MHK2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC MHT MHY MHW MRHQ Misc.

Series IDG

0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow rate

3 Port Solenoid Valve Series VQ100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option VT External non-leak Latching Negative COM AC Normally open Vacuum VP VG VP S070 VQ VKF VQZ VZ VS VFN Copper-free The fluid contacting section is copper-free and the standard style can be used as it is.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Value in the initial state) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series AN03 100 m 25 dB (A) Page 5-10-3 Metal case type Exhaust in only one direction. Prevents scattering of mist and noise.

CE2

For safety measures Stroke reading cylinder with brake + Counter MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Prevents dropping from raised positions during intermediate stops.

ML2B

6 e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

REC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 20 mm n n pcs.

LG1H

Refer to pages starting with 181 for mounting. 3-8H10 depth 10 30 A B Stroke Model LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 350 450 550 650 750 850 370 470 570 670 770 870 500 600 700 800 900 1000 95 B 100 95 8-6.2 110 95 20 95 A Positioning Time Guide Positioning time Positioning time (sec.)

10

Operating range 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Intermediate strokes are available. (No spacer is used.)

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting Caution 1. Do not scratch or gouge the mounting surfaces of the body, table and end plate.

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Up to 1000 Up to 800 Up to 1000 Up to 1000 Up to 800 Up to 1000 Up to 1000 Max. speed (mm/s) 20 Selection graph (6) (7) (8) (9) (10) (11) (12) 25 32 Caution If the cylinder is horizontally mounted and the plate end does not reach the load's center of gravity, use the formula below to calculate the imaginary stroke l that includes the

MLU

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Built-in magnet 2 pcs. 1 pc.

CY1

25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

3 Port Solenoid Valve Rubber Seal Series SY100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT 100 million cycles or more (By SMC life test data) VP VG VP S070 VQ VKF VQZ Available in vacuum applications VZ (Up to 100 kPa) VS Copper-free VFN No copper used for sections in contact with fluids.

VP300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 standard 7 1 2 In the case of external pilot type of body ported type, A is only available.

Pressure Gauge Guide

(Black) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com The arrow in the diagram indicates the direction of the pressure increase.



.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX Manifold capable Rich line-up AMR VVEXB/Rc 1/8Up to 10 stations VVEX2/Rc 1/4Up to 8 stations Port sizes available from M5 to Rc 2, most flow rates and pipes can be accommodated.

ZSE30/ISE30

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data With One-touch fittings are newly introduced.

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY Type Without buffer With buffer Page ZQ Mounting Vacuum entry port Mounting Vacuum entry port ZF Male thread Female thread Series ZPT ZP Buffer body (Male thread) 13-11-72 to 13-11-76 Vertical vacuum entry Female thread ZCU Female thread Common