Table of Contents To minimize the voltage drop, use 100/200 V AC and 24 V DC wires with the largest sectional areas possible and keep the wiring length as short as possible. 5. The 100/200 V AC wire must not be bundled with or arranged in close proximity with the input/output lines of control terminals or encoder signal lines. If possible, keep a 100 mm or larger distance from such lines. 6.
Heavy-duty cord 3-wire (PNP) MDSUA1 12 V Relay, MDSUA3 5 V, 12 V 5 V, 12 V, 24 V Parallel cord 24 V Grommet IC circuit PLC 2-wire 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100 V Heavy-duty cord Reed switch Parallel cord Heavy-duty cord 100 V 3-wire (NPN) 5 V, 12 V IC circuit Solid state switch Grommet 3-wire (PNP) 12 V MDSUA7 Relay, Connector Grommet Connector Grommet Connector Heavy-duty cord 2
10 k 67 k 1 0 to 10V Note 2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12
12 V Relay, PLC Yes Yes No Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V IC circuit 3-wire (NPN equivalent) A96V A96 5 V 24 V Grommet A93V A90V A93 A90 Relay, PLC 100 V 2-wire 12 V IC circuit 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches
CDRB2BWU15-S M5 x 0.8 M5 x 0.8 M3 x 0.5 18.5 29 25 M3 x 0.5 depth 5 CDRB2BWU15-D M3 x 0.5 DCDRB2BWU20-S M5 x 0.8 M5 x 0.8 25 36 25 M4 x 0.7 depth 7 CDRB2BWU20-D M5 x 0.8 CDRB2BWU30-S M5 x 0.8 M5 x 0.8 25 43 25 M5 x 0.8 depth 10 CDRB2BWU30-D M5 x 0.8 Note) For rotary actuators with angle adjuster and auto switch unit, connection ports are side ports only.
For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1
x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 0 to 0.7 0 to 0.7 0 to 0.7 0 to 0.7 10-V114 10-V114A 10-V124 Note 1) N.C.
state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V,12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indication) Relay, PLC Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire
Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method AS 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSl-M5l M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSl-U10/32l 10-32UNF VNote 4) V V V V V V AS-FE KE AS2ll1FSl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSl-l02 1/4 VNote 4) V V V V VNote 4) V V V V AS-FG R NPT Note 1) Sealant AS3ll1FSl-l02
12 V IC circuit 12 V 5 V 12 V 12 V Relay, PLC 24 V Yes Grommet Diagnostic indication 2-color display Grommet IC circuit A96 A93 A90 12 V 5 V 3-wire (NPN equiv.)
V 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) IC circuit A96V A96 5 V Yes 24 V Grommet A93V A90V A93 A90 100 V Relay, PLC 12 V 2-wire 100 V or less No IC circuit Solid state auto switches marked with are produced upon receipt of order.
C76
G G V V v p. 132 v p. 132 v p. 132 v p. 133 v p. 133 v p. 133 v Individual SUP V External pilot External pilot 11.5 V 16 V *1 Refer to Manifold Specifications on pages 17 and 18 for details on IP67.
24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz 4/2 5/3 (A/B R1/R2) 3 position Closed center Double Single Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal VQ130 0.73 0.84 Plug lead Cassette Plug-in Series VQ1000 Latching Latching Latching Latching Latching VQ131 1.0 0.84 P. 2-4-10 P. 2-4-8 VQ040 0.50 0.36 Series
PCB (With surge voltage suppressor) r Seal material t Orifice diameter and port size V V V Symbol Seal material N NBR F FKM E EPDM Symbol Orifice diameter [mm] Port size Size 10 20 30 101 1.6 1/8 V 201 2.4 1/8 V 301 3.2 1/8 V 302 1/4 V 303 3/8 V 402 4.0 1/4 V V 403 3/8 V V 502 5.6 1/4 V V 503 3/8 V V 702 7.1 1/4 V V 703 3/8 V V CS Conduit (With surge voltage suppressor)
VQC VQZ SQ VFS VFR +24 V +24 V VQ7 Power supply for output Power supply for output 0 V 0 V Power supply for the input and for the control unit of the Gateway Power supply for the input and for the control unit of the Gateway +24 V 24 V Caution 1. Take measures to avoid applying repeated bending force or pulling force to the cable.
F9PV 3-wire (PNP) F9B F9BV Relay, PLC 2-wire 12 V 24 V Yes Grommet F9NW F9NWV 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Solid state switches marked with are produced upon receipt of order.
(Note 4) 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 -10[V] CW direction Note 1.
0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V
0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V