Compact End Lock Cylinder Series CBQ2

Series CBQ2 Dimensions Standard type (through hole type)/CBQ2B, CDBQ2B (mm) With double end taps With double end taps: CBQ2A, CDBQ2A Bore size (mm) R1 R1 O1 thread R1 O1 32 M6 x 1.0 10 40 M6 x 1.0 10 50 M8 x 1.25 14 63 M10 x 1.5 18 DL With rear lock End lock mechanism (locking type manual release) LL 4 through H effective thread depth C 11 24 2 x 4O counter bore depth R End lock mechanism

Compact Electric Actuator Series LG1

x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B

Pneumatic Transfer System Series MF

MF32-SA Stroke 4-M6 x 1.0 thread depth 12 288 + Stroke 2 x 2-6.9 through, 2 x 2-11 counter bore, depth 6.5 35 (cylinder tube O.D.)

E-P HYREG ® Series VY1 1

Bracket (Option) VEX7-32A Hexagon socket head cap screw M6 =10 (4 pcs.)

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Seals Body(plate) material : PEEK Diaphragm material : EPDM Variations 2 Port 3 Port LVM200 LVM100 LVM20 LVM10 Effective area mm2 (Cv) 1.8(0.1) 0.63(0.035) 1.8(0.1) 0.72(0.04) Orifice size 2 1.4 2 1.5 Port size M6 M5 M5 M6 Applicable tube 6 x 4 4 x 2.5 N.C. (Normaly closed) O O O O N.O.

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

VEX1

204 204.5 222.5 120 222 VEX VEX5900/5901 AN AMC 5.1-34 VEX5 Dimensions Select style VEX5510/E5511 VEX5710/E5711 Port size E F G H I J L M P A Model R T U B C K N O Q S D A,P port Rc(PT) , ,1 R port Rc(PT) VEX5510 VEX5511 1 2 3 4 , ,1 1 2 3 4 50 25 10 7 25 173 80 60 98 Center 2-M6 X 1 X depth 9 160 150 79 53 13 18 100 60 116.5 70 Rc(PT) 1, 1 Rc(PT) 1 25 VEX5710 VEX5711 1 4 1 4 177.5 167.5

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Series 10-MGF ø40, ø63, ø100 Guide Table

M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

x 1 10 M6 x 1 12 5.1 4H9 4 27.4H9 3 M6 x 1 12 M5 x 0.8 AM AL AN AP AQ AR AS AT AU AV AW AX AY AZ Model 1122112211221122+2.2 0 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 0.2 +0.5 0.2 +0.5 0.2 +0.5 0.3 +2.2 0 +2.2 0 +2.2 0 +2.5 0 MHZ2-10D 5.7 3 M3 x 0.5 M3 x 0.5 M3 x 0.5 11.2 15.2 5.7 9.7 2.5 4 +2.2 0.2 +2.2 0.2 +2.5 0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1

Rotary Actuator/Vane Type

Q1 = M Applicable shaft type: W Applicable shaft type: W Q2 = M L1 = Y = X = L2 = [mm] Size CRB2, CRBU2 Y L2 max Q2 10 7 to 8 Y-3 M4 15 8.5 to 9 Y-3.5 M5 20 10 Y-4 M6 30 13 Y-5 M8 40 15 Y-6 M10 [mm] Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 9 to 14 X-5 M4 7 to 14 X-3 M4 15 11 to 18 X-6 M5 8.5 to 18 X-3.5 M5 20 13 to 20 X-7 M6 10 to 20 X-4 M6 30 16 to 22 X-8 M8 13 to 22 X-5 M8 Symbol: A5

MVGQ

x 1.0 15 9 47.5 37.5 12 30 35 88 21 21 32 14 2 42 M6 x 1.0 15.5 26 70 38 86 2 62 76 M6 x 1.0 56 10 125, 150, 175, 200 Series VZ3000 25, 50, 75, 100, 32 M8 x 1.25 20 11 47.5 37.5 16 114 25 26 38 16 35 51 M8 x 1.25 22 30 96 48 112 2 1 80 100 M8 x 1.25 80 5 125, 150, 175, 200 Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing

CXT

23 55 53 28 M8 x 1.25 10 86 6.9 9.5 16 PA Bore size (mm) M MM (N) (NA) NN PB PW Q QW RB RW S T U W X Y Z 12 M4 x 0.7 M8 x 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 x 0.8 M8 x 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 x 1 M10 x 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411

Guide Table Series MGF ø40, ø63, ø100 1

Model Bolt Maximum tightening torque (Nm) l (mm) MGF40 MGF63 MGF100 7.5 10 M6 x 1 9 25 M8 x 1.25 9 51 M10 x 1.5 Mounting from bottom side Model Bolt Maximum tightening torque (Nm) l (mm) MGF40 MGF63 MGF100 7.5 18 M8 x 1.25 Example) 9 36 M10 x 1.5 9 65 M12 x 1.75 2. When mounting a workpiece to the cylinder, do so only when the piston is retracted.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

MLGC

86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 37 40 160 50 140 30 16 17 depth 12 37 95 10.5 M10 x 1.5 depth 20 19 22 142 110 42 45 80 35 194 170 19 Data J K L H I GR O GK GL GQ N S P GD M Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

PA 25 50 P 5/16-24 UNF 7/16-20 UNF N 4.5 7.5 M 6 8 MM M4 x 0.7 M6 x 1 LW 69 115 Model CYV15 CYV32 Note) Refer to Cushion Effect (Sine Cushion) and Stroke Adjustment under Specific Product Precautions on page 8-18-11. 8-18-9 9 Series CYV Specific Product Precautions 1 Be sure to read before handing.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

(4 locations) 24 8 20 15 65 (63) 132.5 Cable length 250 24 Motor cable 65 (3) 15.2 (2.4) (94) (73.5) 5H9 (+0.030 +0 ) depth 8 (Depth of counterbore 3) C-C Lock cable Cable length 400 65 Body mounting reference plane Cable length 250 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) (8.5) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth

1

0.7 depth 5.5 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6