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Refer to the dimensions on page 20 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 40 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5

Ionizer

L 1000 mm 2000 mm 3000 mm 4000 mm 5000 mm 7000 mm 10 mm IZS31-CF01-X210 IZS31-CF02-X210 IZS31-CF03-X210 IZS31-CF04-X210 IZS31-CF05-X210 IZS31-CF07-X210 IZS31-CF10-X210 Connection cable from the right-hand side of the control unit Frequency selection switch 12P modular jack (Plug for power cable) 190 36 16 30 Order connection cables separately.

44

Applicable tubing 19 17 31.2 15.2 8.5 36 24 22 37.7 20.5 9.3 71 Union Nut: KFG2N Applicable tubing O.D.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

36 15.2 1/4 1/4 AS321F-02-06 AS221F-02-11 6 3/8" 12.8 17 35.3 21 18.8 44.5 27.8 36 60 18.5 39.3 AS321F-02-08 AS321F-02-07 8 1/4" 15.2 18.5 27.8 17 41 29.5 39.3 63 13.2 60 48.3 43.3 42.8 37.8 21.3 23 AS321F-02-10 AS321F-02-09 10 5/16" 23 18.5 21 43.3 31.8 37.8 67 18.5 63 29.5 43.3 42.8 15.2 41 21.3 48.3 AS321F-02-12 AS321F-02-11 12 3/8" 20.9 22 31.8 44.3 32.8 69 43.3 21 67 17.9 19 19 AS321F

Compact Manifold Regulator

position IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1/4 3/8 5/32 1/4 5/32 1/4 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36

CEx-OMI0064

. # 0 0 T S [CR] No. 0 2ROM 1 E SMC 2ROM 2 E , )10 1 36 - # 0 0 E E [CR] No. ,2 0 1 , 0 2 , 0 3 0 4 0 5 OFF , 0 6 () 0 7 () 0 8 () 0 9 () 37 - 9 BCD CEU5B-BCD (1) BCD : D-sub (CEU5B-D ) DX10M-36S(HRS ) (2):DX30AM-36P(:HRS ) DX30M-36-CV(:HRS ) ()(), ,ASSY MISUMI SHPT SHPT-H-A-36SHPT-HH-A-36:0.250(m) (3) 18 (DX10M-36S) 19 36 -2 Bit0 19 D12 10 1 Bit0 1 D0 10 -2 Bit1 20 D13 10

LEY-OM007

LEY-OM00701 / // LEY Series LEY LEYG LEYG Series () LEY Series () LEC Series /LEC6 . 2 /. 3 .3 .4 .6 /LEY. 9 .9 .11 .12 /LEYG. 13 .13 .15 .16 . 17 .17 .17 .20 .32 . 35 . 36 .36 .37 .38 .39 .40 .40 . 41 .41 .41 .44 .45 .47 . 48 -1- LEY / (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

JXCx-OMT0005CN

3 109 Get 1 4 110 Get/Set 2 111 Get/Set 2 112 Get/Set 1 113 Get/Set 2 114 Get/Set 2 115 Get/Set 4 116 Get/Set 2 117 Get/Set 2 118 Get/Set 2 119 Get/Set 2 120 Get/Set 2 121 Get/Set 4 1 122 Get/Set 4 2 123 Get/Set 4 124 Get/Set 1 IO *1 Polled I/O IO Output Input 0 4 byte 4 byte 1 10 byte 2 20 byte 3 12 byte 4 byte 4 10 byte 5 20 byte 6 20 byte 4 byte 7 10 byte 8 20 byte 9 36

SFOD-OMT0005CN

(DC24V) : DC24V10% 130mA () A/B (800 /) EEPROM LED L/A1 1 L/A2 2 LED PWR ALM MS NS 20m 0 oC40 oC() 90%RH () 50M(DC500V) 210g() 230g(DIN ) [EtherNet/IP ] EtherNet/IP TM(CT-12) 10/100Mbps() Ethernet (CAT5 100BASE-TX) /() EDS 36 /36 IP 192.168.1.1254 DHCP ID 7h(SMC Corporation) 2Bh(Generic Device) D1h -12- 3.2 1 LED 2 P1P2 EtherNet/IP 3 IP IP X1X10X100 EtherNet

