Environment

1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 60 30 Work load: W [kg] Work load: W [kg] 50 Lead B Lead A 40 20 30 Lead H 20 10 Lead A/Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 39 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECP6/LECP1/ LECPMJ

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

10

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Tie-rod mounting Band mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry 3-wire (NPN) 24 V 5 V, 12 V M9N V V V v v IC circuit 3-wire (PNP) M9P V V V v v 2-wire 12 V M9B V V V v v Terminal conduit 3-wire (NPN) Grommet G39 2-wire 12 V

LEC-OM07605CN

V DOCOM DOCOM RA RA (FR-BIF) (UVW)(UVW) U U U U V V M V M V W W W W U,V,WCN2 3 2 3. 3.1 (L1L2L3) ALM() () U,V,WCN2 SSCNET/HAA EM2EM1 AC200V240VL1L3LECSS-S LECSS-SLECSS2-T ON(MCCB) 3 3 3

Refrigerated Air Dryers

valve type auto drain (applicable to moderate pressure) IDU3E to 75E IDUmE-m-V IDF100F to 150F IDFmF-m-V Water-cooled type*2 IDF100F to 150F IDFmF-m-W p. 33 IDF190D, 240D IDFmD-3-W *1 The IDF100F to 150F, 190D, 240D standard types are equipped with a heavy-duty auto drain and a terminal block for remote operation, stop, operating, and error signal. *2 The IDF370D standard type is the water-cooled

V

www.stevenengineering.com I 6.3 VACUUM VACUUM EJECTOR SERIES NZM H O W T O O R D E R NZM V A C U U M E J E C T O R D I M E N S I O N S W I T H VA LV E A N D VA C U U M S W I T C H W I T H V A LV E S A N D S W I T C H (N)ZM HK5LZ V O LTA G E 5 24VDC 6 12VDC N O Z Z L E D I A M E T E R 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm V A C U U M S W I T C H Nil Without E15L Solid State (NPN) E55L Solid

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(g) Note 2) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: Weight of DIN rail) Note 1) In cases such as those where many valves are operated simultaneously, use station B (SUP/EXH block on both sides), applying pressure to the P ports on both sides and exhausting from the R ports on both sides.

NCQ8

") 2 NCDQ8A(B)-100T(M) NCDQ8A(B)-200T(M) 1 0.37 (3/8") 0.25 (1/4") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 0.37 (3/8") 0.37 (3/8") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 2 47 Series NCQ8 Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch D-A9 (V) Solid state switch D-M9 (V) D-F9 W(V) B A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures

Cylinder with Lock

IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93V*2 A93 V V V V Relay, PLC No 100 V or less A90V A90 V V IC circuit *1 Water-resistant type auto switches can be mounted on the above models, but SMC cannot guarantee water resistance. *2 The 1 m lead wire is only applicable to the D-A93. * Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM * Solid state auto

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

H7NF 4-wire (NPN) 5 V, 12 V Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Solid state switches marked with are produced upon receipt of order.

CRB2/CRBU2/CRB1

Applicable shaft type: W The short shaft can be further shortened by machining male threads into it. (If shortening the shaft is not required, indicate "" for dimension Y.) Applicable shaft type: W (mm) Size L2 max. Y Q2 (mm) Q1 = M Q2 = M Size 10 L1 max.

Air Slide Table

m [kg] V = 50 1.5 V = 100 V = 150 1.0 V = 200 0.5 0.0 0 20 40 60 80 100 120 140 Allowable overhang L [mm] MXQ16(A)-10, 20, 30Z MXQ16(A)-40, 50Z 4.5 4.5 V = mm/s V = mm/s 4.0 4.0 3.5 3.5 Load mass m [kg] Load mass m [kg] V = 50 V = 50 3.0 3.0 V = 100 V = 100 2.5 2.5 V = 150 V = 150 2.0 2.0 1.5 1.5 V = 200 V = 200 1.0 1.0 0.5 0.5 0.0 0.0 0 10 20 30 40 50 60 70 80 90 0 10 20 30 40 50 70 60 Allowable

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

energy saving effect

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

48 V, 100 V, 110 V, 120 V, 200 V, 220 V, 230 V, 240 V DC 12 V, 24 V Allowable voltage fluctuation 10% of the rated voltage Allowable leakage voltage AC 5% or less of the rated voltage DC 2% or less of the rated voltage Apparent power*4, *5 AC 4.5 VA 8 VA 9.5 VA Power consumption*4 DC 4 W 6 W 8 W Temperature rise*6 AC/DC 70/65C Glossary of Terms Coil specifications *1 Leakage: The value at

CA2

(2-color indication) Yes 12 V 24 V 2-wire Grommet Water resistant (2-color indication) With diagnostic output (2-color indication) Magnetic field resistant (2-color indication) IC circuit 5 V, 12 V 4-wire (NPN) P5DW 2-wire Lead wire length symbols: 0.5 m Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z In addition to the models in the above table, there are some other auto

ZX

(Individual exhaust for Pilot valve) L LN Connector (0.3 m) Connector (W/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (W/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) Rated voltage 1 3 100 VAC 110 VAC 5 24 VDC 6 12 VDC V Pilot valve DC: 1 W (With indicator light: 1.05 W) 24 VDC and 12 VDC are applicable to 0.45 W.

Table of Contents

Note 4) Assembly includes valve assembly, valve spring and stem assembly. 14-2-70 71 Filter Regulator Series AW10 to 40 Dimensions AW10/20 H M T Panel fitting dimension D N J Bracket (Option) Y S U W IN OUT B C Z Q P IN OUT V Plate thickness AW10, AW20: Max. 3.5 K F.R.L.

Hydraulic

G TT GA Air release GA M Width across flats G 4-J V V MM MM R (max.)

HRS100/150

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller 6977 [W] = 7.0 [kW] Water bath HEB Cooling capacity