Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

0.5 23 24 Z ZZ (NN 1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 ( ) depth 3 +0.025 0 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20

SV

In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

Compact Cylinder

Lead wire length symbols: 0.5 m Nil (Example) M9NW Solid state auto switches marked with v are produced upon receipt of order. 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ For details about auto switches with pre-wired connector, refer to the WEB catalog or Best Pneumatics.

MXW Series Long Stroke Slide Table

Lead wire length(m) 0.5 (Nil) Auto switch part no.

VXA21/22

Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.

Brake mechanism added

Applicable bore size Dd9 L1 L2 m d Drill through Included split pin Included flat washer Clevis Knuckle 2 x d Dd9 CDP-2A 40 10 0.040 0.076 46 38 4 3 3 x 18 L Polished round 10 L1 L2 m L1 L2 m CDP-3A 50 40, 50, 63 12 0.050 0.093 55.5 47.5 4 3 3 x 18 L Polished round 12 2 x d Dd9 CDP-4A 63 16 0.050 0.093 71 61 5 4 4 x 25 L Polished round 16 L1 L2 m CDP-5A 80 18 0.050 0.093 76.5 66.5 5 4

HRX-OM-M090

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-M090 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

RZQ

Lead wire length symbols: 0.5 m Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN D-P5DWL is available in sizes 40 to 63. In addition to the models in the above table, there are some other auto switches that are applicable.

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B

Digital Flow Switches, Series PF2A, Series PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

Digital Flow Switches

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

CG5-S

t l m L H1 B1 Metric (mm) (mm) Part no.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

693 AS-FSG Series Dimensions: Elbow Type Seal method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-23 (S) 3.2 7.2 13 (13) AS221FSG

HRX-OM-W038

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-W038 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

39

N O P Q J K L M N O P Q Part no.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Micromesh element equipped Note) Click here for details 3 4 5 6 3.5 MPa 7 MPa 14 MPa 21 MPa Nominal filtration Differential pressure indication Fluid direction 005 010 020 5 m 10 m 20 m 0 1 2 4 5 None Nil IN left IN right Differential pressure indicator Construction/Connection L Differential pressure indication switch Note) Note) The paper elements for water-glycol or emulsion is 10 m only

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type

MXU

30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25 0.190 0.165 0.464 52.5 30 4.

MXU

3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

HRX-OM-R005

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-R005 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.