Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: 08 (One-touch Fitting ø8), VAC: F02 (Screw-in G1/4), EXH: 10 (One-touch Fitting ø10), Accessories: NS (w/o Standard Bracket, w/Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: 08 (One-touch Fitting ø8), VAC: F02 (Screw-in G1/4), EXH: 10 (One-touch Fitting ø10)

Body Option: 0 (Internal Pilot), Port Size: F02 (G1/4), Style: 01 (Roller Lever), Suffix: S (Roller Material Hard Steel)

Body Option: 0 (Internal Pilot), Port Size: F02 (G1/4), Style: 06 (Roller Plunger), Suffix: S (Roller Material Hard Steel)

Number of Ports: 2 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller)

Number of Ports: 2 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 06 (Roller Plunger), Suffix: S (Hard Steel Roller)

Number of Ports: 2 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 07 (Cross Roller Plunger), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 06 (Roller Plunger), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 02 (One Way Roller Lever), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 07 (Cross Roller Plunger), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: U (w/Bottom Mouinting Thread), Port Size: F02 (G 1/4), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller), Bracket: B (w/Bracket)

Compact manifold regulator ARM5 Series

S O O M4 thread hole U U C C P P K K 50 SMC 25 S L2=(14 x n)+13 29 55 (Max. 58) Note) U IN IN 33 14 Note) Max. dimension is the size when the knob is unlocked.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Connection threads Rc/NPT Model L1 L2 H G F M N E B Applicable tubing O.D.

VCA

173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161 172 3 138 149 174 185 158 169 202 213 L1 Side ported L2 VV2CA3 L1 Front ported L2 L1 Side ported L2 VV2CA4 L1 Front ported L2 (mm) Dimensions Electrical entry B C E F G H J1 J2 J3 K L M N A Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57

Vacuum Unit

Power consumption cost per year Annual air consumption Exhaust time Air consumption ZK2/With energy saving function 957 JPY/year 638 m3/year 0.6 s 58 L/min (ANR) Existing product 14,025 JPY/year 9,350 m3/year 6 s 85 L/min (ANR) Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 110 (Operating hours: 10 hours/day, Operating days: 250 days/year, 450 cycles/h, when 1 unit is used) Cost conditions

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specification Note 4) Value for the low power consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-

High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

Card Motor

Time [s] ta td tc Acceleration time: ta = Vc / Aa [s] Deceleration time: td = Vc / Ad [s] Acceleration distance: Sa = 0.5 x Aa x ta2 [mm] Deceleration distance: Sd = 0.5 x Ad x ta2 [mm] Distance with constant velocity: Sc = S Sa Sd [mm] Time with constant velocity: tc = Sc / Vc [s] Positioning time: tp = ta + tc + td [s] tp 0 3.5 7.0 10.6 14.1 17.6 oz 70,000 Maximum acceleration/deceleration