10

Calculation of kinetic energy E1 E1 0.63 J 5 Calculation of thrust energy E2 Calculate thrust energy E2 by selecting a model temporarily.

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

IDU/IDF

Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point C 25 Series IDU/IDF Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Cylinder with Lock Series CLS

GA 4-19 MM BZ GB RY 90 59 D BF FY W AL FT C N N M RT A K 43 B FX FZ BY S + Stroke H ZZ + Stroke With rod boot 75 l 40 15 h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 A AL B BA BB BC BF BY BZ C D FT FX FY FZ GA GB GC J 50 47 145 75 18 145 110 136 115 36 14 190 100 230 16 107 58 M14 x 1.5 to 1400 50 47 161 78 18 2 160 110 146 128 36 20 212 112 255 16 114 64 M14

2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

NAAMS Standards Compliant

300.025 300.025 250.03 1500.05 300.05 250.03 1000.05 300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 [mm] [mm] Model NAAMS code A B C D E F G H I J Model NAAMS code A B C D E F G H I J CKZ-63A031 ACA031M 125.0 110.0 95.0 80.0 65.0 CKZ-63A032 ACA032M 155.0 140.0 125.0 110.0 95.0 80.0 65.0 CKZ-63A033 ACA033M 185.0

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

15

Lead 20: LEYG32A 30 30 20 20 0 0 0 200 600 1000 1400 1200 Speed [mm/s] 0 200 600 1000 1400 Speed [mm/s] 866 A Model Selection LEYG Series Motorless Type * These graphs show an example of when the standard motor is mounted.

COQ2BP

L, ' N X NZ NX NZ L, P i A A 0ND. o oNDI1'o A, U, NX bJ AppI bore size A ., E, 11 MM 'R, U. -. . No. CQ2 Single Rod Clevis (mm) C02 Double Rod Clevis (mm) ;1 AppI bon ... A A, E, b MM -110 U, HDHa HX 50,63 56 ,. 028 0) Ml8x1.5 I. 20 ' 4 i 010 22 ~3 ~., Pan No. NX HZ L Y.Q05 50,63 56 20 028 40 , M 1 8xlS " 20 14 ~070 22.03 ~.S 44 SO.8 IV -60s eo 71 2. 038 !

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Integrated Controller

Lead 20: EQY25H 100 Min. 25% Max. 50% 10 20 30 40 50 90 70 80 60 0 Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 Pushing force set value [%] Ambient temperature Pushing force set value [%] Duty ratio [%] Continuous pushing time [min] 40C or less 50 or less 100 Pushing force 45% 50% 70% 42 Battery-less Absolute (Step Motor 24 VDC) Easy to

RZQ

J C A B DFull stroke -X 20Data eEntire stroke extension by pressurizing A, B and C ports. 10-10-1 2 3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9N Mounting style Number of auto switches A B L F G D Nil Both ends tapped 2 pcs.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Vacuum Pad

Stroke (M) Buffer specification Symbol Stroke 20, 25 35, 50 10 10 mm V V 20 20 mm V V J Rotating K Non-rotating Specifications Pad diameter Buffer specification Stroke [mm] Tightening torque [Nm] Mounting Spring reactive force [N] At 0 stroke At full stroke 20, 25 J/K 10, 20 2.5 to 3.5 M10 x 1 1.0 3.0 35, 50 J/K 10, 20 6.5 to 7.5 M14 x 1 2.0 5.0 Precautions Be sure to read this before handling

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

•

GTa disassemble, hold the spanner flats of the tube COver in a vice 40 20 9,43 37,7 47.2 56,6 IN 28,3 and by holding the rod cover spanner flats with a spanner, 98,2 OUT 19,63 58,9 78.5 117.8 20 SEt IN 16,49 49,5 66.0 82.5 99.0 unscrew anti-clockwise to remove the cover.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 109 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Front flange type: CHAWF Width across flats G 4-FD 4-J 2-Rc P T T V V Cushion adjustment screw MM Width across flats G GA Air release GA M MM R (max.) d d W W D E E D FY B C MA a a FT MA B F NA NA F K A A K H + Stroke S + Stroke

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

144 32 20 to 110 97.5 13 115 to 190 116.5 195 to 300 134 [mm] LEYGlM, LEYGlL Common Size Stroke range [mm] A B C DA EA EB EH EV FA FB FC G GA H J K M NA NB NC 15 to 35 141.5 116 50 20 46 85 103 52.3 11 14.5 12.5 5.4 40.3 98.8 30.8 29 34 M5 x 0.8 8 6.5 40 to 100 67.5 105 to 120 166.5 141 125 to 200 84.5 205 to 300 102 25 20 to 35 160.5 130 55 25 60 101 123 63.8 12 18.5 16.5 5.4 50.3 125.3

CXS

Kit components CXSL 6PS CXSL 10 B PS CXSL 15 A PS CXSL 20 A PS CXSL 25 A PS CXSL 32 A PS Chromium steel Nickel plated 6 10 15 20 25 32 15 Nickel plated Special steel Synthetic resin 16 17 Items 22 through 24 from the chart above Note 1) Anodized aluminum alloy for CXSL6.

energy saving effect

Applicable model -A -W HRSH100--20-S HRSH150--20-S HRSH200--20-S HRSH250--20-S HRSH300-A-20-S HEB HED HEA IDH 179 HRSH Series Optional Accessories q Piping Conversion Fitting This is a fitting to change the port from Rc to G or NPT.