High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

MY2

Piston speed mm/s Piston speed mm/s Piston speed mm/s 10 Mechanically Joint Type Rodless Cylinder Series MY2C Cam Follower Guide Type/16, 25, 40 How to Order Cam Follower Guide Type MY2 G 16 C 300 L F9N Number of auto switches Guide suffix C Cam follower guide Nil S n 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight kg Load weight kg m s m s Type of impact s m 1 2 m2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact

Microspeed Cylinder

(1mm/s for 16 or smaller) Operates smoothly with minimal stick-slip CJ2XB10-60 CQSXB20-20D Average speed 0.85mm/s Average speed 0.88mm/s 2.0 Average speed 0.43mm/s Average speed 0.43mm/s 2.0 Speed waveform Speed mm/s Displacement mm Speed waveform Speed mm/s Displacement mm 0 0 Operating direction in Operating direction out Operating direction in Operating direction out 2.0 -2.0 60 40 Displacement

CJ2X/CUX/CQSX/CQ2X/CM2X

(1 mm/s for 16 or smaller) is achieved.

CJ2X/CUX/CQSX/CQ2X/CM2X

(1 mm/s for 16 or smaller) is achieved.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

Gun Type Ionizer

0.5 s 1 s 1.5 s 2 s 2.5 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 3) Supply pressure: 0.2 MPa Flow rate consumption: 188 L/min (ANR) 4) Supply pressure: 0.3 MPa Flow rate consumption: 253 L/min (ANR) 200 200 150 150 2.5 s 2 s 100 100 50 50 0.5 s 1 s 1.5 s 2 s 0.5 s 1 s 1.5 s 50 50

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

JXCx-OMT0005CN

TB PLC 0 No. 3 ABS 1 INC 2 *1 (mm/s) (-) (+) mm 42 - 1 mm/s 2 1 mm/s 2 100% * *1 0 1100 1100 INP ON INP ON *1 1100 ( mm/s) *1 * *1 (mm/s) * (-) (+) AREA ON mm 1122 AREA ON 1 1 *1(1)2(2) 1=2=0 AREA OFF 2 2 (-) (+) 43 - mm mm INP ON INP ON *1 * INP ON () INP ON *1 44 - 11.2 ID ID 132 ID () IO IO * [64 ] * [] S S * (+) (+) *1 + mm (-) (-) *1

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg m s m s Type of impact s m 1 m 2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with the

OMR0031

time: tp = ta + tc + td [s] 0 0 250 500 750 1000 (Add settling time to the Positioning time to get the total Load Ma[g] positioning time).

PF2A/PF2W

or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

RB/RBL/RBQ

R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.

CLA

Stop Accuracy (Variation in control system is not included) (mm) Piston Speed (mm/sec) Type of locking SO 100 300 500 I 2 .0 Spring lock O .4 O .S 1.0 Air pressure lock Spring-Air pressure lock O .2 O .3 O .S 1.S Condition/load: 25% of thrust at Skgf/cm2 Solenoid valve: Mount on lock-port Max. piston speed: 500mm/sec If the application is within the allowable kinetic energy specified, the

Wireless System

Min. bending radius 45.5 mm 18 EX600-W Series u Power Supply Cable with M12 Connector (A-coded) EX500-AP 050 S Connector specification Cable length (L) 010 1000 mm 050 5000 mm S Straight A Angle Straight connector type Angle connector type M12 14.9 14.9 1 M12 5 1 2 2 6 6 28.3 5 4 3 4 3 30 5 50 40.7 27 30 5 50 L 25.3 Socket connector Socket connector pin arrangement pin arrangement L A-coded

Compact Guide Cylinder End Lock Type SeriesMGP

40, 50, 63 P P P P P P P P P P P P MGPL Ball bushing Front lock Locking type Series MGP How to Order MGP M H Z73 N 100 32 Compact guide cylinder Number of auto switches Nil S 2 pcs. 1 pc.

EXxx-OMZ0016

number. *2: Select a protocol before performing pairing (V.2.0: 1 Mbps, V.1.0: 250 kbps).

IC

Note) If the set pressure is 250 kPa and the output pressure on the pressure sensor is 245 kPa, the deviation is 250 245 = 5 kPa. In order to correct the deviation, the controller increases the output signal until the pressure on the pressure sensor converges at 250 kPa. Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

50 100 200 300 500 700 Average speed Va mm/s Collision speed V mm/s Note) Use average speed to calculate static moment.