LEF-OM006xx

OUT 3 INP INP LEFS 0.5 LEFB 1 4 1INP BUSYOFF 5 6 7 () 1 / EMG SVREOFF 2 /CN1 BK RLS DC24V(+) /P34 5.6 8 1 , , EMG SYREOFF /P911 2.1. /LEFS /P12,13 2.2 /LEFB BK RLS DC24V(+) /P40 6.6 2 /CN1 BK RLS DC24V(+) -43- No.LEF-OM00601 2012 10 UL 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com -44-

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EVS1-01/1-02 Dimensions EVS1-01-FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

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EVS1-01/1-02 Dimensions EVS1-01-FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

EVS1-01/1-02 Dimensions EVS1-01-FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port

Electric Actuator Triple Axis P&P Unit

4-M8 x 1.25depth18 80 31 5 4H10depth5 92 B section detail (S=2/1) B (Stroke+145) 25 18 (52) Stroke+188 (92) 10 10 Stroke+240 60 2 60 31 62.5 Reference plane 130 63.5 3 40 (Refer to *4) 1.2 201 85 (For 100 to 150 strokes) 208 (For 200 to 1000 strokes) 92 (Stroke+131) 10 110 100 (44) Stroke69 E-100 F-M5 x 0.8depth10 4-M5 x 0.8depth10 20 20 3-4H10depth5 4-6.5 12.5 13.5 C 31 63.5 4H10depth5

JXCx-OMT0032CN

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

) 69 2 x M10 x 1.5 thread depth 20 (Mounting thread) 48 112 56 70 80 58 17 +0.4 +0.1 4 44 40 52 52H9 +0.074 depth 5 0 66 4 x M10 x 1.5 through (Thread for mounting attachment) Rc 1/4 (G1/4, NPT1/4) (Finger closing port) Auto Switch Mounting Groove Dimensions 58.6 30 38 85 13 13 Rc 1/4 (G1/4, NPT1/4) (Finger opening port) 16 22 5 6.45 MHW2-50D1 6 Right angle finger type 78 37 24 30 39 12 58

AC Servo Motor Driver (SSCNET Type)

Item Setting value, setting range Default value AXIS 1 AXIS 2 AXIS 3 AXIS 4 0:Near-point dog method 0 70 220 370 520 4:Count method 1) 5:Count method 2) 6:Data set method Pr.43 OPR method Pr.44 OPR direction 0:Positive direction (address increase direction) 0 71 221 371 521 1:Negative direction (address increase direction) 0 72 73 222 223 372 373 522 523 Pr.45 OP address The setting value

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

MK

4 !5 !6 !7 !8 !

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

LECA6_C

11 Z A-4 10 3 10.5 14.2 2 1 5.6 23.7 A1 2 (7.0) 1 3 3 4 B1 12.7 2 1 18 A4 B4 (6.7) 15 16 11 30.7 44 - 11.2 () L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

For magnet mounting 8 2.5 L 4.7 6-M3 x 0.5 depth 4 15 15 (mm) MA Z W V S M L K J H N Model 6 60 40 44 10 21 20 20 52.4 32 6.5 MXP10-10B 18 90 65 74 20 39 36 36 82.4 50 7.5 MXP10-20B 10 Series MXP Dimensions MXP12 2-M4 x 0.7 depth 6 2-M3 x 0.5 depth 4 Z 3 With metal stopper V K 5 4 G Max. 4 Max. 3 7.5 M 20 Stroke: S MXP12-15 Width across flats 2 Width across flats 6 Piping port A 2-M5 x 0.8

For Water Digital Flow Switch Series PFW

/Remote Type Sensor Unit for Water PFW504/520 Wiring L 56 1.6 6 60 48.2 17 Brown (1) DC (+) Main circuit Black (4) OUT 34 54 44 Blue (3) DC () Use this sensor by connecting it with the P/A remote type display unit series PFW3. (1), (3), and (4) are connector pin numbers. , , and are the series PFW3 terminal numbers. 2-Port size 4-4.5 40 50 (43.5) Connector pin numbers 2 1 42 4 3 4 Pin description

Compact Guide Cylinder

NPT1/4 G1/4 13 19 49 35 115 52.5 133 104 122 92 Bore size [mm] WA WB X XA XB XC XL YY YL Z 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less Over 25 st 100 st or less Over 100 st 32 24 48 124 33 45 83 42 4 4.5 3 6 M8 x 1.25 16 21 40 24 48 124 34 46 84 50 4 4.5 3 6 M8 x 1.25 16 22 50 24 48 124 36 48 86 66 5 6 4 8 M10 x 1.5 20 24 [mm] MGPKL: A, DB, and E Dimensions Bore size

Sine Rodless Cylinder Series REBR Direct Mount Type

4 !3 y i #1 !5 #2 !9 !7 !1 !2 !0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.

VVX31/32/33

4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?

KS/KX

43 69 77 95 89 106 1 8 1 4 14 8.6 8.6 4 29 32 33 34 1 8 15.2 18 27 6 18.5 21.6 14.9 17 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 42 10 18.5 32 23.5 21 30.5 25.0 22 7 Kl 43 44 45 20.9 24 35 26 22 8 35.1 35.1 12 Ml Reference dimensions after R(PT) thread installation.