Lightweight and Compact

T1 : 293 [K] (20 [C]) Circulating fluid return temperature T2 : 296 [K] (23 [C]) Circulating fluid temperature difference iT : 3 [K] (= T2 T1) Conversion factor: minutes to seconds (SI units) : 60 [s/min] Heat generation amount by users equipment Q : Unknown [cal/h] [W] Circulating fluid : Tap water* Circulating fluid weight flow rate qm : (= x qv x 60) [kgf/h] Circulating fluid weight

53

T1 : 293 [K] (20 [C]) Circulating fluid return temperature T2 : 296 [K] (23 [C]) Circulating fluid temperature difference iT : 3 [K] (= T2 T1) Conversion factor: minutes to seconds (SI units) : 60 [s/min] Heat generation amount by users equipment Q : Unknown [cal/h] [W] Circulating fluid : Tap water* Circulating fluid weight flow rate qm : (= x qv x 60) [kgf/h] Circulating fluid weight

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.

70astamb1

trunnion -XC35 With coil scraper 6-7-15 16 Series MB1W Standard Type Basic style: (B) MM MM G VW 2-RcP G Cushion valve Port E D e D E Effective thread MB Effective thread 13 f h 9 l 16 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot In the case of w/o air cushion, it comes with rubber bumper.

mb1

MM 2-RcP G G MM D D e e Effective thread Effective thread 13 13 9 A K f N N f h + Stroke K A l + Stroke 9 l ZZ + 2 strokes S + Stroke h Without Air Cushion Stroke range Bore size (mm) Effective thread length Width across flats MB J K MM N P V W S ZZ S ZZ A C B D Ee11 F G H 32 40 50 63 80 100 4 4 5 5 5 5 M6 x 1 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84

SMC Pneumatic Clean Series

WH E-0.05 E-0.05 I 0 0 KA AL G port 8-J F K C-0.1 A NA F H S + Stroke ZZ + Stroke (mm) A AL Bore size Standard stroke range B1 C D E F GA GB H H1 I J K KA MM NA P RA S WA WB WH 20 20 20 W ZZ 40 30 27 Up to 300 50 35 32 Up to 300 63 35 32 Up to 300 19 27 27 6 7 7 44 55 69 139 162 162 26 32 38 14 18 18 1/8 1/4 1/4 16 20 20 8 9 9 25 30 32 87 102 102 2 2 2 25 30 30 22<19> 26<24> 26<24> 15 17

MHZ2/MHZJ2

Flat Finger Type [3] 4-MM thread depth L Attachment mounting thread K J A A D G B D B K J F C S W O Unit: mm Weight g F G Open Closed 2 2.5 3 4 J K MM L B C D Model A W 5.4 7.4 4.45 5.8 7.45 8.9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 55 115 235 420 5.2 8.3 10.5 13.1 10.9 14.1 17.9 21.8 2.45 3.05 3.95 4.9 6 8 10 12 5 8 10 12 +2.2 0 2H9 2.5H9 3H9 4H9 1.4 1.4 1.6 2 0 -0.2 0 -0.2 0 -

80

15.5 30.15 VDW2 M5, 1/8 4 33 14 39 20 17 36.2 2 x J thread depth K VCH VDW VDW Body material Stainless Steel SX10 2 x 3.4 Mounting hole W Y Grommet VQ LVM X U D 300 Q F Full wave rectifier (AC type) [mm] C R E G Mounting method Model Port size P A B B1 C D E F J K M VDW1 M5 12 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 15 22 11 51.7 20 8 13.5 M3 5 15 B B1 2 x P Port size A Mounting bracket

NAAMS Standards Compliant

A B C D D F E E F G H G H I I J K L M N O J K L 8F7 through +0.028 +0.013 +0.028 +0.013 8F7 through M 11 through N O 12.5 300.05 250.03 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 250.03 12.5 11 through P P Q M8 x 1.25 R28 Q 150.03 180.03 M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 [mm] [mm] Model NAAMS code

SMC

Line A IDG5 Fitting: Oil-free one-touch fitting Piping: Urethane tuing Oil-free: Wetted parts oil-free AME AMF Oil-free regulator Oil-free solenoid valve SUP Oil-free needle valve Line A Line B Example of clean air equipment Line B Line C Fittings: Clean one-touch fittings Piping : Polyolefine tubing Clean: Oil-free, Assembled in clean room Line C Clean precision regulator Stainless steel

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

CHKD/CHKG

CHKGL--XC64 A C C B 293

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 2) ( ): Denotes without sub-plate. 10-SV3000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (g) Note 2) Flow rate characteristics Note 1) Port Valve model Actuation type M12 waterproof connector (Cable length 300 mm) size C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv Single 250 (121) 4.1 0.41 1.1 4.1 0.29 1.0 2 position Double 253 (124) 10-SV300--02 Closed center 3.0 0.43 0.80 2.6 0.41 0.72

Table of Contents

Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

TDe8 TR W W D D E E d d TY M a MA MA M a C K F NA F NA A K A B H S + Stroke H + Stroke 0 -0.5 TX ZZ + 2 strokes TZ (mm) Bore size (mm) E H TR A a B C d F G GA J K M MA MM NA P R S T D TDe8 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 -0.032 -0.059 -0.032 -0.059 -0.032 -0.059 -0.040 -0.073 -0.050 -0.089 -0.050 -0.089 -0.050 -0.089 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Basic (B): CG1WB 1011With rubber bumper 2 x M5 x 0.8 Relief port F GA F GA Port on rod end Port on rod end Width across flats KA 2 2 Width across flats KA RA RA 2 x Rc P 1 1 0 E0.05 MM H1 H1 MM D D I 0 E0.05 C R0.4 R0.4 ZZ + 2 Stroke S + Stroke H A AL Width across flats B1 Width across flats B1 H + Stroke A AL K K 8 x J NA C Female rod end effective depth A1 MM ZZ + 2 Stroke H + Stroke H

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

e d o M 5 T L A N 2 ~ 1 * S I 5 T L A N 9 T L A N 2 ~ 1 * S I 9 T L A N e z i s e p i P , 4 / 1 : N I r i A 8 / 3 : T U O ) 3 m c ( z o y t i c a p a c l i O ) 0 0 0 5 ( 9 6 1 ) 0 0 0 5 ( 9 6 1 ) 0 0 0 9 ( 4 0 3 ) 0 0 0 9 ( 4 0 3 ) f g k ( s b l t h g i e W ) 6 . 2 1 ( 8 . 7 2 ) 2 . 3 1 ( 1 . 9 2 ) 0 . 6 2 ( 3 . 7 5 ) 6 . 6 2 ( 7 . 8 5 * n o i t a c i f i c e p s h c t i w s t a o l F e