MHZ 14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.
-M9NL u Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage (Pam3/s or less) Note 1) Symbol Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM
B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position
Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump
For valve weight, refer to page 2-3-10.
side) EX600-EU1 End plate (D side) EX600-ED4 End plate (D side) EX600-ED4 EX600-WEN1 1 0 A 14 A B A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector
16 182 23 C .'0.,' 2 5e ~ ; 58 290 296 52 11.2 66 114 298 304 80 37 y, 55 15 23 70 20 208 29 0 <u, 10. 0 ", 71 327 347 65 12.5 80 Slro!
ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP
x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.
PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G
, 15, 20, 30, 40 How to Order Size Without auto switch CRBU2 W 180 S E U 10 15 20 30 40 Size Connecting port location Nil E Side ported Axial ported 10 15 With auto switch Size: 10, 15 L T99 CDRBU2 W 180 S U With auto switch Size: 20, 30, 40 L CDRBU2 W 180 S T79 U With auto switch (With auto switch unit and built-in magnet) Made to Order Refer to the table below for details.
V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 1012 Booster Regulator VBA Series VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.
Sea water u Corrosive to the product GALDEN u Electric conductivity is too low. Fluorinert u Electric conductivity is too low. Ethylene glycol u Electric conductivity is too low. Ethanol u Electric conductivity is too low. Methanol u Electric conductivity is too low. Chloride water (Hypochlorous acid) u Corrosive to the product 1. Never use in the presence of explosive gases.
14 14 14 11.5 12 13.5 14.5 12 12.5 14.5 15 10 10 11.5 11.5 12 The auto switches listed below cannot be mounted on 63.
How to Order LEPS 10 K 50 1 1 R 6N q w e r t y u i o !
70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.
2-RcP NN CDH10 +0.058 0 G Plugged (M5 x 0.8) G H1 Standard port Width across flats B1 I Eh8 D MM AL CX0.1 0.2 K A U CZ N N F S + Stroke H L NA Z + Stroke RR ZZ + Stroke (mm) A AL B1 CD CX CZ D E F G H H1 I K L MM N Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x 1.25 Up to 700 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 25 M10 x 1.25 Up to 700 22 19.5 17 9 10 10 26 13 10
VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C
Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE