33

20 [dm3] : 4.2 x 103 [J/(kgK)] : 305 [K] (32 [C]) : 293 [K] (20 [C]) : 12 [K] (= T0 Tt) : 900 [s] (= 15 [min]) Example of current measurement units (Reference) : Unknown [cal/h] [W] : Water : (= r x V) [kgf] : 1 [kgf/L] : 20 [L] : 1.0 x 103 [cal/(kgfC)] Heat quantity by cooled substance (per unit time) Q Cooled substance Cooled substance weight m Cooled substance weight volume ratio c

HRX-OM-R005

Model number: HRS060-N-20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRS060-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without

Table of Contents

Bore size (mm) Piano wire u Return spring CUJB4-S-PS 4 Sintered metallic BC i Bronze element CUJB6-S-PS 6 Set of nos. above !1 and an exclusive grease pack. o Magnet CUJB8-S-PS 8 Steel Nickel plated !0 Rod end nut CUJB10-S-PS 10 NBR !1 Piston seal NBR !2 Rod seal NBR !

Booster Regulator Series VBA1110 to 4200 1

If it is equipped with an auto-drain, check its operation once a day. Booster regulator VBA200 VBA400 VBA11 VBAT05(S) Air tank VBAT10(S) VBAT20(S) VBAT38(S) 14-9-7 8 VBAT05 to 38 Related Products: Model (Material: Carbon steel) This is a small capacity air tank to which a booster valve can be connected directly in a compact manner.

VZS

For details, refer to pages 3-7-19 and 3-7-20.

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Sine Cylinder Series REC

0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8

Sine Cylinder Series REC

0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8

Series CQ2

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

C95

CJ2 10 10 CM2 5 4 3 5 4 3 C85 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 C76 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ CG1 Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa MB 1000 1000 100 80 MB1 500 400 300 500 400 300 63 63 63 100 80 CP95 200 200 50 40 50 50 100 100 C95 63 Load weight: m [kg] Load weight: m [kg] 32 50 40 50 40 30 50 40 30 C92 32 20 20 CA1 [Example

CXT

M 20 100 B A90 S Platform cylinder Number of auto switches Bearing 2 M Slide bearing S 1 L Ball bushing bearing n n Auto switch Bore size/Stroke (mm) Without auto switch (Built-in magnet) Refer to p.3.8-10 for common specification and wire specification.

MQQ

Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40 20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT

MQQ

20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT FX FZ H 2-FC S + Stroke ZZ + Stroke D-X 20Bore size (mm) FC FT FX FY FZ H ZZ S Data 10 5.5 2.3 33 20 42 28 101 65 16 5.5 2.3 42 24 54 30 114 74 20 7 4 60 34 75 40.5 151 97.5 25

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) H1 MM FZ FX Relief port (20, 25) Eh8 D I 20 to 32 Width across flats KA 1.5 A AL K Standard port Relief port (32, 40) Width across flats NA 4 x FD 45 FT F ZZ + Stroke Z + Stroke S + Stroke H FY 40 (mm) 12 10 8 6 KA MM NA NN B1 B2 Bore size 4 7 FD E 20-0.033 0 13 8 AL D K 52 40 40 34 B FX FZ FY G FT 46.5 37.5 33.5 28 FL Z H H2 H1 S P I F C2 A ZZ

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

S 1 pc. Thread type Body option N n pcs.

Transfer

500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2

Speed Controller with Indicator

3.2 13.3 24 17.5 36 43.9 42.4 40.8 39.3 13.3 20 15 14 AS231FS1-01-04 (S) 4 8.2 13.9 25.1 AS231FS1-01-06 (S) 6 10.4 26.2 20.4 38.8 15 AS231FS1-01-08 (S) 8 13.2 10.2 16.4 30.1 21.5 40 14.2 16 AS231FS1-02-04 (S) 4 7.2 9.6 12 1/8 13 (12.7) 24 AS231FS1-02-06 (S) 6 11.2 19 33.8 21.4 43.9 14.2 26 AS231FS1-02-08 (S) 8 13.2 34.9 23.5 46 15.6 27 AS231FS1-02-10 (S) 10 15.9 20.9 38.1 24.7 47.3 17 28

1

12 length 3.5 M14 x 1.5 42.5 M27 x 2 40 13 15.5 M8 x 1.25 Port Thread: M5 Female Rod End [mm] [mm] Port Thread: Rc1/8, NPT1/8 Female Rod End [mm] [mm] Bore size G S ZZ Bore size ZZ 20 5 37 (42.5) 78 (83.5) 20 63.5 (69) 25 5 37.5 (43) 81.5 (87) 25 64 (69.5) 32 5 38 (44) 82 (88) 32 64.5 (70.5) 40 5 44.5 (50.5) 95.5 (101.5) 40 72 (78) Bore size G S ZZ Bore size ZZ 20 7.5 49 (54.5) 90 (95.5)

SL5200

0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.