Suction Flow Rate: 600 L/min (ANR, Supply Pressure: 0.35 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: L Plug Vertical Connector w/Lead Wire 300mm, Light/Surge Voltage Supprressor

Suction Flow Rate: 600 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: L Plug Vertical Connector w/Lead Wire 300mm, Light/Surge Voltage Supprressor

Suction Flow Rate: 600 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Port Exhaust, Rc1, G1, NPT1, Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: Non-locking Push Type, Vacuum Pressure

Suction Flow Rate: 300 L/min (ANR, Supply Pressure: 0.35 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: Non-locking Push Type, Vacuum Pressure Sensor:

Suction Flow Rate: 600 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: L Plug Vertical Connector w/Lead Wire 300mm, Light/Surge Voltage Supprressor

Suction Flow Rate: 600 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Port Exhaust, Rc1, G1, NPT1, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: L Plug Vertical Connector w/Lead Wire 300mm, Light/Surge Voltage

Table of Contents

(58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Smooth Cylinder/Low Speed Cylinder

I-020B I-032B I-040B +0.058 0 +0.058 0 0.1 0.2 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 +0.058 0 +0.058 0 0.1 0.2 0.1 0.2 9 M10 x 1.25 M10 x 1.25 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 +0.070 0 +0.070 0 0.1 0.3 0.1 0.3 12 M14 x 1.5 M14 x 1.5 15.5 16 12 16 24 50 20 14 13 92 69 22 24 55 20 Double Knuckle Joint Y (Max.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Piping Screw-in piping Piston speed 50 to 500 mm/s Mounting Through-hole Auto switch Mountable 7-6-66 67 Refer to page 7-9-1 for further information on auto switches.

CQS

(2 color) D-F9PW 5.3-66 3 wire, PNP, In-line (2 color) D-F9BW 5.3-66 2 wire, In-line(2 color) Solid state switch D-F9NV 5.3-39 3 wire, NPN, Perpendicular D-F9PV 5.3-39 3 wire, Water resistant D-F9BV 5.3-39 2 wire, Perpendicular D-F9NWV 5.3-66 3 wire, NPN, Perpendicular(2 color) D-F9PWV 5.3-66 3 wire, Water resistant(2 color) D-F9BWV 5.3-66 2 wire, Perpendicular(2 color) D-F9BAL 2 wire, In-line

42

w AXT632-25-11 (M4 x 66) 2 q AXT632-25-6 (M4 x 114) 4 For manifold * The individual EXH cannot be mounted on the top. w AXT632-25-11 (M4 x 66) 2 Valve + Restrictor (Top) (Bottom) + Individual SUP or Individual EXH (Top) (Bottom) q w Valve + SUP stop valve (Top) + Individual SUP, Individual EXH or Restrictor (Bottom) q AXT632-25-6 (M4 x 114) 4 For manifold w AXT632-25-11 (M4 x 66) 2 Valve

Free Mount Cylinder Series CU

70 72 5 st 56 62 66 65 73 79 5 st 38 41 45 51 55 57 5 st 56 62 66 75 83 89 10 st 43 46 50 46 50 52 10 st 66 72 76 75 83 89 10 st 43 46 50 56 60 62 10 st 66 72 76 85 93 99 6 10 16 20 25 32 500 Series CU Free Mount Cylinder Single Acting, Single Rod, Spring Return/Extend Minimum Stroke for Auto Switch Mounting (mm) Applicable auto switch No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V

One-touch Fittings

51.7 9.6 106.6 1/2 KQ2E13-37l 1-12UNF 28.57 28.57 36.1 15.7 26 17 66 51.7 9.6 114.3 L1 M L2 m: A (Brass), N (Brass + Electroless nickel plating) Bulkhead Male Elbow: KQ2LE Applicable tubing O.D.

5 Port Solenoid Valve

(ARBQ5000-00 A B C 1 5) q AXT632-25-6 (M4 x 114) 4 Valve + Interface regulator SQ w AXT632-66-1 (M4 x 64) 2 Not necessary when mounting the sub-plate.

Stability of suction position,

ZP3E-T40UMl-A10 23.2 22.7 26.2 ZP3E-T50UMl-A10 33.8 33.0 39.2 408 A With Set Screw: Vacuum Inlet Vertical ZP3E Series Pad diameter 63 to 125 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T63UMl-A16 ZP3E-T80UMl-A16 10 M16 x 1.5 48.9 Seal washer 10 M16 x 1.5 48.9 Seal washer Width across flats 10 Width across flats 10 30.5 7.4 30.5 7.4 21.1 21.1 5 5 66

CL

For details about auto switches with pre-wire connector, refer to page 9-15-66. 9-3-1 34 Series CL1 Model Provided with a compact lock mechanism, it is suitable for intermediate stop, emergency stop, and drop prevention.

IFW series flow switches detect and confirm liquid flow. They are applicable to general industrial machines and various other applications. The IFW series will detect the flow of water and other non-corrosive fluids. The detection range is from 1 to 50 liters per minute. The flow setting can be adjusted with a screwdriver from the outside of the unit without removing the cover.Detects and

IFW series flow switches detect and confirm liquid flow. They are applicable to general industrial machines and various other applications. The IFW series will detect the flow of water and other non-corrosive fluids. The detection range is from 1 to 50 liters per minute. The flow setting can be adjusted with a screwdriver from the outside of the unit without removing the cover.Detects and

IFW series flow switches detect and confirm liquid flow. They are applicable to general industrial machines and various other applications. The IFW series will detect the flow of water and other non-corrosive fluids. The detection range is from 1 to 50 liters per minute. The flow setting can be adjusted with a screwdriver from the outside of the unit without removing the cover.Detects and

IFW series flow switches detect and confirm liquid flow. They are applicable to general industrial machines and various other applications. The IFW series will detect the flow of water and other non-corrosive fluids. The detection range is from 1 to 50 liters per minute. The flow setting can be adjusted with a screwdriver from the outside of the unit without removing the cover.Detects and