Compact Vacuum Ejector Series ZQ N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.
Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.
Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17
Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)
Fry] Dr EflStO S: D 6,41 ia3, (1221e4 i9 2.13 0021 5.16 (13r1 e4 (10) tfil 9,69 12161 2.43 tf4 3.t0 tE9 4.77 {rt2} (3t) 114 2.U t64 irnr.E in P!6inh.$3 NVS 4154 PABIA UsT c.nlr Ftu-ru.otro. !.r.or.r ar..r rtr-codrr. or .r.or ..d i.s (r.r.h.a {il.'!
Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.
O e p u t ) h c n I ( . n i M e l o h . a i d d a e r h T F N U l e d o M H ) . x e H ( D L A M . t W ) f g ( 4 / 1 1 / 5 6 8 1 0 0 7 0 E R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 6 . 0 ) 6 1 ( 2 5 . 1 ) 5 . 8 3 ( 0 6 . 0 ) 8 0 . 5 1 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 5 3 8 / 3 / 1 8 4 1 0 0 1 1 E R K 1 ) 4 . 5 2 ( 0 8 . 0 ) 3 . 0 2 ( 3 8 . 1 ) 2 4 ( 1 9 . 0 ) 3 2 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 3
Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !
AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.
AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.
3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG !9 AS-FP Meter-in type Meter-out type Meter-out type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.
D-M9A Auto switch Auto switch B A (22) 22 B A Hs Hs 24.5 ( ): For D-A96 type 16 16 A B A B Hs Hs D-C7 D-C8 D-C73C D-C80C D-H7 D-H7W D-H7NF D-H7BA D-H7C B A Hs B Hs A Auto Switch Proper Mounting Position Auto Switch Mounting Height Auto switch model (mm) (mm) RSQ D-H7BA D-H7W D-H7 D-H7C D-H7NF D-H7 D-H7W D-H7NF D-H7BA D-C7/C8 Auto switch model D-C7 D-C80 D-C73C D-C80C D-M9V D-M9WV D-M9AV
80 100 No. of auto switches mounted Type Auto switch model Auto switch model 32 40 50 63 80 100 2 (Different sides, Same side) D-Z7/Z80 Reed switch 15 25 10 10 11 11 12 D-Z7/Z80 10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 5 5 5 5 6 D-Y7BAL
10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 6 D-Y7BAL 5 5 5 5 5 2 (Different sides, Same side) 20 30 1 D-Y7BAL Center trunnion is not included.
Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20
switch Auto switch Ht Ht A A 32 B B L 9-6-20 21 Series MNB Cylinder with Lock Double Acting, Single Rod Proper Auto Switch Mounting Position D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5