VDW

= 17.5 8.8 (1.5) 21/8 (IN port) (: Thread type) LVA L1 L2 LVH L3 LVD 1 Stations D side 2 3 4 5 n U side LVQ LQ VDW13-GVDW13-GVDW13-GVDW13-Gn-M5 x 0.8 (OUT port) LVN 61 TI/ TIL 26.5 19.6 PA 13 PAX 1.5 7.7 P = 17.5 8.1 4-M3 x 0.5 PB When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes. (16.3) 11.5 7.7 7.7 11.5 5 22.5 40 7.5 L Dimension (mm) n (stations) Dimension

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

JA/JAH/JB/JS

If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.

JA/JAH/JB/JS

e r t y No. q w e r t y u i o Description Material Free-cutting steel Brass Stainless steel Brass Synthetic rubber Low carbon steel wire rod Note Stud Case Ring Socket Dust cover Rod end nut Note Stud Case Ring Cap Dust cover Set screw Rod end nut Flange Foot RHC MK(2) RS Q G RS H A RZQ Accessory Dimensions MI W S Rod end nut (mm) CEP1 d: Thread nominal size M3 x 0.5 M4 x 0.7 M5 x 0.8 M6

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

Compact Cylinder with Air Cushion

B + Stroke L K 2 x 4-M6 x 1.0 effective depth 10 A + Stroke M W Rod end male threads H1 Rod end nut C1 X L1 Rod end male threads mm Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Standard type mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5

17

(1) Common G 60 80 100 Applicable cylinder MY1B25 MY1B32 MY1B40 G H JJ L P LD Part no.

MLGC

Connector G59W G5PW K59W G5BA P P P P P P P 3 wire (NPN) K I.C. 5V, 12V Diagnostic indication (2 color) Relay, PLC 3 wire (PNP) K 24V K 12V 2 wire Watrer resistant (2 color) Grommet K With timer 3 wire (NPN) P P K I.C. 5V, 12V G59F Latch w/ diagnostic output (2 color) P K 4 wire (PNP) Latch with diagnostic output (2 color) H7LF P P K 0.5m Ex) B80C 5m Z Ex) B80CZ 3m L Ex) B80CL

CLQ

16 16 W Dust cover (Manual unlocking unit) L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (Manual unlocking unit) M5 x 0.8 unlocking port (Unlocks when pressurized) Rod end male thread H1 Rod end nut H2 X C1 L1 Stroke range Without auto switch With auto switch Bore size (mm) A G L M U VH VV W E H I K Q S D C A B B 61 68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 20 25 36

CG5-S

Bore size (mm) W P S WA WB WH ZZ 20 30 M5 x 0.8 83 22 16 23 118 25 30 M5 x 0.8 83 22 16 25 123 32 25 1/8 85 22 16 28.5 125 40 20 1/8 93 22 16 33 143 50 20 1/4 109 25 18 40.5 167 63 20 1/4 109 25 18 47.5 167 80 20 3/8 130 30 22 60.5 201 100 20 1/2 131 31 22 71 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS X165US inch rod option dimensional changes S + Stroke H GA GB Width across

CE

P-67.5 (YG)

Series CE1

P P P P P P P P P P P 25 to 300 20 24V DC P P P P P P P P P P 25 to 400 32 P P P P P P P P P 25 to 600 40 P P P P P P P P P 25 to 600 50 P P P 25 to 600 63 P P P 4.4-2 Stroke Reading Cylinder Series CE1 Applications Parts inspection Confirmation of press-fit Measures part dimensions, differentiates between good and defective articles, and prevents the mingling of different parts, etc.

1.63

10 100 -X Eccentric distance L (mm) 507 MGPW Series L L m m Horizontal Mounting Slide bearing MGPWM20 to 63 (17) L = 50 mm, V = 200 mm/s or less (18) L = 100 mm, V = 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 25 25 25 20 25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V

Clean Gas Filter

SFB104-M5 0.1 q e t r w Max. flow rate line Inlet pressure Pressure drop MPa 0.3 MPa 0.01 0.1 MPa 0.7 MPa 0.001 0.5 MPa IN 0.0001 100 0.1 1 10 y Flow rate L/min (ANR) Description No.

MQQ

CAT.ES20-156 A Compact Low Friction Cylinder (Metal Seal Type) Series MQQ 10, 16, 20, 25, 28 Lateral Load Resisting Low Friction Cylinder (Metal Seal Type) Series MQM 6, 10, 16, 20, 25 Series MQM Series MQQ eds spe ow ds d l spee an rm rict w f ion c lo igh ifo act ylind un er f mp or o h Co w t Q lo MQ or isti ng lo res ad w frictio r f l lo de lin n cy era Lat M MQ Low Friction Cylinder

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

S070

DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) VZ VS VFN Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

VCC

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

IIIIIII

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch