -XB13 CJ2 Standard model no. XB13 CY1 Standard model no.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

JA/JAH/JB/JS

Mounting -X Warning 201. To screw the male threads of the rod into the female threads of the socket or the case, make sure that it does not bottom out. If the floating joint is used with its rod bottomed out, the stud will not be able to float, causing damage. For the screw-in depth of the female threads, refer to the dimensions (page 10-19-8).

Compact Cylinder

757 797 837 877 917 957 997 Bore size (mm) Foot Flange Single clevis With Auto Switch (Built-in magnet) Unit: g Cylinder stroke (mm) Bore size (mm) 5 20 C55-L020 C55-F020 C55-C020 10 50 60 80 100 125 150 15 20 25 30 35 40 45 25 C55-L025 C55-F025 C55-C025 20 216 229 255 307 359 424 489 113 126 139 152 165 178 191 204 32 C55-L032 C55-F032 C55-C032 25 279 294 325 388 450 528 606 154 170 185 201

C95

Part no. e b d +0.60 +0.15 +0.60 +0.15 +0.60 +0.15 GKM30-54 110 M27 x 2 30 30 155 54 55 45 125 GKM35-54 144 M36 x 2 35 35 201 72 70 57 160/200 CJ1 GKM40-84 168 M42 x 2 40 40 245 84 85 77 250 CJP CJ2 CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piston Rod

CQM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RQ MU D-X Caution 201. Do not scratch or dent the sliding parts of the piston rod and guide rods. Damage to seals may cause air leakage or faulty operation. 2.

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 40 0.01 CX 60 0 Overhang L (mm) DCXSJM CXSJL Graph (11) V = Over 400 mm/s; Up to 30 mm stroke CXSJM CXSJL Graph (10) V = Up to 400 mm/s; Up to 30 mm stroke -X 201 1 Data Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0

CXT

Theoretical Output (N) IN OUT Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.7 0.5 0.3 84.8 IN 59 42 25 12 113 OUT 79 57 34 151 IN 106 75 45 16 201 OUT 141 101 60 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628 377 8-27-3 4 Series CXT Weight

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 40 32 25 20 40 32 20 CX 0 0 D0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201

MXF

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX IN OUT DTheoretical Output (N) -X Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.3 0.2 20OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 Data 79 68 57 45 34 23 OUT 113 12 6 60 51 43 34 26 17 IN 85 OUT 201

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

9200-www.stevenengineering.com Reed switch (2-wire, 3-wire) Solid state switch (2-wire, 3-wire) 2-color indication solid state switch (2-wire, 3-wire) Auto switch CX +1 0 mm Stroke length tolerance DMXP16 Theoretical Output -X (N) 20Operating pressure (MPa) Piston area (mm2) 0.2 Bore size (mm) 0.3 0.4 0.5 0.6 0.7 Data 6 28 6 8 11 14 17 20 10 79 16 24 32 40 47 55 12 113 23 34 45 57 68 79 16 201

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEFS25ll-800l 1089 1129 806 910 16 7 840 35 675 LEFS Series AC Servo Motor Dimensions: In-line Motor LEFS32 5H9 ( ) depth 5 +0.030 0 (122) Encoder cable (7) Body mounting Note 1) reference plane 4 x M6 x 1 thread depth 9.9 70 42 Motor cable (7) 44 60 5.5 +0.030 0 5H9 ( ) depth 5 Motor option: With lock (2.2) L Encoder cable (7) A (Table traveling distance: Stroke + 6) Note 2) Motor cable (7) (201

Electric Actuator/Slider Type

12 5 600 LEFS25 -600 889 929 606 710 12 5 600 35 16 Series LEFS Dimensions: In-line Motor LEFS32 5H9 ( ) depth 5 +0.030 0 (122) Encoder cable (7) Body mounting Note 1) reference plane 4 x M6 x 1 thread depth 9.9 70 42 Motor cable (7) 44 60 5.5 +0.030 0 5H9 ( ) depth 5 Motor option: With lock (2.2) L Encoder cable (7) A (Table traveling distance: Stroke + 6) Note 2) Motor cable (7) 10 62 (201

07-cvs1-e

.: GR-S-010 (10 g), GR-S-020 (20 g) 201

JA/JAH/JB/JS

Mounting -X Warning 201. To screw the male threads of the rod into the female threads of the socket or the case, make sure that it does not bottom out. If the floating joint is used with its rod bottomed out, the stud will not be able to float, causing damage. For the screw-in depth of the female threads, refer to the dimensions (page 10-19-8).

Compact Guide Cylinder

mounting height Minimum stroke for auto switch mounting Operating range Auto switch mounting OUT IN [N] Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 12 (10 x 2) 6 OUT 157 31 47 63 79 94 110 IN 101 20 30 40 50 60 70 16 (12 x 2) 6 OUT 226 45 68 90 113 136 158 IN 170 34 51 68 85 102 119 20 (16 x 2) 8 OUT 402 80 121 161 201

Thermo-con/Rack Mount Type

carrying the product) Fluid fill port 67 10 0 221 202 184 176 192 184 7 38 20 0 38 0 Handle (for installing/removing the product to/from the rack) Label 484 474.5 439 379 47 9.5 0 Circulating fluid drain port CPC PLCD 16004 Ventilation hole (air outlet) External temperature sensor/Alarm output connector Model no. label Communication connector Power supply connector 104 180 242 279 379 429 64 0 201

Slider Type Ball Screw Drive/11-LEFS Series

Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS32 5H9 ( ) depth 5 +0.030 0 (122) LEF Encoder cable (7) Body mounting Note 1) reference plane 4 x M6 x 1 thread depth 9.9 70 42 Motor cable (6) LEJ 44 LEL LEM 5.5 60 +0.030 0 5H9 ( ) depth 5 Motor option: With lock LEY Encoder cable (7) LES Lock cable (4.5) (2.2) L (66) A (Table traveling distance) Note 2) Motor cable (6) 10 62 (201

Series AP3500

0.76 MPa) M5 thread (2 each) Sides (2 each) Bottom mount 0.06 in3 (1.07 cm3) Leak rate Across the seat leak Surface finish Connections Actuation pressure Actuation port connection Actuation port location Installation Internal volume Adjustable range of metered flow 2) 10 to 200 slpm 10 to 350 slpm 6 slpm 10 slpm 15 slpm 20 slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201