Series AP500

) 0 50 100 150 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

CA2

) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4

Clean Regulator

Clean air, N2, Ar, CO2, Pure water Fluid Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Grade B Air, N2, Ar, CO2, Water Air, N2 Port size Proof pressure 1.5 MPa Grade A Clean air, N2 Clean air, N2, Ar, CO2, Pure water Max. operating pressure 1.0 MPa Fluid Grade B Air, N2 Low pressure type High pressure type Air, N2, Ar, CO2, Water 0.02 to 0.2 MPa Set pressure

CM2

(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.

Table of Contents

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Series AK1000

) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

SV

= 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.

SX

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

Series SV

= Input block stations (Station n2) Light/Surge voltage suppressor L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 60 45.5 10 11.8 (for DIN rail mounting) (7.5) L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block Stations (n2) 0 1 2 3 4 5 6 7 8 185.5 210.5 223 248

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

AZ1000

) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Made to Order

/J79W/F7WV D-F7BA/F7BAV D-F7NT D-M9WV D-M9AV D-F7WV D-F7BAV D-A79W 10 15 10 + 15 (n2)Note) (n=4, 6...) 4.5 4 4.5 5 5 6 6 6 10 15 15 + 15 (n2)Note) (n=4, 6...)

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations