Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com New Concept Connector Type Manifold 1-2-1 2 New Concept Connector Type Manifold Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 Product is CE compliant with standard part number.

Low torque Metal seal type Rotary joint Series MQR

Fixed (Body) 0.003 to 0.20 N.m or less 0.003 to 0.20 Low rotational torque 0.003 to 0.20 N.m or less Low rotational torque Rotary Joint Turntable Allowable RPM 600 to 3000 min-1(r.p.m) Allowable RPM 600 to 3000 min-1(r.p.m) 600 to 3000 Drive (Adapter plate) Drive motor Application of adapter plate drive Not suitable for transmission of drive Series MQR Low torque Metal seal type Rotary joint

Soft Start-up Valve AV2000/3000/4000/5000

Soft Start-up Valve A V2000/3000/4000/5000 New New Series AV5000 introduced!

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19

MQQ

C J G5-S 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Weight/Standard Type: MQQT Supply pressure 0.3 MPa CV 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa (g) Note 1) Use clean, dry air with no freezing.

ARM10/11

Inlet pressure (MPa) 14-4-56 39 Series ARM2500/3000 Manifold Regulator Modular Style Construction F.R.L.

CLS

100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa ) P < 0.5 MPa 0.4 MPa ) P < 0.5 MPa CLS 4000 4000 250 CLQ 3000 3000 200 MLGP 2000 2000 180 160 RLQ 250 Load weight: m (kg) Load weight: m (kg) 140 1000 1000 700 800 900 700 800 900 125 200 MLU 180 600 600 160 400 500 500 ML1C 140 400 125 D300 300 200 200 -X 20[Example] 100 100

CNS

200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Please contact SMC if the maximum stroke will be exceeded.

HRX-OM-W002

Ambient temp. or or Ambient temp. or or Facility water temp. 3000 Facility water temp. or or Facility water temp. 3000 Facility water temp. or Facility water temp. Facility water temp. 2000 2000 2000 2000 Facility water temp. Facility water temp. 2000 2000 Cooling capacity[W] Cooling capacity[W] Facility water temp.

CE

70500mm/s 5,12 5,12 6 4,5 CE1B12 () (500 3000) 7 14 69+ 93.5+ CE1B20 () 2x5.5 (500 3000) 4xM6x1 15 14 78+ 106+ CE1B32 4x5.5 (500 3000) 8xM6x1 20 90+ 131+ () 14 CE1B40 (500 3000) 4x5.5 8xM6x1 20 136+ 177+ 14 () CE1B50 (500 3000) 4x6.6 8xM8x1.25 20 144+ 193+ () 14 CE1B63 4x9 8xM10x1.5 20 (500 3000) 145+ 194+ () 14 2004 12 A 2014.4 B 2017.8 C 2017.11 4-14-1, Sotokanda

MQQ

Piston speed (3) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage MQQ M 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa RHC Note 1) Use clean, dry air with no freezing.

Cylinder with Lock Series CLS

0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 125 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Gragh 7 Gragh 4 0.5MPaP 0.5MPaP 3000 3000 2000 2000 160 140 125 1000 1000 700 800 900 700 800 900 Load weight:

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

5 Port Solenoid Valve Series SV

5 Port Solenoid Valve Series SV Lateral Plug-In Style Manifold 4 Position Dual 3 Port Valves Available Accomodates Gateway Type Serial Wiring Manifold Option Conforming to IP65/IP67 New Concept New Concept Connector Type Manifold Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 The use of multi-pin connectors to replace wiring inside manifold blocks

Soft Start-up Valve AV2000/3000/4000/5000 1

1 Soft Start-up Valve AV2000/3000/4000/5000 F.R.L.

ARM10/11

Inlet pressure (MPa) 14-4-56 39 Series ARM2500/3000 Manifold Regulator Modular Style Construction F.R.L.

Pressure Control Equipment

Bracket Pressure gauge to 1 2 1 8 / / 14-5-15 Vacuum regulator IRV1000/2000/3000 Able to adjust the pressure for vacuum line Bracket Pressure gauge 100 to 1.3 kPa 14-6-1 M5 to 2 0.01 to 0.7 0.05 to 0.7 1 8 3 0 / Precision regulator VEX13 Large capacity exhaust regulators Setting sensitivity: 0.2% F.S. Repeatability: 0.5% F.S. Bracket Foot Pressure gauge Silencer 14-4-2 2 F.R.L.

Basic Type/Direct Mount Type

32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

MY1

For long stroke operation involving vibration and impact, the use of side supports is recommended even if the spacing value is within the allowable limits shown in the graphs. 0 1000 2000 3000 4000 0 1000 2000 3000 4000 Support spacing l (mm) Support spacing l (mm) 2. Support brackets are not for mounting.