LECA6_C

PLC (PLC) 15ms30ms /P.36 8.4 USB USB PC USB USB LEC-W2 COM PC COM COM COM COM PC COM LEC-W2 (LEC)== (LEC-W2) =USB =PC (LEC) OFF PC (LEC)(PLC )(PC ) 64 - 16.2 () /P.28 7. /P.11 3. CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.11 3. PLC (PLC) 15ms30ms /P.36 8.4 () () (LED()) /P.12 3.2 /P.28 7. /P.28 7. /P.28 7. /P.11 3.

LECP6_C

PLC (PLC) 15ms30ms /P.36 8.4 USB PC USB USB USB LEC-W2 COM PC COM COM COM PC COM COM LEC-W2 (LEC-W2) (LEC)== =USB =PC (LEC) OFF PC (LEC)(PLC )(PC ) 64 - 16.2 () /P.28 7. /P.11 3. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.11 3. PLC (PLC) 15ms30ms /P.36 8.4 () () (LED()) /P.12 3.2 /P.28 7. /P.28 7. /P.28 7. /P.11 3.

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

W Front trunnion: CBM2U N L MGP MGQ MGG MGC MGF (mm) Clevis Flange Axial foot Trunnion Bore (mm) Stroke range Stroke range Stroke range Stroke range CY1 Z ZZ Z LH LS B C2 RR B LC LD LT LX LZ X Y Z ZZ FD FT FX FY FZ L U Z ZZ TD TT TX TY TZ CD CX CZ Front Rear Front Rear Front Rear Front Rear MY1 20 25 32 40 400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36

l

With auto switch Basic/CS1BQ (mm) Bore (mm) 125 140 160 Stroke range (mm) S A H AL ZZ lB lC D E F G J K KA M MM N P 1/ 2 to 1000 98 50 110 47 235 145 115 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 1/ 2 to 1000 98 50 110 47 235 161 128 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 3/ 4 256.5 to 1200 106 56 120 53 182 144 40 90 43 18.5 M16 X 1.5 17 36 30.5 M36 X 1.5 39 CS1BQ125SCS1125, #1 CS1BQ140SCS1140

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

20 21 11.4 3/16" 17 (17.5) 1/4 AS221F-02-07 AS321F-02-06 18.5 6 12.8 27.8 34.5 35.4 29.4 40.4 25.2 34 17 60 39.3 13.2 18.5 34.4 1/4" AS221F-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67 31.8 3/8" AS321F-02-07 AS321F-02-12 20.9 12 44.3 17 39.3 27.8 22 69 32.8 60 13.2

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 12.3 22.1 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1 21.3 18.3 11.7 16 27.5 20.4 9.3 12.7 17 14.3 32.1 31.1 27.1 16.5 18.5 21 16 17 18.5 30.2 31 32.4 34.4 34.2 34.5 36.4 43.2 23.1 23.9 25.3 25.2 24.9 25.2 27.2 33.9 14.2 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 36.1 12.7 NPT 1/8 19 21 15 32 18.2 34 34.4 35.4 29.4 18.5 40.4 17.5 NPT 1/4 36

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69

AS-FG/ASD-FG

21 33.9 43.2 18.5 10 13.2 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 27.2 36.4 AS321FG-02-06 AS221FG-N02-09 60 17 27.8 39.3 12.8 6 15.2 5/16" 20 21 36 33.9 43.2 AS321FG-02-08 AS221FG-N02-11 63 18.5 29.5 41 15.2 8 17.9 3/8" R(PT) 1/4 23 43.8 48.8 21.8 19 42.8 37.8 27.8 39.3 AS321FG-02-10 AS321FG-N02-07 67 21 31.8 43.3 18.5 10 13.2 1/4" 17 60 NPT 1/4 19 21.8 29.5 41 AS321FG-02-12 AS321FG-N02-09

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VZ VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.