ML1

4.5 X 1.9 SO-010-16 SO-010-16 C-100 NLP-25-19A RCS-8 GMY25 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 %9 Hard anodized Hard anodized Hard anodized M1L025-17A82076 M1L032-17A82077 M1L040-17A82078 Anodized Nickel plated Hard anodized Chromated Chromated (25only) M1L025-17B82076 C-6 P-6 M1L025-17B82076 C-7 P-6 M1L040-17B82078 C-9 P-8 4.7-10 Series ML1 Auto Switch Specifications Refer to p.5.3-2

VZS2000

Sub-plate Assembly Plug-in Non plug-in VZS2000-P-01 VZS2000-S-01 Component Parts Mounting bolt and gasket are not attached. : Thread type No.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ3B60 [N.O. valve x 2] SJ3B60 [N.O. valve x 2] SJ3B60K with back pressure check valve !0 y t r w e u w !2 i !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

1

x 1.25 (Plug) G K JA JB 10 PA + Stroke M10 x 1.5 S Q C + Stroke B + Stroke M10 x 1.5 MC (RA) 17 + Stroke J A+ Stroke x 2 Bore size (mm) ML OA OB OL P PA PB X XA YY YL Z NN PW Q S R T RR RB U RA XC XL VA VB XB 12 16 20 25 18 19 25 28.5 34 38 47 55 13 15 12.5 12.5 7 13 9 14 14 16 18 48 54 70 33 33 37 RB0806 RB0806 M4 x 0.7 3 3 10 10 50 56 3 3 6 6 6 6 5 5 37 38 3.5 M5 x 0.8 M12 x 1.5 41 46

One-touch Fittings

57.2 45.2 9 18.1 Q2 Q2 Round type P D 4 to 12 2 x N Q1 2 x O 3 x Applicable tubing *1: D is maximum diameter.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

Modular Type Air Filter Series AF

Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.

NVZseies

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

Process Pump

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A S LQ3 LQ3 fittings Caution 1.

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -