Table of Contents

-4-34 to 14-4-38.

HRS100/150

HRS 090 4 h HRS 100/150 HRS 100/150 2 h Caution 1 h HRSH 090 4 min 6 min 10 min 14 min 20 min 30 min 1. Power supply and communication cables should be prepared by user. HRSH 2. Provide a stable power supply which is not affected by surge or distortion.

AZ1000

: 1/4 inch face seal male) Specification Standard Sub-atmospheric Code No code Q HR No code A 0 4) Not available with AZ1402T and AZ1406T. -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig V3 L 1 H 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0

LEY-OM007

s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 0.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1 ABS 100 50.00 3000 3000 0 0 0 100 10.00 20.00 0.50 2 ABS 100 30.00 3000 3000 80 40 30 100 10.00 20.00 10.00 1 No.0 No.2 [mm] k [mm] c 40[mm] 0 10 20 30 40 50 [mm] 1 No.1 No.2 [mm] c [mm] k 20[mm] 0 10 20 30 40 50 [mm] -29- 1 1. 2 3No.1 4.No.2 5. 1 SVON(ON) SVRE(READY) 2 SETUP SETON INPIN

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 ABS 100 30.00 1000 1000 0 0 0 0.5 2 ABS 100 10.00 1000 1000 0 0 0 0.5 1 3 4 1 CIR-L 100 0.00 1000 1000 0 0 0.5 2 CIR-L 40.00 0 0 0.5 2 3 0.00 4 20.00 1 CIR-R 100 0.00 1000 1000 0 0 0.5 2 CIR-R 0.00 0 0 0.5 3 3 0.00 4 20.00 () 2 Step3

CP95

4 4 6.5 26 146 190 46 32.5 15 4 40 24 35 16 G 1/4 14 M6 x 1.0 6.5 M12 x 1.25 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 M16 x 1.5 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 M16 x 1.5 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 80 40 45 25 G 3/8 19 M10 x 1.5 10 M20 x 1.5 21 38 16 128 8 4 11.5 14 46 218 300 95

CP95

15 4 4 4 6.5 26 146 190 46 32.5 M12 x 1.25 40 6.5 16 105 24 13 35 16 27 G 1/4 14 M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121 32 45 16 20 31.5 G 3/8 16.5 M8 x 1.25 6 24 5 4 9 12 37 194 259 75 56.5 M20 x 1.5 80 10 16 128 40 45 21 38 25 G 3/8 19 M10 x 1.5 8 30 5 4 11.5 14 46 218 300

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4

SFOD-OMT0009CN

ABS 100 100.00 1000 1000 1 0 0 5.0 2 ABS 100 100.00 1000 1000 1 0 0 5.0 1 3 ABS 100 100.00 1000 1000 1 0 0 5.0 4 ABS 100 100.00 1000 1000 1 0 0 5.0 1 ABS 50 50.00 1000 1000 0 0 0 0.5 2 ABS 50 50.00 1000 1000 0 0 0 0.5 2 3 ABS 50 50.00 1000 1000 0 0 0 0.5 4 ABS 50 50.00 1000 1000 0 0 0 0.5 4 No.2 () No.1 () M M 0mm 50mm 100mm 62 No.SFOD-OMT0009CN-B () 1)No.1(IN0ON) 2)DRIVEON

CLS

CNG 110 150 2 35 110 150 100 D-A3 D-G39 D-K39 MNB 150 + 30 (n 2) n = 2, 4, 6, 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1

Compact Cylinder with Air Cushion

73 55 30 to 100 M FV 80 11 11 99 116 134 20 53.5 77 83.5 63.5 40 to 100 100 11 11 117 136 154 22 53.5 94 98 76 40 to 100 4-FD FT L FX FZ B + Stroke A + Stroke Rod end male threads Rod end nut L1 Rear flange type/RQG, RDQG Rear flange type mm Bore size (mm) Stroke range (mm) L1 L A FV M 33.5 8 63 72 30 to 100 43.5 10 80 84.5 40 to 100 B + Stroke 4-FD 43.5 12 100 99 40 to 100 L FT FX FZ A +

Guide Cylinder Series MGG

4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

PF2A/PF2W

PF2W504--1 PF2W520--1 PF2W540--1 PF2W511--1 PF2W504--2 PF2W520--2 PF2W540--2 PF2W511--2 4 0.5 4 0.5 16 2 16 2 40 5 40 5 100 10 100 10 16-11-24 21 Series PF2W Digital Flow Switch For Water Dimensions: Remote Type Display Unit for Water PF2W3-A Panel mounting type Internal circuit and wiring example to are terminal numbers.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n 2) 2 100 + 30 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 90 + 30 n = 4, 8, 12, 16 2 95 + 30 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 115 130 20 120 125 n D-Y7BAL 20 + 45 n = 2, 4, 6, 8 (n 2) 2 (n 4) (n 4) (n 4) (n 4) 2 115 + 45 n = 4, 8, 12, 16 120 + 45 n = 4, 8, 12, 16 125 + 45 n = 4, 8, 12, 16 130 + 45 n = 4, 8, 12, 16 2 2 2 6-9-8

MY1

MY1MW16 MY1MW16 MY1MW16 MY1MW16 1 0.1 MY1MW16 MY1MW16 MY1MW16 0.3 0.2 100 200 300400500 1000 1500 0.05 0.5100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1MW MY1MW: m3 MY1MW: m2 MY1MW: m1 30 100 200 20 40 50 100 10 30 50 20 40 4 5 30 MY1MW63 MY1MW63 MY1MW63 MY1MW63 3 10 Load weight (kg) Load weight

Industrial Filters

270 710 1305 1705 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 1000 24 340 171 560 400 270 710 1570 1970 100 150 FGAC FGAS 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 760 22 500 24 330 131 620 450 270 720 1055 1455 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 760 22 750 24 380 173 620 450 270 720 1315 1715 100 150 65 (2 1/2B) 80 (3B) 100 (4B

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

ZP

5 3 x 4 4 x 8 3 x 6.5 4 x 9.5 18 34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB