Atex: 56- (ATEX category 3 - II 3GD), Body Size: 5 (1/2 Standard), Body Material: 1 (ADC12, Aluminium), Diaphragm Material: 1 [PTFE (Fluororesin)], Switching Type: 3 (Air Operated), Thread: N (NPT), Port Size: 04 [1/2 (15A)]

Atex: 56- (ATEX category 3 - II 3GD), Body Size: 5 (1/2 Standard), Body Material: 2 (SCS14, Stainless Steel), Diaphragm Material: 1 [PTFE (Fluororesin)], Switching Type: 0 (Automatically Operated), Thread: F (G), Port Size: 04 [1/2 (15A)]

Atex: 56- (ATEX category 3 - II 3GD), Body Size: 5 (1/2 Standard), Body Material: 0 (PP, Polypropylene), Diaphragm Material: 1 [PTFE (Fluororesin)], Switching Type: 0 (Automatically Operated), Thread: N (NPT), Port Size: 04 [1/2 (15A)], Option: N (w/Silencer)

Atex: 56- (ATEX category 3 - II 3GD), Body Size: 5 (1/2 Standard), Body Material: 0 (PP, Polypropylene), Diaphragm Material: 1 [PTFE (Fluororesin)], Switching Type: 3 (Air Operated), Thread: F (G), Port Size: 04 [1/2 (15A)]

Atex: 56- (ATEX category 3 - II 3GD), Body Size: 5 (1/2 Standard), Body Material: 0 (PP, Polypropylene), Diaphragm Material: 1 [PTFE (Fluororesin)], Switching Type: 3 (Air Operated), Thread: N (NPT), Port Size: 04 [1/2 (15A)]

Atex: 56- (ATEX category 3 - II 3GD), Body Size: 5 (1/2 Standard), Body Material: 0 (PP, Polypropylene), Diaphragm Material: 1 [PTFE (Fluororesin)], Switching Type: 0 (Automatically Operated), Thread: N (NPT), Port Size: 04 [1/2 (15A)]

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Thread F G(PF) N NPT Accessories Options Table: Accessory/Option combinations Available Not available Depending on model L D J T AM150 R AM250 AM350 AM450 Applicable models Accessories /Options C C D -J -R AM550 AM650 AM850 Port size N.C. auto drain N.O. auto drain Accessories 06 3/4B 01 02 03 1/8B Drain guide 1/4B 10 14 20 1/4B 1B 11/2 B Options INOUT reversal 3/8B Element service indicator 04

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

PT) Table: Accessory/Option combinations Depending on model l Not available Available F G (PF) N NPT Accessories Options C C D -J -R D J T AMD150 R AMD250 AMD350 AMD450 Applicable models Accessories /Options Port size AMD550 AMD650 AMD850 01 B B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN R OUT reversal -T Element service indicator Accessories B 02 03 1 4 3 8 04

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

AMF

model Bracket assembly AMF150 AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 Symbol BM51 BM52 BM53 BM54 BM55 BM56 BM57 spring washer With cap bolt, AMF Refer to ''Precautions" on p.4.6-33. 4.6-27 Odor Removal Filter Series AMF AMF150 to AMF850 How to Order AMF 250 03 R B Option R IN, OUT reversal Body size Accessories (Optional) 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 1 4 3 8 04

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Thread Rc(PT) Table: Accessory/Option combinations Depends on model l Not available Available F G(PF) N NPT Accessories Options C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable models Port size Accessories Options AMH550 AMH650 AMH850 B 01 B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN/OUT reversal -T Element service indicator Accessories 02 03 1 4 3 8 04

3 Port Solenoid Valve Metal Seal Series VZ200 1

650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG VP S070 Pilot EXH Locking type manual override VQ VKF VQZ 1 2 DIN terminal: VZ2 2-D(Z)-M5 1 2 L plug connector: VZ2 2-L(Z)-M5 VZ 300 (Lead wire length) VS VFN With light/surge voltage suppressor Pg7 Applicable cable O.D. 3.5 to 7 2-2.8 mounting hole With light/surge voltage suppressor 2-2.8 mounting hole 56

