Table of Contents

6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported

CQ2

Built-in magnet Pneumatic Air-hydro Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 3/8 Rc(PT) 3/8 M5 X 0.8 M5 X 0.8 M5 X 0.8 M5 X 0.8 Screw-in style Piping Rod end male thread Rod end male thread Rubber bumper Through-hole (Std.)

VQ5000

B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed D U D side entry U side entry When two or more symbols are specified, indicate them alphabetically.

VS 8-2/VS 8-4

The dimension is added by 47 mm at 1 piece addition. 7/8 inch connector type Rc, G (According to ISO1179-1), NPTF 1/8" Pilot port 2 x Rc, G (According to ISO1179-1), NPTF 3/8" 3(R) port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port M4 x 7 earth thread 56.6 11.5 8 30 57.5 82 35.5 31.3 22 28.5 181.5 11.3 13.5 19 2 x Rc, G (According to ISO1179-1), NPTF 3/8" 1(P) port 2n x Rc,

2/3 Port Valve

1 2 Rc 3 8 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 Port size 7.1 14.3 3.9 5.2 6.2 7.3 8 10.6 9.5 13.5 15.8 8.7 Orifice size Effective area Cv factor Pilot port size 41mm2 58mm2 112mm2 7.2mm2 13mm2 18mm2 25mm2 30mm2 43mm2 86mm2 120mm2 22mm2 Flow rate 1.2 2.3 3.2 6.2 0.4 0.7 1.0 1.4 1.7 2.4 4.8 6.6 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Rc Weight Face-to-face

Stopper Cylinder

across flats K T 0 0.1 E W M D E 2 x N through 4 x O counterbore 2 x P (Rc, NPT, M thread) Stroke A + 2 stroke B + Stroke V H + Stroke Width across flats K T 0 0.1 Y M Q F D E A + 2 stroke B + Stroke V H + Stroke Width across flats K M T 0 0.1 D E 2 x P (Rc, NPT, G) A + 2 stroke B + Stroke V H + Stroke Width across flats K M Q F Z Stroke 2 x P (Rc, NPT, G) M E J Q F Z Stroke 32 40 50 RSQB

70pvpump

LVD PAX1000, PA3000, PA5000 LVQ Proper tightening torque (Nm) Connection threads Rc 1/4 12 to 14 LQ Rc 3/8 22 to 24 LVN Rc 1/2 28 to 30 Rc 3/4 28 to 30 TI/ TIL 3. Ensure space for maintenance. When installing and mounting, be sure to allow the space required for maintenance and inspections. Confirm the necessary maintenance space in the instruction manual for each piece of equipment.

PA3000/5000/PAX1000

3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10 Process Pump Automatically Operated Type with Built-in

Process Pump Series PA3000/5000/PAX1000 Series PB1000

3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10 Process Pump Automatically Operated Type with

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

F Nil Rc G N T NPT NPTF Brackets are not installed.

Digital Flow Switches

Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 2. Apply wrench only to the metal part of the pipings when installing the flow switch onto the system piping. Do not apply wrench to anything other than the piping attachment as this may damage the switch. 3.

PF2A/PF2W

Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Supply voltage > Internal voltage drop of switch Minimum operating voltage of load 2. Apply wrench only to the metal part of the pipings when installing the flow switch onto the system piping.

4/5 Port Air Operated Valve Series SYJA3000

Nil : : Nil Rc Single solenoid coil is on same side as the A, B port.

A

(PT)* Remove (N) when ordering N NPT D I M E N S I O N S (N)AP S E R I E S ACCESSORIES SERIES (N)AP100 Bracket B21-1P Rc Courtesy of Steven Engineering, Inc. !

Micro Mechanical Valve Series VM1000

VHK 3 x 4.5 mounting hole 5 x Rc 1 4 VH Toggle lever VFM250-02-08 Panel mounting hole VHS 2 x M18 x 1 Hexagon nut thick 5.5, across flats 24 VHS Max. 7.5 M5 x 0.8 (Pilot exhaust port) Symbol (B) 2 (A) 4 12 14 3 (EB) 1 (P) 5 (EA) 5 x Rc 1 4 0.5 MPa supply T.T. 15 N F.O.F. 3 x 4.5 mounting hole 40 2339 Series VFM200 Series VFM200 Push button (Mushroom) VFM250-02-30R/B/G/Y Panel mounting hole

Modular F.R.L. Unit

pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 4000 6000 8000 2000 10 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AC25 Rc 3/8 AC55 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 500 1000 1500 4000 6000 8000 2000 10 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AC30 Rc 3/8 AC60 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa

Digital Flow Switches, Series PF2A, Series PF2W

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Possible to transfer a workpiece at low-speed.

1/8 M10 x 1.5 15 M6 x 1 M10 x 1 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 Rc 1/8 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 In addition to Rc 1/ 8, G 1/ 8, NPT 1/ 8 and NPTF 1/ 8 are also available. 338 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Auto Switch Proper Mounting Position

Series HAW Water Cooled Aftercooler 1

Rc 1/2 Rc 11/2 Rc 2 3B flange Rc 11/4 Rc 1 32 67 78 Rc 1/2 Rc 1/2 Rc 3/4 Rc 3/4 Rc 1 Rc 3/4 Weight (kg) Coating color Drain valve (1 pc.) 9.7 11.5 59 95 High efficiency drain Drainage is efficiently removed by built-in drain separator. Visible outlet air temperature Outlet air temperature is easily checked by thermometer, resulting in easy maintenance.

Lubrication Equipment

(PT)1 Rc(PT)2 3 inch flange Stable oil feeding with a micromist Port size (Body) IN: Rc(PT) OUT: Rc(PT) Air 1.5MPa 0.4 to 1.0MPa 0.05 to 0.2MPa 5000 Turbine oil class 1 ISO VG32 5 to 50C Epoxy resin with glass fiber, Polycarbonate 28 AU 1 4 1 2 Fluid AF Through the use of a booster, a pressure that is higher than that of the main air passage can be supplied.