Table of Contents

Series SZ3000 5 Port Solenoid Valve Serial Transmission Type. 52 53 54 55 56 57 57 59 60 60 61 62 63 64 65 66 67 67 69 70 70 71 72 73 74 75 76 77 77 79 80 80 81 82 83 84 85 87 89 91 97 97 98 100 101 101 102 103 104 105 106 106 107 111 111 114 121 125 130 130 132 134 137 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Profile Design ISO/VDMA Air Cylinder Series CP95

type L STROKE STROKE Mounting type F Rear mounting STROKE Front mounting Mounting type C Mounting type D STROKE Bore 1.8-10 ISO/VDMA Air Cylinders Series CP95 Dimensions mounting accessories C, D, E and CR [mm] Mounting type C Mounting type D Bore E1 EW TG1FL l1 L I2 d1 CD MR d2 R1 E2 UB CB 32 45 26 32.5 22 5 12 5.5 30 10 9.5 6.6 6.5 48 45 26 40 51 28 38 25 5 15 5.5 35 12 12 6.6 6.5 56

Precision Cylinder Series MTS

MT-S16 16 Weights MT-S20 20 (g) MT-S25 25 End lock additional weight 50 157 222 400 547 1,000 1,533 Standard stroke (mm) MT-S32 32 Model 200 699 912 1,495 2,208 25 52 138 186 350 487 918 1,420 175 649 851 1,412 2,095 5 36 150 599 790 1,330 1,983 10 40 125 549 729 1,247 1,870 15 44 100 194 294 500 669 1,165 1,758 20 48 75 175 258 450 608 1,083 1,645 30 56 MT-S40 40 MTS8 MTS12 MTS16 MTS20

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 2 3 4 Clean room class 1000 Accumulated pulse output Accumulated pulse output Output 1 Switch output Switch output Shipment Accumulated pulse output Accumulated pulse output Output 2 Switch output Switch output For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order PF2D5 13 20 1 Remote Type Sensor Unit Flow rate range 0.4 to 4l/min 1.8 to 20l/min 4 to 40l/min 04

VH Series, 4 Way Hand Valve

N 3 4 2 1 VH422-N02 to N06 VH432-N02 to N06 2 (Position) Flow direction 2 Flow direction 4 Flow direction 2 Flow direction 4 90 45 45 3/4" 185(10.2) 1 2 21.34 (9.7) VH6 VH600-N06,N10 3 (Closed center) 3/4", 1" 1" 194(10.5) 3 4 2 How To Order Series VH How to Order VH 2 0 1 02 N Options Hand valve R In/Out Reverse Valve model (Cv) Port size (NPT) 2 3 4 6 (0.4) (1.1) (3.2) (10.5) 02 03 04

ZQ-OM01401

RL a 2 0.54~0.66Nm) 1 Ass'y P.27 1 2 L POM,POM,PET,SUS 3 R POM,POM,PET,SUS 4 () (PET) P.27 2 5 Assy PBT P.27 3 6 Assy () P.27 7 7 NBR P.27 4 8 NBR P.27 5 9 Ass'y P.27 6 26 - No.ZQ-OM01401-B 7.4 1 Ass'y2 ) ZQ1-SR1-04-A (1) 01 1 (1) 02 2 08 8 2 () (2 ) ZQ1-SE2-A 3 Assy (2 ) ZQ1-SC1-A 4 (10 ) ZQ-3-005-10AS 5 (10 ) ZQ-3-009-10AS 6 Assy (4 ) ZQ1-WS3-A (1) 3 M3 () (1) 4 M4 ()

Speed controller with one-touch fittings , Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2 , Maximum operating pressure 1MPa, Meter in or meter out control , Port sizes: M3, M5, U10/32, 01, 02, 03, 04 , Various tube O.D. in both metric and inch, Speed Controller, FLOW CONTROL, 56 lb